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GB9621187D0 - A sensor - Google Patents

A sensor

Info

Publication number
GB9621187D0
GB9621187D0 GBGB9621187.5A GB9621187A GB9621187D0 GB 9621187 D0 GB9621187 D0 GB 9621187D0 GB 9621187 A GB9621187 A GB 9621187A GB 9621187 D0 GB9621187 D0 GB 9621187D0
Authority
GB
United Kingdom
Prior art keywords
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9621187.5A
Other versions
GB2318231A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to GB9621187A priority Critical patent/GB2318231A/en
Publication of GB9621187D0 publication Critical patent/GB9621187D0/en
Publication of GB2318231A publication Critical patent/GB2318231A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
GB9621187A 1996-10-10 1996-10-10 Micromechanical ring oscillator sensor Withdrawn GB2318231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9621187A GB2318231A (en) 1996-10-10 1996-10-10 Micromechanical ring oscillator sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9621187A GB2318231A (en) 1996-10-10 1996-10-10 Micromechanical ring oscillator sensor

Publications (2)

Publication Number Publication Date
GB9621187D0 true GB9621187D0 (en) 1996-11-27
GB2318231A GB2318231A (en) 1998-04-15

Family

ID=10801238

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9621187A Withdrawn GB2318231A (en) 1996-10-10 1996-10-10 Micromechanical ring oscillator sensor

Country Status (1)

Country Link
GB (1) GB2318231A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2385132A (en) * 2002-02-12 2003-08-13 Seiko Epson Corp A capacitance sensor
US8988061B2 (en) 2011-02-10 2015-03-24 U.S. Department Of Energy Nanomechanical electric and electromagnetic field sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107226A (en) * 1982-12-10 1984-06-21 Citizen Watch Co Ltd Temperature detector
DE59101980D1 (en) * 1990-05-02 1994-07-28 Siemens Ag Capacitive sensor with frequency output.
DE4137624A1 (en) * 1991-11-15 1993-05-19 Bosch Gmbh Robert SILICON CHIP FOR USE IN A FORCE SENSOR

Also Published As

Publication number Publication date
GB2318231A (en) 1998-04-15

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)