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GB9603262D0 - Positional measurements - Google Patents

Positional measurements

Info

Publication number
GB9603262D0
GB9603262D0 GBGB9603262.8A GB9603262A GB9603262D0 GB 9603262 D0 GB9603262 D0 GB 9603262D0 GB 9603262 A GB9603262 A GB 9603262A GB 9603262 D0 GB9603262 D0 GB 9603262D0
Authority
GB
United Kingdom
Prior art keywords
positional measurements
positional
measurements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9603262.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bio Rad Micromeasurements Ltd
Original Assignee
Bio Rad Micromeasurements Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bio Rad Micromeasurements Ltd filed Critical Bio Rad Micromeasurements Ltd
Priority to GBGB9603262.8A priority Critical patent/GB9603262D0/en
Publication of GB9603262D0 publication Critical patent/GB9603262D0/en
Priority to PCT/GB1997/000341 priority patent/WO1997030378A1/en
Priority to AU16125/97A priority patent/AU1612597A/en
Pending legal-status Critical Current

Links

GBGB9603262.8A 1996-02-16 1996-02-16 Positional measurements Pending GB9603262D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9603262.8A GB9603262D0 (en) 1996-02-16 1996-02-16 Positional measurements
PCT/GB1997/000341 WO1997030378A1 (en) 1996-02-16 1997-02-07 Positional measurements
AU16125/97A AU1612597A (en) 1996-02-16 1997-02-07 Positional measurements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9603262.8A GB9603262D0 (en) 1996-02-16 1996-02-16 Positional measurements

Publications (1)

Publication Number Publication Date
GB9603262D0 true GB9603262D0 (en) 1996-04-17

Family

ID=10788863

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9603262.8A Pending GB9603262D0 (en) 1996-02-16 1996-02-16 Positional measurements

Country Status (3)

Country Link
AU (1) AU1612597A (en)
GB (1) GB9603262D0 (en)
WO (1) WO1997030378A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11325877A (en) * 1998-03-31 1999-11-26 Siemens Ag Method and apparatus for reducing measurement errors
TW494519B (en) * 2000-06-19 2002-07-11 Infineon Technologies Corp Method for determining overlay measurement uncertainty
FR2955654B1 (en) * 2010-01-25 2012-03-30 Soitec Silicon Insulator Technologies SYSTEM AND METHOD FOR EVALUATING INHOMOGENOUS DEFORMATIONS IN MULTILAYER PLATES
US9927718B2 (en) * 2010-08-03 2018-03-27 Kla-Tencor Corporation Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
CN112631090B (en) * 2019-09-24 2022-09-27 长鑫存储技术有限公司 Overlay mark and overlay error testing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0356727A3 (en) * 1988-08-09 1991-06-05 Schlumberger Technologies Inc Symmetrie-based target position measurement
JPH0650534B2 (en) * 1988-11-30 1994-06-29 株式会社東芝 Mark detection method
JP3333568B2 (en) * 1993-01-12 2002-10-15 株式会社リコー Surface defect inspection equipment

Also Published As

Publication number Publication date
AU1612597A (en) 1997-09-02
WO1997030378A1 (en) 1997-08-21

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