GB9910653D0 - Microwave plasma systems - Google Patents

Microwave plasma systems

Info

Publication number: GB9910653D0
Authority: GB; United Kingdom
Prior art keywords: microwave plasma; plasma systems; systems; microwave; plasma
Prior art date: 1995-02-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

GBGB9910653.6A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Applied Science and Technology Inc

Original Assignee

Applied Science and Technology Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-02-16

Filing date

1999-05-07

Publication date

1999-07-07

1995-02-16 Priority claimed from US08/389,243 external-priority patent/US5625259A/en

1995-02-16 Priority claimed from US08/389,250 external-priority patent/US5568015A/en

1999-05-07 Application filed by Applied Science and Technology Inc filed Critical Applied Science and Technology Inc

1999-07-07 Publication of GB9910653D0 publication Critical patent/GB9910653D0/en

Status Ceased legal-status Critical Current

Links

GBGB9910653.6A 1995-02-16 1999-05-07 Microwave plasma systems Ceased GB9910653D0 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US08/389,243 US5625259A (en)	1995-02-16	1995-02-16	Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
US08/389,250 US5568015A (en)	1995-02-16	1995-02-16	Fluid-cooled dielectric window for a plasma system

Publications (1)

Publication Number	Publication Date
GB9910653D0 true GB9910653D0 (en)	1999-07-07

Family

ID=27012612

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
GB9524898A Expired - Lifetime GB2298084B (en)	1995-02-16	1995-12-05	Fluid-cooled plasma applicator for plasma systems
GBGB9910653.6A Ceased GB9910653D0 (en)	1995-02-16	1999-05-07	Microwave plasma systems

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
GB9524898A Expired - Lifetime GB2298084B (en)	1995-02-16	1995-12-05	Fluid-cooled plasma applicator for plasma systems

Country Status (2)

Country	Link
JP (3)	JPH08222397A (en)
GB (2)	GB2298084B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7183514B2 (en) *	2003-01-30	2007-02-27	Axcelis Technologies, Inc.	Helix coupled remote plasma source
JP4735095B2 (en) *	2005-07-15	2011-07-27	東京エレクトロン株式会社	Apparatus for measuring electric field distribution of remote plasma generation unit, remote plasma generation unit, processing apparatus, and method for adjusting characteristics of remote plasma generation unit
KR100725105B1 (en) *	2006-07-12	2007-06-04	삼성전자주식회사	Applicator of Semiconductor Manufacturing Equipment
US9653266B2 (en) *	2014-03-27	2017-05-16	Mks Instruments, Inc.	Microwave plasma applicator with improved power uniformity
KR101734900B1 (en)	2015-09-14	2017-05-24	한국기초과학지원연구원	Surface wave plasma applicator for efficient electromagnetic wave propagation
KR101820242B1 (en) *	2016-08-02	2018-01-18	한국기초과학지원연구원	Water-cooled type surface wave plasma generating apparatus
KR101830007B1 (en) *	2016-11-11	2018-02-19	한국기초과학지원연구원	COAXIAL CABLE COUPLED and WATER-COOLED TYPE SURFACE WAVE PLASMA GENERATING APPARATUS
CN107949145A (en) *	2017-12-27	2018-04-20	长沙新材料产业研究院有限公司	A kind of microwave-excited plasma device
CN111741582A (en) *	2020-07-02	2020-10-02	安徽纯源镀膜科技有限公司	Transmission channel device for plasma transmission and coating equipment

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6013740B2 (en) *	1976-11-15	1985-04-09	株式会社東芝	Activated gas generator
US4431901A (en) *	1982-07-02	1984-02-14	The United States Of America As Represented By The United States Department Of Energy	Induction plasma tube
JPH048429A (en) *	1990-04-24	1992-01-13	Matsushita Electric Ind Co Ltd	Screw floating detector
US5262610A (en) *	1991-03-29	1993-11-16	The United States Of America As Represented By The Air Force	Low particulate reliability enhanced remote microwave plasma discharge device
WO1994006263A1 (en) *	1992-09-01	1994-03-17	The University Of North Carolina At Chapel Hill	High pressure magnetically assisted inductively coupled plasma

1995
- 1995-09-14 JP JP7262200A patent/JPH08222397A/en active Pending
- 1995-12-05 GB GB9524898A patent/GB2298084B/en not_active Expired - Lifetime
1999
- 1999-05-07 GB GBGB9910653.6A patent/GB9910653D0/en not_active Ceased
2005
- 2005-12-27 JP JP2005373685A patent/JP2006164991A/en active Pending
2009
- 2009-12-16 JP JP2009284720A patent/JP2010103121A/en active Pending

Also Published As

Publication number	Publication date
GB9524898D0 (en)	1996-02-07
JP2006164991A (en)	2006-06-22
JPH08222397A (en)	1996-08-30
GB2298084A (en)	1996-08-21
GB2298084B (en)	1999-08-25
JP2010103121A (en)	2010-05-06

Publication	Publication Date	Title
EP0782172A3 (en)	1997-10-08	Plasma processing systems
GB2308224B (en)	1999-02-17	Magnetron
EP0706425A4 (en)	1997-12-29	Selective plasma deposition
EP0732867A3 (en)	1997-01-29	Microwave oven
AU1744895A (en)	1995-08-29	Limited-traceability systems
PL324196A1 (en)	1998-05-11	Microwave oven
EP0753984A3 (en)	1997-08-20	Microwave oven
EP0771137A3 (en)	1997-10-29	Microwave oven
TW344216U (en)	1998-11-01	Microwave sterilizer
AU1557295A (en)	1995-08-01	Improved pulsed discharge systems
EP0810053A4 (en)	2000-02-02	Plasma torch
GB9524898D0 (en)	1996-02-07	Microwave plasma systems
IL118433A0 (en)	1996-09-12	Vacuum system
GB9607552D0 (en)	1996-06-12	Alarm systems
GB2317741B (en)	1999-02-17	Magnetron
GB2303601B (en)	1999-04-28	Conveyor systems
GB2303318B (en)	1999-03-17	Spray systems
GB9606555D0 (en)	1996-06-05	Lighting systems
GB9502418D0 (en)	1995-03-29	Communications systems
GB9506892D0 (en)	1995-05-24	Lighting systems
AU6020996A (en)	1996-12-24	Microwave oven
GB9506676D0 (en)	1995-05-24	Plasma sources
GB2308338B (en)	1999-09-22	Plasma etcher
KR200161116Y1 (en)	1999-11-15	Klystron
GB9509374D0 (en)	1995-06-28	Telecommunicatons systems

Legal Events

Date	Code	Title	Description
1999-08-18	AT	Applications terminated before publication under section 16(1)