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HK1197221A1 - Float transportation device and float transportation method - Google Patents

Float transportation device and float transportation method

Info

Publication number
HK1197221A1
HK1197221A1 HK14110653A HK14110653A HK1197221A1 HK 1197221 A1 HK1197221 A1 HK 1197221A1 HK 14110653 A HK14110653 A HK 14110653A HK 14110653 A HK14110653 A HK 14110653A HK 1197221 A1 HK1197221 A1 HK 1197221A1
Authority
HK
Hong Kong
Prior art keywords
float
float transportation
transportation
transportation device
transportation method
Prior art date
Application number
HK14110653A
Other languages
Chinese (zh)
Inventor
安田貴裕
角田耕
池田俊之
小澤秀夫
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of HK1197221A1 publication Critical patent/HK1197221A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
HK14110653A 2012-02-14 2014-10-24 Float transportation device and float transportation method HK1197221A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012029473A JP6076606B2 (en) 2012-02-14 2012-02-14 Levitation conveyance device and levitation conveyance method
PCT/JP2012/079077 WO2013121634A1 (en) 2012-02-14 2012-11-09 Float transportation device and float transportation method

Publications (1)

Publication Number Publication Date
HK1197221A1 true HK1197221A1 (en) 2015-01-09

Family

ID=48983777

Family Applications (1)

Application Number Title Priority Date Filing Date
HK14110653A HK1197221A1 (en) 2012-02-14 2014-10-24 Float transportation device and float transportation method

Country Status (6)

Country Link
JP (1) JP6076606B2 (en)
KR (1) KR20140132732A (en)
CN (1) CN104066664B (en)
HK (1) HK1197221A1 (en)
TW (1) TWI564231B (en)
WO (1) WO2013121634A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015101428A (en) * 2013-11-22 2015-06-04 オイレス工業株式会社 Floating transfer device
CN108455253B (en) * 2018-03-01 2024-04-12 顺丰科技有限公司 Joint plate for conveyor belt and conveyor device
CN114148760A (en) * 2021-11-17 2022-03-08 深圳市烽炀科技实业有限公司 Air suspension chassis

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501713B2 (en) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 Air levitation transfer device
JP4684171B2 (en) * 2006-06-01 2011-05-18 株式会社ハーモテック Swirl flow forming body and non-contact transfer device
JP4896148B2 (en) * 2006-10-10 2012-03-14 株式会社日本設計工業 Thin plate material conveyor
CN102026560B (en) * 2008-03-11 2014-12-17 科福罗有限公司 Method and system for locally controlling support of a flat object
CN101977831B (en) * 2008-03-24 2013-04-10 翁令司工业股份有限公司 Non-contact carrier device
CN102083720B (en) * 2008-07-10 2016-03-02 翁令司工业股份有限公司 Vortex type adult and contact-free transport device
JP5125948B2 (en) * 2008-09-29 2013-01-23 セイコーエプソン株式会社 Work moving table and droplet discharge apparatus equipped with the same
WO2010058689A1 (en) * 2008-11-18 2010-05-27 オイレス工業株式会社 Non-contact conveying device
JP2011207552A (en) * 2010-03-29 2011-10-20 Ihi Corp Floating carrying device

Also Published As

Publication number Publication date
JP6076606B2 (en) 2017-02-08
KR20140132732A (en) 2014-11-18
JP2013166608A (en) 2013-08-29
TWI564231B (en) 2017-01-01
CN104066664A (en) 2014-09-24
WO2013121634A1 (en) 2013-08-22
TW201343520A (en) 2013-11-01
CN104066664B (en) 2016-06-01

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20201112