IL35037A - Apparatus and method for processing semiconductors - Google Patents
Apparatus and method for processing semiconductorsInfo
- Publication number
- IL35037A IL35037A IL35037A IL3503770A IL35037A IL 35037 A IL35037 A IL 35037A IL 35037 A IL35037 A IL 35037A IL 3503770 A IL3503770 A IL 3503770A IL 35037 A IL35037 A IL 35037A
- Authority
- IL
- Israel
- Prior art keywords
- processing semiconductors
- processing
- semiconductors
- relates
- insufficientocrquality
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/041—Doping control in crystal growth
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/107—Melt
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
Description
APPARATUS AND METHOD FOR PROCESSING SEMICONDUCTORS Intel Corporation 1. Field of the Invention: The present invention relates to processing semiconductor mate.rials. More particularly, this invention relates to an improved process and apparatus
Claims (1)
1. insufficientOCRQuality
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US86073669A | 1969-09-24 | 1969-09-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
IL35037A0 IL35037A0 (en) | 1970-10-30 |
IL35037A true IL35037A (en) | 1973-06-29 |
Family
ID=25333907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL35037A IL35037A (en) | 1969-09-24 | 1970-08-02 | Apparatus and method for processing semiconductors |
Country Status (9)
Country | Link |
---|---|
US (1) | US3650823A (en) |
BE (1) | BE756471A (en) |
CA (1) | CA935073A (en) |
CH (1) | CH515071A (en) |
DE (1) | DE2046036A1 (en) |
FR (1) | FR2062230A5 (en) |
GB (1) | GB1309108A (en) |
IL (1) | IL35037A (en) |
NL (1) | NL140435B (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS577131A (en) * | 1980-06-16 | 1982-01-14 | Junichi Nishizawa | Manufacture of p-n junction |
JP2717256B2 (en) * | 1988-03-16 | 1998-02-18 | 社団法人生産技術振興協会 | Semiconductor crystal |
US5169799A (en) * | 1988-03-16 | 1992-12-08 | Sumitomo Electric Industries, Ltd. | Method for forming a doped ZnSe single crystal |
US6143630A (en) * | 1994-06-09 | 2000-11-07 | Texas Instruments Incorporated | Method of impurity gettering |
JP3823160B2 (en) * | 1997-04-03 | 2006-09-20 | 野村マイクロ・サイエンス株式会社 | Cleaning method inside semiconductor substrate |
US6270727B1 (en) | 1998-07-31 | 2001-08-07 | Leco Corporation | Analytical crucible |
US20020001947A1 (en) | 1998-09-02 | 2002-01-03 | David A. Cathey | Semiconductor processing method using high pressure liquid media treatment |
US20030026601A1 (en) * | 2001-07-31 | 2003-02-06 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Vapor deposition and in-situ purification of organic molecules |
US7125453B2 (en) * | 2002-01-31 | 2006-10-24 | General Electric Company | High temperature high pressure capsule for processing materials in supercritical fluids |
US7063741B2 (en) * | 2002-03-27 | 2006-06-20 | General Electric Company | High pressure high temperature growth of crystalline group III metal nitrides |
JP4276627B2 (en) * | 2005-01-12 | 2009-06-10 | ソルボサーマル結晶成長技術研究組合 | Pressure vessel for single crystal growth and method for producing the same |
US7704324B2 (en) * | 2005-01-25 | 2010-04-27 | General Electric Company | Apparatus for processing materials in supercritical fluids and methods thereof |
US7942970B2 (en) | 2005-12-20 | 2011-05-17 | Momentive Performance Materials Inc. | Apparatus for making crystalline composition |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3341355A (en) * | 1962-10-19 | 1967-09-12 | Fuller Merriam Company | Process for impregnating porous bodies with a solid fusible substance |
-
0
- BE BE756471D patent/BE756471A/en unknown
-
1969
- 1969-09-24 US US860736A patent/US3650823A/en not_active Expired - Lifetime
-
1970
- 1970-08-02 IL IL35037A patent/IL35037A/en unknown
- 1970-08-27 CA CA091802A patent/CA935073A/en not_active Expired
- 1970-08-27 CH CH1286970A patent/CH515071A/en not_active IP Right Cessation
- 1970-09-17 FR FR7033674A patent/FR2062230A5/fr not_active Expired
- 1970-09-17 DE DE19702046036 patent/DE2046036A1/en active Pending
- 1970-09-22 NL NL707013967A patent/NL140435B/en unknown
- 1970-09-22 GB GB4513670A patent/GB1309108A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7013967A (en) | 1971-03-26 |
DE2046036A1 (en) | 1971-04-01 |
US3650823A (en) | 1972-03-21 |
FR2062230A5 (en) | 1971-06-25 |
CH515071A (en) | 1971-11-15 |
NL140435B (en) | 1973-12-17 |
GB1309108A (en) | 1973-03-07 |
CA935073A (en) | 1973-10-09 |
BE756471A (en) | 1971-03-01 |
IL35037A0 (en) | 1970-10-30 |
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