IL133751A0 - Anamorphic scan lens for laser scanner - Google Patents

Anamorphic scan lens for laser scanner

Info

Publication number: IL133751A0
Authority: IL; Israel
Prior art keywords: laser scanner; scan lens; anamorphic; anamorphic scan; lens
Prior art date: 1997-07-08

Application number

IL13375198A

Original Assignee

Etec Systems Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-07-08

Filing date

1998-06-19

Publication date

2001-04-30

1998-06-19 Application filed by Etec Systems Inc filed Critical Etec Systems Inc

2001-04-30 Publication of IL133751A0 publication Critical patent/IL133751A0/en

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Lenses (AREA)
Mechanical Optical Scanning Systems (AREA)
Facsimile Scanning Arrangements (AREA)

IL13375198A 1997-07-08 1998-06-19 Anamorphic scan lens for laser scanner IL133751A0 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US5280097P	1997-07-08	1997-07-08
US8243398A	1998-05-20	1998-05-20
PCT/US1998/012464 WO1999003012A1 (en)	1997-07-08	1998-06-19	Anamorphic scan lens for laser scanner

Publications (1)

Publication Number	Publication Date
IL133751A0 true IL133751A0 (en)	2001-04-30

Family

ID=26731092

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL13375198A IL133751A0 (en)	1997-07-08	1998-06-19	Anamorphic scan lens for laser scanner

Country Status (7)

Country	Link
EP (1)	EP0995144A1 (en)
JP (1)	JP2001509613A (en)
KR (1)	KR20010014242A (en)
CA (1)	CA2296595A1 (en)
IL (1)	IL133751A0 (en)
TW (1)	TW394853B (en)
WO (1)	WO1999003012A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR20080039449A (en) *	2005-08-02	2008-05-07	칼 짜이스 레이저 옵틱스 게엠베하	Optical system for generating line focus, scanning system using such optical system, and laser processing method of substrate
KR100701920B1 (en) *	2005-11-15	2007-03-30	김명수	Tractor harrows with flow function
US7466331B2 (en) *	2005-12-07	2008-12-16	Palo Alto Research Center Incorporated	Bow-free telecentric optical system for multiple beam scanning systems
ITMI20070885A1 (en)	2007-05-04	2008-11-05	Sapsa Bedding S R L	MATTRESS WITH QUILTED PANEL AND RELATED PROCESSING PROCEDURES
KR200448779Y1 (en) *	2009-10-09	2010-05-24	(주)엘이디웍스	A rotatable display device including an optical system
DE102013106533A1 (en) *	2013-06-21	2014-12-24	Jenoptik Optical Systems Gmbh	scanning device
ITVI20130229A1 (en)	2013-09-18	2015-03-19	Ettore Maurizio Costabeber	STEREOLITHOGRAPHIC MACHINE WITH PERFECT OPTICAL GROUP
SG11201601454WA (en) *	2013-09-25	2016-03-30	Asml Netherlands Bv	Beam delivery apparatus and method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0364726A (en) *	1989-08-02	1991-03-20	Minolta Camera Co Ltd	Light beam scanning optical system
JPH04233867A (en) *	1990-06-27	1992-08-21	Xerox Corp	Optical scanning system having submicron fluctuation correction
US5168386A (en) *	1990-10-22	1992-12-01	Tencor Instruments	Flat field telecentric scanner
JP3193546B2 (en) *	1993-01-14	2001-07-30	旭光学工業株式会社	Reflective scanning optical system
US5512949A (en) *	1993-12-29	1996-04-30	Xerox Corporation	Multiple beam raster output scanner optical system having telecentric chief exit rays
JP3275548B2 (en) *	1994-07-28	2002-04-15	松下電器産業株式会社	Optical scanning device
JPH08160337A (en) *	1994-12-09	1996-06-21	Minolta Co Ltd	Laser beam scanning optical device

1998
- 1998-06-19 CA CA002296595A patent/CA2296595A1/en not_active Abandoned
- 1998-06-19 JP JP2000502439A patent/JP2001509613A/en active Pending
- 1998-06-19 IL IL13375198A patent/IL133751A0/en unknown
- 1998-06-19 KR KR1019997012346A patent/KR20010014242A/en not_active Application Discontinuation
- 1998-06-19 WO PCT/US1998/012464 patent/WO1999003012A1/en not_active Application Discontinuation
- 1998-06-19 EP EP98930259A patent/EP0995144A1/en not_active Withdrawn
- 1998-07-07 TW TW087111000A patent/TW394853B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
KR20010014242A (en)	2001-02-26
JP2001509613A (en)	2001-07-24
CA2296595A1 (en)	1999-01-21
EP0995144A1 (en)	2000-04-26
TW394853B (en)	2000-06-21
WO1999003012A1 (en)	1999-01-21

Publication	Publication Date	Title
GB2308186B (en)	1999-06-09	Arbitrary-geometry laser surface scanner
EP0627643A3 (en)	1995-04-12	Laser scanning optical system using axicon.
DE69731777D1 (en)	2004-12-30	Optical scanning head
GB9616872D0 (en)	1996-09-25	Scanning optical rangefinder
GB2300727B (en)	1997-07-30	Imaging lens for optical scanner
AU132259S (en)	1997-11-20	Optical Image Scanner
DE69842255D1 (en)	2011-06-16	OPTICAL SCANNER
IL133751A0 (en)	2001-04-30	Anamorphic scan lens for laser scanner
AU9586298A (en)	2000-04-17	Scanning head lens assembly
IL120117A (en)	1999-06-20	Multi-beam scanning optical device
DE69720681D1 (en)	2003-05-15	Optical scanning head
GB9714641D0 (en)	1997-09-17	Differactive laser scanner
EP0658790A3 (en)	1996-03-06	Collimating lens for optical scanner.
DE69732471D1 (en)	2005-03-17	Optical scanning head
TW350620U (en)	1999-01-11	Scanning platform for platform type scanner
EP0658787A3 (en)	1997-04-09	Scanning lens and optical scanner using the same.
EP0982141A4 (en)	2001-04-25	Line scanning optical printer
GB2296105B (en)	1998-11-04	Scanning lens
DE69419129D1 (en)	1999-07-22	Laser beam scanner
IL118805A0 (en)	1996-10-31	Scanning lens
GB2325580B (en)	2001-07-11	Light shutter apparatus for an optical scanner
KR960007314U (en)	1996-03-13	Scanners for Laser Beam Printers
GB9709403D0 (en)	1997-07-02	Scanning optical projector
TW364707U (en)	1999-07-11	Scanner for assurance of scanning focus
EP1131666A4 (en)	2006-02-15	Scanning head lens assembly