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HUE059232T2 - Beállítási állapotot értékelõ eljárás és beállítási eljárás hibaértékelõ készülékhez - Google Patents

Beállítási állapotot értékelõ eljárás és beállítási eljárás hibaértékelõ készülékhez

Info

Publication number
HUE059232T2
HUE059232T2 HUE19190432A HUE19190432A HUE059232T2 HU E059232 T2 HUE059232 T2 HU E059232T2 HU E19190432 A HUE19190432 A HU E19190432A HU E19190432 A HUE19190432 A HU E19190432A HU E059232 T2 HUE059232 T2 HU E059232T2
Authority
HU
Hungary
Prior art keywords
adjustment
defect
evaluation
evaluation apparatus
adjustment state
Prior art date
Application number
HUE19190432A
Other languages
English (en)
Inventor
Shigeru Umeno
Original Assignee
Sumco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumco Corp filed Critical Sumco Corp
Publication of HUE059232T2 publication Critical patent/HUE059232T2/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8477—Investigating crystals, e.g. liquid crystals

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
HUE19190432A 2018-09-26 2019-08-07 Beállítási állapotot értékelõ eljárás és beállítási eljárás hibaértékelõ készülékhez HUE059232T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018179991A JP7017133B2 (ja) 2018-09-26 2018-09-26 欠陥評価装置の調整状態評価方法及び調整方法

Publications (1)

Publication Number Publication Date
HUE059232T2 true HUE059232T2 (hu) 2022-10-28

Family

ID=67551238

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE19190432A HUE059232T2 (hu) 2018-09-26 2019-08-07 Beállítási állapotot értékelõ eljárás és beállítási eljárás hibaértékelõ készülékhez

Country Status (3)

Country Link
EP (1) EP3629012B1 (hu)
JP (1) JP7017133B2 (hu)
HU (1) HUE059232T2 (hu)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111781243A (zh) * 2020-06-16 2020-10-16 天津中环领先材料技术有限公司 一种硅片微缺陷测试方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0424541A (ja) * 1990-05-21 1992-01-28 Mitsui Mining & Smelting Co Ltd 内部欠陥測定方法および装置
JP2722362B2 (ja) * 1992-03-27 1998-03-04 三井金属鉱業株式会社 粒子または欠陥の大きさ情報の測定方法および装置
JP2006208314A (ja) 2005-01-31 2006-08-10 Shin Etsu Handotai Co Ltd シリコン単結晶ウエーハの結晶欠陥の評価方法
CN103728236B (zh) 2012-10-12 2016-01-20 厦门福流生物科技有限公司 一种检测纳米粒子的方法

Also Published As

Publication number Publication date
EP3629012B1 (en) 2022-06-15
EP3629012A1 (en) 2020-04-01
JP7017133B2 (ja) 2022-02-08
JP2020051836A (ja) 2020-04-02

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