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GB8304594D0 - Film thickness measurement - Google Patents

Film thickness measurement

Info

Publication number
GB8304594D0
GB8304594D0 GB838304594A GB8304594A GB8304594D0 GB 8304594 D0 GB8304594 D0 GB 8304594D0 GB 838304594 A GB838304594 A GB 838304594A GB 8304594 A GB8304594 A GB 8304594A GB 8304594 D0 GB8304594 D0 GB 8304594D0
Authority
GB
United Kingdom
Prior art keywords
film thickness
thickness measurement
measurement
film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB838304594A
Other versions
GB2135776A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB08304594A priority Critical patent/GB2135776A/en
Publication of GB8304594D0 publication Critical patent/GB8304594D0/en
Publication of GB2135776A publication Critical patent/GB2135776A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB08304594A 1983-02-18 1983-02-18 Film thickness measurement Withdrawn GB2135776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08304594A GB2135776A (en) 1983-02-18 1983-02-18 Film thickness measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08304594A GB2135776A (en) 1983-02-18 1983-02-18 Film thickness measurement

Publications (2)

Publication Number Publication Date
GB8304594D0 true GB8304594D0 (en) 1983-03-23
GB2135776A GB2135776A (en) 1984-09-05

Family

ID=10538234

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08304594A Withdrawn GB2135776A (en) 1983-02-18 1983-02-18 Film thickness measurement

Country Status (1)

Country Link
GB (1) GB2135776A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025664A (en) * 1989-11-02 1991-06-25 Leybold Inficon, Inc. Multiple crystal head for deposition thickness monitor
FR2771810B1 (en) * 1997-11-28 2000-02-11 Sgs Thomson Microelectronics IMPROVING THE REAL-TIME THICKNESS MEASUREMENT OF A MATERIAL DEPOSITED IN AN EVAPORATION DEPOSIT INSTALLATION
EP2309220A1 (en) * 2009-10-02 2011-04-13 Applied Materials, Inc. Coating thickness measuring device and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB896934A (en) * 1959-05-21 1962-05-23 Ass Elect Ind Improvements relating to diffraction gratings

Also Published As

Publication number Publication date
GB2135776A (en) 1984-09-05

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)