GB985412A - Glow discharge getter-ion vacuum pump method and apparatus - Google Patents
Glow discharge getter-ion vacuum pump method and apparatusInfo
- Publication number
- GB985412A GB985412A GB32864/61A GB3286461A GB985412A GB 985412 A GB985412 A GB 985412A GB 32864/61 A GB32864/61 A GB 32864/61A GB 3286461 A GB3286461 A GB 3286461A GB 985412 A GB985412 A GB 985412A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- anode
- function
- pumping speed
- spacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
985,412. Ion pumps. VARIAN ASSOCIATES. Sept. 13, 1961 [Oct. 6, 1960], No. 32864/61. Heading H1D. A glow-discharge getter-ion vacuum pump has a cellular anode 23 disposed between two parallel cathodes 22, the cathodes being spaced from each other by a value between 1.15 inch and 1.35 inch and the cathode-anode spacing being within the range 0.2 inch to 0.35 inch. A method of selecting the electrode spacing comprises the steps of (a) determining the intrinsic pumping speed of a single cellular compartment as a function of the cathode-anode spacing or of the compartment height; (b) determining the actual pumping speed at the entrance of the cathode-anode region for said array of distributed cellular compartments as a function of the intrinsic speed of a single cellular compartment and therefore as a function of the cathode-anode spacing or compartment height; (c) plotting the actual pumping speed at the entrance to the cathode-anode region as a function of the cathode-anode spacing or compartment height; and (d) selecting the cathode-anode spacing or compartment height which produces the desirable usable pumping speed for the glow discharge apparatus. Alternatively, step (b) is replaced by the steps (b1 determining the actual pumping speed into the array of cellular compartments as a function of the cathodeanode spacing or compartment height, and (b2) determining the actual pumping speed at the entrance of the cathode-anode region for the array of cellular compartments as a function of the intrinsic pumping speed of a singular cellular compartment and the conductance into the array of cellular compartments and therefore as a function of the cathode-anode spacing or compartment height. A formula is given relating the pump dimensions to actual pumping speed from which the pump dimensions for optimum pumping conditions may be determined.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60819A US3094639A (en) | 1960-10-06 | 1960-10-06 | Glow discharge method and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB985412A true GB985412A (en) | 1965-03-10 |
Family
ID=22031941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB32864/61A Expired GB985412A (en) | 1960-10-06 | 1961-09-13 | Glow discharge getter-ion vacuum pump method and apparatus |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3094639A (en) |
| GB (1) | GB985412A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB986983A (en) * | 1961-08-24 | 1965-03-24 | Philips Electronic Associated | Combined klystron and getter ion pump |
| US3143678A (en) * | 1961-12-05 | 1964-08-04 | Hughes Aircraft Co | Vacuum ion gauge |
| US3411073A (en) * | 1965-07-01 | 1968-11-12 | Gen Electric | Gas detector having inlet orifice for linear operation of the detector |
| US4334829A (en) * | 1980-02-15 | 1982-06-15 | Rca Corporation | Sputter-ion pump for use with electron tubes having thoriated tungsten cathodes |
-
1960
- 1960-10-06 US US60819A patent/US3094639A/en not_active Expired - Lifetime
-
1961
- 1961-09-13 GB GB32864/61A patent/GB985412A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1414569A1 (en) | 1969-03-20 |
| US3094639A (en) | 1963-06-18 |
| DE1414569B2 (en) | 1972-07-13 |
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