IT1055303B - Apparecchiatura di rivelazione perfezionata per strumenti di scansione a fascio di elettroni - Google Patents

Apparecchiatura di rivelazione perfezionata per strumenti di scansione a fascio di elettroni

Info

Publication number: IT1055303B
Authority: IT; Italy
Prior art keywords: perfected; detection equipment; electronic band; band scanning; scanning instruments
Prior art date: 1975-03-06

Application number

IT20228/76A

Other languages

English (en)

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-03-06

Filing date

1976-02-17

Publication date

1981-12-21

1976-02-17 Application filed by Ibm filed Critical Ibm

1981-12-21 Application granted granted Critical

1981-12-21 Publication of IT1055303B publication Critical patent/IT1055303B/it

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
General Physics & Mathematics (AREA)
High Energy & Nuclear Physics (AREA)
Molecular Biology (AREA)
Spectroscopy & Molecular Physics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Measurement Of Radiation (AREA)
Analysing Materials By The Use Of Radiation (AREA)

IT20228/76A 1975-03-06 1976-02-17 Apparecchiatura di rivelazione perfezionata per strumenti di scansione a fascio di elettroni IT1055303B (it)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US05/556,044 US3961190A (en)	1975-03-06	1975-03-06	Voltage contrast detector for a scanning electron beam instrument

Publications (1)

Publication Number	Publication Date
IT1055303B true IT1055303B (it)	1981-12-21

Family

ID=24219666

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT20228/76A IT1055303B (it)	1975-03-06	1976-02-17	Apparecchiatura di rivelazione perfezionata per strumenti di scansione a fascio di elettroni

Country Status (6)

Country	Link
US (1)	US3961190A (it)
JP (1)	JPS583587B2 (it)
DE (1)	DE2607788C2 (it)
FR (1)	FR2303285A1 (it)
GB (1)	GB1514059A (it)
IT (1)	IT1055303B (it)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4415851A (en) *	1981-05-26	1983-11-15	International Business Machines Corporation	System for contactless testing of multi-layer ceramics
US4417203A (en) *	1981-05-26	1983-11-22	International Business Machines Corporation	System for contactless electrical property testing of multi-layer ceramics
DE3235698A1 (de) *	1982-09-27	1984-03-29	Siemens AG, 1000 Berlin und 8000 München	Vorrichtung und verfahren zur direkten messung von signalverlaeufen an mehreren messpunkten mit hoher zeitaufloesung
JPS59106681A (ja) *	1982-12-07	1984-06-20	トステム株式会社	建具枠コ−ナ−部の固定装置
JPS59190876U (ja) *	1983-06-06	1984-12-18	日本建鐵株式会社	サツシの結合構造
JPS6090391U (ja) *	1983-11-28	1985-06-20	不二サッシ株式会社	サツシコ−ナの構造
DE3576213D1 (de) *	1984-09-18	1990-04-05	Integrated Circuit Testing	Gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik.
US4766372A (en) *	1987-02-10	1988-08-23	Intel Corporation	Electron beam tester
US4829243A (en) *	1988-02-19	1989-05-09	Microelectronics And Computer Technology Corporation	Electron beam testing of electronic components
US6075245A (en) *	1998-01-12	2000-06-13	Toro-Lira; Guillermo L.	High speed electron beam based system for testing large area flat panel displays
US6586736B1 (en) *	1999-09-10	2003-07-01	Kla-Tencor, Corporation	Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
US6664546B1 (en)	2000-02-10	2003-12-16	Kla-Tencor	In-situ probe for optimizing electron beam inspection and metrology based on surface potential
US6642726B2 (en) *	2001-06-29	2003-11-04	Kla-Tencor Corporation	Apparatus and methods for reliable and efficient detection of voltage contrast defects
US6861666B1 (en)	2001-10-17	2005-03-01	Kla-Tencor Technologies Corporation	Apparatus and methods for determining and localization of failures in test structures using voltage contrast
US7385197B2 (en) *	2004-07-08	2008-06-10	Ebara Corporation	Electron beam apparatus and a device manufacturing method using the same apparatus
US7005652B1 (en) *	2004-10-04	2006-02-28	The United States Of America As Represented By National Security Agency	Sample-stand for scanning electron microscope
JP6518442B2 (ja) *	2015-01-07	2019-05-22	日本電子株式会社	電子検出装置および走査電子顕微鏡

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1128107A (en) *	1965-06-23	1968-09-25	Hitachi Ltd	Scanning electron microscope
US3445708A (en) *	1967-02-06	1969-05-20	Gen Electric	Electron diffraction unit
GB1304344A (it) *	1969-02-01	1973-01-24
US3641341A (en) *	1969-12-23	1972-02-08	Hughes Aircraft Co	Ion beam image converter
DE2216821B1 (de) *	1972-04-07	1973-09-27	Siemens Ag, 1000 Berlin U. 8000 Muenchenss	Analysegerät zur Untersuchung einer Meßprobe mittels ausgelöster Auger-Elektronen
GB1447983A (en) *	1973-01-10	1976-09-02	Nat Res Dev	Detector for electron microscopes

1975
- 1975-03-06 US US05/556,044 patent/US3961190A/en not_active Expired - Lifetime
1976
- 1976-01-14 FR FR7601480A patent/FR2303285A1/fr active Granted
- 1976-01-21 GB GB2249/76A patent/GB1514059A/en not_active Expired
- 1976-02-10 JP JP51012929A patent/JPS583587B2/ja not_active Expired
- 1976-02-17 IT IT20228/76A patent/IT1055303B/it active
- 1976-02-26 DE DE2607788A patent/DE2607788C2/de not_active Expired

Also Published As

Publication number	Publication date
DE2607788C2 (de)	1984-10-25
FR2303285B1 (it)	1978-05-19
DE2607788A1 (de)	1976-09-16
JPS51110965A (it)	1976-09-30
FR2303285A1 (fr)	1976-10-01
JPS583587B2 (ja)	1983-01-21
GB1514059A (en)	1978-06-14
US3961190A (en)	1976-06-01

Publication	Publication Date	Title
SE7803094L (sv)	1978-09-26	Anordning for elektrisk signalbehandling
IT1075778B (it)	1985-04-22	Dispositivo di sfasamento di segnali elettronici
IT1059028B (it)	1982-05-31	Apparecchio di misura
SE7610420L (sv)	1977-03-25	Signalbehandlingsanordning for samplingsfrekvensmodifiering
BR7602823A (pt)	1976-11-16	Aparelho de recolhimento de dados
IT1054969B (it)	1981-11-30	Apparecchiatura di pulitura a vuoto perfezionata
IT7830044A0 (it)	1978-11-22	Apparecchio per rilevare ed elaborare segnali elettrici.
SE7804451L (sv)	1978-10-28	Signalbehandlingsanordning
IT1058938B (it)	1982-05-10	Equipaggiamento di misura di distanza
IT1055303B (it)	1981-12-21	Apparecchiatura di rivelazione perfezionata per strumenti di scansione a fascio di elettroni
IT1076498B (it)	1985-04-27	Dispositivo sfasatore per segnali elettronici
SE7807322L (sv)	1978-12-31	Forfarande och anordning for elektrisk signalbehandling
IT1115343B (it)	1986-02-03	Apparecchiatura di stampa perfezionata
IT1068477B (it)	1985-03-21	Apparecchiatura di tabulazione perfezionata
SE7807736L (sv)	1979-01-26	Signalbehandlande anordning
IT1066664B (it)	1985-03-12	Apparecchiatura di campionatura di segnali
IT1109994B (it)	1985-12-23	Apparecchiatura di riproduzione perfezionata
BR7608644A (pt)	1978-01-03	Equipamento de processamento de dados
IT1105551B (it)	1985-11-04	Dispositivo elettronico per il trattamento di segnali
DK149676C (da)	1987-04-13	Traadpositioneringsapparat
IT1063310B (it)	1985-02-11	Apparecchiatura di visualizzazione perfezionata
DK453578A (da)	1979-04-14	Transportapparat
IT1107215B (it)	1985-11-25	Apparecchio misuratore di frequenza
AT364317B (de)	1981-10-12	Elektronisches signalschaltwerk
SE406397B (sv)	1979-02-05	Feltmatningsutrustning