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GB8601830D0 - Fabricated transistors - Google Patents

Fabricated transistors

Info

Publication number
GB8601830D0
GB8601830D0 GB868601830A GB8601830A GB8601830D0 GB 8601830 D0 GB8601830 D0 GB 8601830D0 GB 868601830 A GB868601830 A GB 868601830A GB 8601830 A GB8601830 A GB 8601830A GB 8601830 D0 GB8601830 D0 GB 8601830D0
Authority
GB
United Kingdom
Prior art keywords
fabricated transistors
fabricated
transistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB868601830A
Other versions
GB2185851A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Priority to GB08601830A priority Critical patent/GB2185851A/en
Publication of GB8601830D0 publication Critical patent/GB8601830D0/en
Priority to JP62500890A priority patent/JPS63502544A/en
Priority to EP87900849A priority patent/EP0258285A1/en
Priority to PCT/GB1987/000030 priority patent/WO1987004563A1/en
Publication of GB2185851A publication Critical patent/GB2185851A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/027Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs
    • H10D30/0278Manufacture or treatment of FETs having insulated gates [IGFET] of lateral single-gate IGFETs forming single crystalline channels on wafers after forming insulating device isolations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/113Isolations within a component, i.e. internal isolations
    • H10D62/115Dielectric isolations, e.g. air gaps
    • H10D62/116Dielectric isolations, e.g. air gaps adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40Crystalline structures
GB08601830A 1986-01-25 1986-01-25 Method of fabricating an mos transistor Withdrawn GB2185851A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB08601830A GB2185851A (en) 1986-01-25 1986-01-25 Method of fabricating an mos transistor
JP62500890A JPS63502544A (en) 1986-01-25 1987-01-19 Transistor manufacturing method and MOS transistor manufactured by the same method
EP87900849A EP0258285A1 (en) 1986-01-25 1987-01-19 Methods for fabricating transistors and mos transistors fabricated by such methods
PCT/GB1987/000030 WO1987004563A1 (en) 1986-01-25 1987-01-19 Methods for fabricating transistors and mos transistors fabricated by such methods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08601830A GB2185851A (en) 1986-01-25 1986-01-25 Method of fabricating an mos transistor

Publications (2)

Publication Number Publication Date
GB8601830D0 true GB8601830D0 (en) 1986-02-26
GB2185851A GB2185851A (en) 1987-07-29

Family

ID=10591944

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08601830A Withdrawn GB2185851A (en) 1986-01-25 1986-01-25 Method of fabricating an mos transistor

Country Status (4)

Country Link
EP (1) EP0258285A1 (en)
JP (1) JPS63502544A (en)
GB (1) GB2185851A (en)
WO (1) WO1987004563A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021119A (en) * 1987-11-13 1991-06-04 Kopin Corporation Zone-melting recrystallization process
US4863877A (en) * 1987-11-13 1989-09-05 Kopin Corporation Ion implantation and annealing of compound semiconductor layers
US5453153A (en) * 1987-11-13 1995-09-26 Kopin Corporation Zone-melting recrystallization process
CN1395316A (en) * 2001-07-04 2003-02-05 松下电器产业株式会社 Semiconductor device and its manufacturing method
US20230420546A1 (en) * 2022-06-24 2023-12-28 Nxp Usa, Inc. Transistor with current terminal regions and channel region in layer over dielectric

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764413A (en) * 1970-11-25 1973-10-09 Nippon Electric Co Method of producing insulated gate field effect transistors
JPS49112574A (en) * 1973-02-24 1974-10-26
JPS54881A (en) * 1977-06-03 1979-01-06 Fujitsu Ltd Semiconductor device
US4269631A (en) * 1980-01-14 1981-05-26 International Business Machines Corporation Selective epitaxy method using laser annealing for making filamentary transistors
JPS5861622A (en) * 1981-10-09 1983-04-12 Hitachi Ltd Manufacture of single crystal thin film
EP0077737A3 (en) * 1981-10-19 1984-11-07 FAIRCHILD CAMERA & INSTRUMENT CORPORATION Low capacitance field effect transistor
US4476475A (en) * 1982-11-19 1984-10-09 Northern Telecom Limited Stacked MOS transistor
JPS59195871A (en) * 1983-04-20 1984-11-07 Mitsubishi Electric Corp Manufacture of metal oxide semiconductor field-effect transistor

Also Published As

Publication number Publication date
GB2185851A (en) 1987-07-29
JPS63502544A (en) 1988-09-22
EP0258285A1 (en) 1988-03-09
WO1987004563A1 (en) 1987-07-30

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)