GB9901867D0 - A method and apparatus - Google Patents

A method and apparatus

Info

Publication number: GB9901867D0
Authority: GB; United Kingdom
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

GBGB9901867.3A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Surface Technology Systems Ltd

Original Assignee

Surface Technology Systems Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-01-29

Filing date

1999-01-29

Publication date

1999-03-17

1999-01-29 Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd

1999-01-29 Priority to GBGB9901867.3A priority Critical patent/GB9901867D0/en

1999-02-08 Priority to US09/245,861 priority patent/US6187685B1/en

1999-03-17 Publication of GB9901867D0 publication Critical patent/GB9901867D0/en

1999-11-03 Priority to EP99954133A priority patent/EP1131847B1/en

1999-11-03 Priority to KR10-2001-7005610A priority patent/KR100514150B1/en

1999-11-03 Priority to DE69942034T priority patent/DE69942034D1/en

1999-11-03 Priority to JP2000580243A priority patent/JP4163857B2/en

1999-11-03 Priority to PCT/GB1999/003630 priority patent/WO2000026956A1/en

1999-11-03 Priority to AT99954133T priority patent/ATE458273T1/en

2006-01-20 Priority to JP2006013130A priority patent/JP2006148156A/en

Status Ceased legal-status Critical Current

Links

GBGB9901867.3A 1997-08-01 1999-01-29 A method and apparatus Ceased GB9901867D0 (en)

Priority Applications (9)

Application Number	Priority Date	Filing Date	Title
GBGB9901867.3A GB9901867D0 (en)	1999-01-29	1999-01-29	A method and apparatus
US09/245,861 US6187685B1 (en)	1997-08-01	1999-02-08	Method and apparatus for etching a substrate
EP99954133A EP1131847B1 (en)	1998-11-04	1999-11-03	A method for etching a substrate
KR10-2001-7005610A KR100514150B1 (en)	1998-11-04	1999-11-03	A method and apparatus for etching a substrate
DE69942034T DE69942034D1 (en)	1998-11-04	1999-11-03	METHOD OF HEATING A SUBSTRATE
JP2000580243A JP4163857B2 (en)	1998-11-04	1999-11-03	Method and apparatus for etching a substrate
PCT/GB1999/003630 WO2000026956A1 (en)	1998-11-04	1999-11-03	A method and apparatus for etching a substrate
AT99954133T ATE458273T1 (en)	1998-11-04	1999-11-03	METHOD FOR ETCHING A SUBSTRATE
JP2006013130A JP2006148156A (en)	1998-11-04	2006-01-20	Method and apparatus for etching a substrate

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB9901867.3A GB9901867D0 (en)	1999-01-29	1999-01-29	A method and apparatus

Publications (1)

Publication Number	Publication Date
GB9901867D0 true GB9901867D0 (en)	1999-03-17

Family

ID=10846644

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GBGB9901867.3A Ceased GB9901867D0 (en)	1997-08-01	1999-01-29	A method and apparatus

Country Status (1)

Country	Link
GB (1)	GB9901867D0 (en)

1999
- 1999-01-29 GB GBGB9901867.3A patent/GB9901867D0/en not_active Ceased

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Legal Events

Date	Code	Title	Description
2000-10-18	AT	Applications terminated before publication under section 16(1)