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GB9805927D0 - Method and apparatus for manufacturing a micromechanical device - Google Patents

Method and apparatus for manufacturing a micromechanical device

Info

Publication number
GB9805927D0
GB9805927D0 GBGB9805927.2A GB9805927A GB9805927D0 GB 9805927 D0 GB9805927 D0 GB 9805927D0 GB 9805927 A GB9805927 A GB 9805927A GB 9805927 D0 GB9805927 D0 GB 9805927D0
Authority
GB
United Kingdom
Prior art keywords
manufacturing
micromechanical device
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9805927.2A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9805927.2A priority Critical patent/GB9805927D0/en
Publication of GB9805927D0 publication Critical patent/GB9805927D0/en
Priority to EP99909091A priority patent/EP0983610A1/en
Priority to JP54790499A priority patent/JP4475548B2/en
Priority to US09/423,979 priority patent/US6355181B1/en
Priority to KR1019997010649A priority patent/KR20010012688A/en
Priority to PCT/GB1999/000774 priority patent/WO1999049506A1/en
Ceased legal-status Critical Current

Links

GBGB9805927.2A 1998-03-20 1998-03-20 Method and apparatus for manufacturing a micromechanical device Ceased GB9805927D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB9805927.2A GB9805927D0 (en) 1998-03-20 1998-03-20 Method and apparatus for manufacturing a micromechanical device
EP99909091A EP0983610A1 (en) 1998-03-20 1999-03-16 Method and apparatus for manufacturing a micromechanical device
JP54790499A JP4475548B2 (en) 1998-03-20 1999-03-16 Method and apparatus for manufacturing micromechanical devices
US09/423,979 US6355181B1 (en) 1998-03-20 1999-03-16 Method and apparatus for manufacturing a micromechanical device
KR1019997010649A KR20010012688A (en) 1998-03-20 1999-03-16 Method and apparatus for manufacturing a micromechanical device
PCT/GB1999/000774 WO1999049506A1 (en) 1998-03-20 1999-03-16 Method and apparatus for manufacturing a micromechanical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9805927.2A GB9805927D0 (en) 1998-03-20 1998-03-20 Method and apparatus for manufacturing a micromechanical device

Publications (1)

Publication Number Publication Date
GB9805927D0 true GB9805927D0 (en) 1998-05-13

Family

ID=10828905

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9805927.2A Ceased GB9805927D0 (en) 1998-03-20 1998-03-20 Method and apparatus for manufacturing a micromechanical device

Country Status (1)

Country Link
GB (1) GB9805927D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)