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GB8527177D0 - Electron detector - Google Patents

Electron detector

Info

Publication number
GB8527177D0
GB8527177D0 GB858527177A GB8527177A GB8527177D0 GB 8527177 D0 GB8527177 D0 GB 8527177D0 GB 858527177 A GB858527177 A GB 858527177A GB 8527177 A GB8527177 A GB 8527177A GB 8527177 D0 GB8527177 D0 GB 8527177D0
Authority
GB
United Kingdom
Prior art keywords
electron detector
electron
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB858527177A
Other versions
GB2183898A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Ltd
Original Assignee
Texas Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Ltd filed Critical Texas Instruments Ltd
Priority to GB08527177A priority Critical patent/GB2183898A/en
Publication of GB8527177D0 publication Critical patent/GB8527177D0/en
Publication of GB2183898A publication Critical patent/GB2183898A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24592—Inspection and quality control of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB08527177A 1985-11-05 1985-11-05 Checking voltages in integrated circuit by means of an electron detector Withdrawn GB2183898A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08527177A GB2183898A (en) 1985-11-05 1985-11-05 Checking voltages in integrated circuit by means of an electron detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08527177A GB2183898A (en) 1985-11-05 1985-11-05 Checking voltages in integrated circuit by means of an electron detector

Publications (2)

Publication Number Publication Date
GB8527177D0 true GB8527177D0 (en) 1985-12-11
GB2183898A GB2183898A (en) 1987-06-10

Family

ID=10587710

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08527177A Withdrawn GB2183898A (en) 1985-11-05 1985-11-05 Checking voltages in integrated circuit by means of an electron detector

Country Status (1)

Country Link
GB (1) GB2183898A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602177A (en) * 1986-08-27 1988-03-16 Philips Nv ELECTRONS DETECTION WITH ENERGY DISCRIMINATION.
EP0262365A3 (en) * 1986-09-30 1989-12-27 Siemens Aktiengesellschaft Spectrometer-detector arrangement for quantitative potential measurements
GB2201288B (en) * 1986-12-12 1990-08-22 Texas Instruments Ltd Electron beam apparatus
CA1317035C (en) * 1989-01-25 1993-04-27 Matthias Brunner Method for examining a specimen in a particle beam instrument
DE4216730C2 (en) * 1992-05-20 2003-07-24 Advantest Corp Scanning electron beam device
JP2917697B2 (en) * 1992-09-17 1999-07-12 株式会社日立製作所 Transmission electron microscope
GB9220097D0 (en) * 1992-09-23 1992-11-04 Univ York Electron spectrometers
DE19525081B4 (en) * 1995-07-10 2006-06-29 Display Products Group, Inc., Hayward Method and device for testing the function of microstructure elements
US5635720A (en) * 1995-10-03 1997-06-03 Gatan, Inc. Resolution-enhancement device for an optically-coupled image sensor for an electron microscope
WO1998057350A1 (en) * 1997-06-13 1998-12-17 Gatan, Inc. Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope
JP6177817B2 (en) * 2015-01-30 2017-08-09 松定プレシジョン株式会社 Charged particle beam apparatus and scanning electron microscope
WO2017094721A1 (en) 2015-12-03 2017-06-08 松定プレシジョン株式会社 Charged particle beam device and scanning electron microscope

Also Published As

Publication number Publication date
GB2183898A (en) 1987-06-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)