GB2469412B - MEMS transducers - Google Patents

MEMS transducers

Info

Publication number: GB2469412B
Authority: GB; United Kingdom
Prior art keywords: mems transducers; mems; transducers
Prior art date: 2008-05-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

GB1012729A

Other versions

GB2469412A (en

GB201012729D0 (en

Inventor

Robert Errol Mcmullen

Richard Ian Laming

Anthony Traynor

Tsjerk Hoekstra

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Cirrus Logic International UK Ltd

Original Assignee

Wolfson Microelectronics PLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2008-05-07

Filing date

2008-05-07

Publication date

2011-01-19

2008-05-07 Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC

2008-05-07 Priority to GB1012729A priority Critical patent/GB2469412B/en

2010-09-15 Publication of GB201012729D0 publication Critical patent/GB201012729D0/en

2010-10-13 Publication of GB2469412A publication Critical patent/GB2469412A/en

2011-01-19 Application granted granted Critical

2011-01-19 Publication of GB2469412B publication Critical patent/GB2469412B/en

Status Active legal-status Critical Current

2028-05-07 Anticipated expiration legal-status Critical

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Computer Hardware Design (AREA)
Mechanical Engineering (AREA)
Transducers For Ultrasonic Waves (AREA)
Micromachines (AREA)

GB1012729A 2008-05-07 2008-05-07 MEMS transducers Active GB2469412B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
GB1012729A GB2469412B (en)	2008-05-07	2008-05-07	MEMS transducers

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
GB1012729A GB2469412B (en)	2008-05-07	2008-05-07	MEMS transducers
GB0808294A GB2459863B (en)	2008-05-07	2008-05-07	Mems transducers

Publications (3)

Publication Number	Publication Date
GB201012729D0 GB201012729D0 (en)	2010-09-15
GB2469412A GB2469412A (en)	2010-10-13
GB2469412B true GB2469412B (en)	2011-01-19

Family

ID=39537415

Family Applications (4)

Application Number	Title	Priority Date	Filing Date
GB1012727A Active GB2469410B (en)	2008-05-07	2008-05-07	Mems transducers
GB0808294A Active GB2459863B (en)	2008-05-07	2008-05-07	Mems transducers
GB1012729A Active GB2469412B (en)	2008-05-07	2008-05-07	MEMS transducers
GB1012728A Active GB2469411B (en)	2008-05-07	2008-05-07	Mems transducers

Family Applications Before (2)

Application Number	Title	Priority Date	Filing Date
GB1012727A Active GB2469410B (en)	2008-05-07	2008-05-07	Mems transducers
GB0808294A Active GB2459863B (en)	2008-05-07	2008-05-07	Mems transducers

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
GB1012728A Active GB2469411B (en)	2008-05-07	2008-05-07	Mems transducers

Country Status (1)

Country	Link
GB (4)	GB2469410B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2459866B (en) *	2008-05-07	2011-08-31	Wolfson Microelectronics Plc	Mems transducer
US10899605B2 (en)	2018-03-05	2021-01-26	Sharp Kabushiki Kaisha	MEMS device and manipulation method for micro-objects
US10636936B2 (en)	2018-03-05	2020-04-28	Sharp Kabushiki Kaisha	MEMS array system and method of manipulating objects
WO2023077504A1 (en) *	2021-11-08	2023-05-11	重庆康佳光电技术研究院有限公司	Chip structure, chip structure manufacturing method, and chip transfer method
EP4181163A1 (en) *	2021-11-12	2023-05-17	ETH Zurich	Zero-power operable classification device and switching device and voice-operated powerless wake-up switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20030028109A1 (en) *	2001-07-31	2003-02-06	Miller David G.	Micro-machined ultrasonic transducer (MUT) array
US20060196272A1 (en) *	2005-03-01	2006-09-07	Denso Corporation	Ultrasonic sensor having transmission device and reception device of ultrasonic wave

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3248452B2 (en) *	1997-05-26	2002-01-21	住友金属工業株式会社	Acoustic sensor
US6314057B1 (en) *	1999-05-11	2001-11-06	Rodney J Solomon	Micro-machined ultrasonic transducer array
JP5275565B2 (en) *	2004-06-07	2013-08-28	オリンパス株式会社	Capacitive ultrasonic transducer
ATE393672T1 (en) *	2005-09-14	2008-05-15	Esaote Spa	ELECTROACOUSTIC TRANSDUCER FOR HIGH FREQUENCY APPLICATIONS
US7615834B2 (en) *	2006-02-28	2009-11-10	The Board Of Trustees Of The Leland Stanford Junior University	Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane

2008
- 2008-05-07 GB GB1012727A patent/GB2469410B/en active Active
- 2008-05-07 GB GB0808294A patent/GB2459863B/en active Active
- 2008-05-07 GB GB1012729A patent/GB2469412B/en active Active
- 2008-05-07 GB GB1012728A patent/GB2469411B/en active Active

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20030028109A1 (en) *	2001-07-31	2003-02-06	Miller David G.	Micro-machined ultrasonic transducer (MUT) array
US20060196272A1 (en) *	2005-03-01	2006-09-07	Denso Corporation	Ultrasonic sensor having transmission device and reception device of ultrasonic wave

Also Published As

Publication number	Publication date
GB2469412A (en)	2010-10-13
GB2459863A (en)	2009-11-11
GB0808294D0 (en)	2008-06-11
GB2469410A (en)	2010-10-13
GB201012727D0 (en)	2010-09-15
GB2469411A (en)	2010-10-13
GB2459863B (en)	2011-01-19
GB2469411B (en)	2011-01-19
GB2469410B (en)	2011-01-19
GB201012729D0 (en)	2010-09-15
GB201012728D0 (en)	2010-09-15

Publication	Publication Date	Title
HK1254195A1 (en)	2019-07-12	Ultrasound transducers
GB2461448B (en)	2011-08-31	Transducer
EP2312158A4 (en)	2015-03-04	Piezoelectric microblower
EP2306019A4 (en)	2014-10-15	Piezoelectric microblower
EP2148524A4 (en)	2013-09-04	Electroacoustic transducer
EP2446115A4 (en)	2013-09-11	Transducer assembly
IL200938A0 (en)	2010-05-17	Mems microphone
EP2164280A4 (en)	2014-02-19	Acoustic sensor
AU322949S (en)	2008-12-11	Vibrator
EP2304409A4 (en)	2015-08-12	Transducer module
EP2206359A4 (en)	2012-01-11	Acoustic transducer
EP2164281A4 (en)	2013-06-12	Acoustic sensor
EP2355541A4 (en)	2012-06-06	Microphone unit
GB2465091B (en)	2011-11-09	Pressure transducer
EP2297975B8 (en)	2018-04-18	Improved acoustic device
EP2242285A4 (en)	2012-07-11	Microphone unit
EP2324353A4 (en)	2011-10-19	Selectively functionized transducer microarray
EP2252075A4 (en)	2014-10-29	Microphone unit
GB2459863B (en)	2011-01-19	Mems transducers
GB2459866B (en)	2011-08-31	Mems transducer
GB0723526D0 (en)	2008-01-09	Acoustic transducer
GB2470849B (en)	2011-08-31	Transducer
GB0820857D0 (en)	2008-12-24	Optical displacement transducer
GB0815013D0 (en)	2008-09-24	Transducers
GB0801079D0 (en)	2008-02-27	Transducer

Legal Events

Date	Code	Title	Description
2015-09-16	732E	Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)	Free format text: REGISTERED BETWEEN 20150820 AND 20150826