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GB2325782B - Substrate cleaning method and apparatus - Google Patents

Substrate cleaning method and apparatus

Info

Publication number
GB2325782B
GB2325782B GB9811176A GB9811176A GB2325782B GB 2325782 B GB2325782 B GB 2325782B GB 9811176 A GB9811176 A GB 9811176A GB 9811176 A GB9811176 A GB 9811176A GB 2325782 B GB2325782 B GB 2325782B
Authority
GB
United Kingdom
Prior art keywords
cleaning method
substrate cleaning
substrate
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9811176A
Other versions
GB9811176D0 (en
GB2325782A (en
Inventor
Hidemitsu Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9811176D0 publication Critical patent/GB9811176D0/en
Publication of GB2325782A publication Critical patent/GB2325782A/en
Application granted granted Critical
Publication of GB2325782B publication Critical patent/GB2325782B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/18—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
GB9811176A 1997-05-26 1998-05-22 Substrate cleaning method and apparatus Expired - Fee Related GB2325782B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13460397A JP3183214B2 (en) 1997-05-26 1997-05-26 Cleaning method and cleaning device

Publications (3)

Publication Number Publication Date
GB9811176D0 GB9811176D0 (en) 1998-07-22
GB2325782A GB2325782A (en) 1998-12-02
GB2325782B true GB2325782B (en) 2002-03-13

Family

ID=15132268

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9811176A Expired - Fee Related GB2325782B (en) 1997-05-26 1998-05-22 Substrate cleaning method and apparatus

Country Status (6)

Country Link
US (1) US6036581A (en)
JP (1) JP3183214B2 (en)
KR (1) KR100301300B1 (en)
CN (1) CN1135605C (en)
GB (1) GB2325782B (en)
TW (1) TW414967B (en)

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US6782100B1 (en) 1997-01-29 2004-08-24 Certicom Corp. Accelerated finite field operations on an elliptic curve
US6516816B1 (en) 1999-04-08 2003-02-11 Applied Materials, Inc. Spin-rinse-dryer
US6918864B1 (en) * 1999-06-01 2005-07-19 Applied Materials, Inc. Roller that avoids substrate slippage
WO2001000336A1 (en) * 1999-06-24 2001-01-04 Sumitomo Heavy Industries, Ltd. Method and device for washing by fluid spraying
KR100349948B1 (en) * 1999-11-17 2002-08-22 주식회사 다산 씨.앤드.아이 Dry cleaning apparatus and method using cluster
KR100359339B1 (en) * 1999-12-28 2002-11-01 (주)케이.씨.텍 Cleaning machine for semiconductor device and the methode
WO2001094036A1 (en) * 2000-06-06 2001-12-13 Nitto Denko Corporation Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
TW503458B (en) * 2000-07-11 2002-09-21 Tokyo Electron Ltd Cleaning method and cleaning apparatus for substrate
EP1221357A1 (en) * 2001-01-05 2002-07-10 Infineon Technologies SC300 GmbH & Co. KG Arrangement and method for cleaning a semiconductor device
US6852173B2 (en) * 2002-04-05 2005-02-08 Boc, Inc. Liquid-assisted cryogenic cleaning
US6949145B2 (en) * 2002-04-05 2005-09-27 Boc, Inc. Vapor-assisted cryogenic cleaning
US20050217706A1 (en) * 2002-04-05 2005-10-06 Souvik Banerjee Fluid assisted cryogenic cleaning
US20040045578A1 (en) * 2002-05-03 2004-03-11 Jackson David P. Method and apparatus for selective treatment of a precision substrate surface
KR100524875B1 (en) * 2003-06-28 2005-10-31 엘지.필립스 엘시디 주식회사 Clean room system
US8448437B2 (en) * 2003-07-25 2013-05-28 Baker Hughes Incorporated System and method of cooling turbines
US7431040B2 (en) * 2003-09-30 2008-10-07 Tokyo Electron Limited Method and apparatus for dispensing a rinse solution on a substrate
JP4802106B2 (en) 2004-01-29 2011-10-26 アプライド マテリアルズ インコーポレイテッド Method and apparatus for attaching a scrubber brush to a mandrel
KR100972839B1 (en) * 2004-03-18 2010-07-28 엘지디스플레이 주식회사 Substrate cleaning system for flat panel display device manufacturing and cleaning method using the same
US20060096622A1 (en) * 2004-11-11 2006-05-11 Samsung Electronics Co., Ltd. Dry cleaning apparatus used to manufacture semiconductor devices
WO2006055345A1 (en) * 2004-11-12 2006-05-26 Fsi International, Inc. Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
US7648581B2 (en) 2004-11-16 2010-01-19 Tokyo Electron Limited Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program and storage medium
JP4610308B2 (en) * 2004-11-16 2011-01-12 東京エレクトロン株式会社 Substrate cleaning method, substrate cleaning apparatus, substrate processing system, substrate cleaning program, and storage medium
US20070114488A1 (en) * 2004-12-13 2007-05-24 Cool Clean Technologies, Inc. Cryogenic fluid composition
US7293570B2 (en) * 2004-12-13 2007-11-13 Cool Clean Technologies, Inc. Carbon dioxide snow apparatus
WO2006076005A1 (en) * 2005-01-12 2006-07-20 Boc, Inc. System for cleaning a surface using cryogenic aerosol and fluid reactant
US7495239B2 (en) * 2005-12-22 2009-02-24 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US7504643B2 (en) * 2005-12-22 2009-03-17 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
WO2007103399A2 (en) 2006-03-07 2007-09-13 Applied Materials, Inc. Scrubber brush with sleeve and brush mandrel
KR20070105699A (en) * 2006-04-27 2007-10-31 삼성전자주식회사 Substrate Etching Device and Substrate Etching Method Using the Same
JP4946321B2 (en) 2006-09-29 2012-06-06 富士通セミコンダクター株式会社 Substrate processing apparatus and substrate processing method
FR2930675B1 (en) * 2008-04-24 2010-08-20 Alcatel Lucent STATION FOR MEASURING CONTAMINATION IN PARTICULAR OF A TRANSPORT ENCLOSURE FOR CONVEYING AND ATMOSPHERIC STORAGE OF SEMICONDUCTOR SUBSTRATES AND CORRESPONDING MEASUREMENT METHOD
CN101740341B (en) * 2008-11-26 2011-12-07 中国科学院微电子研究所 Carbon dioxide low-temperature aerosol semiconductor cleaning equipment
TWI420616B (en) * 2010-08-05 2013-12-21 Au Optronics Corp Substrate cleaning apparatus and method for cleaning substrate
CN102836844B (en) * 2011-06-20 2015-10-28 中国科学院微电子研究所 Dry ice particle jet cleaning device
CN102360157A (en) * 2011-09-28 2012-02-22 上海华力微电子有限公司 Device for removing tiny dust and stains from photomask surface and method thereof
US9099547B2 (en) 2011-10-04 2015-08-04 Infineon Technologies Ag Testing process for semiconductor devices
US8883565B2 (en) 2011-10-04 2014-11-11 Infineon Technologies Ag Separation of semiconductor devices from a wafer carrier
CN102496560A (en) * 2011-11-29 2012-06-13 上海宏力半导体制造有限公司 Wet-process etching cleaning device and wet-process etching cleaning method
CN103639151B (en) * 2013-11-28 2016-07-06 上海华力微电子有限公司 The apparatus and method of cleaning photo masks plate
TWI608573B (en) * 2016-10-27 2017-12-11 Crystalwise Tech Inc Composite substrate bonding method
CN107634022B (en) * 2017-10-27 2023-12-29 镇江佳鑫精工设备有限公司 Semiconductor part cleaning device
DE102019103273A1 (en) * 2019-02-11 2020-08-13 Brillux Gmbh & Co. Kg Method for avoiding microbial contamination of a cleaning device for a dosing system
KR102688886B1 (en) * 2021-08-26 2024-07-26 (주)씨에스피 Cleaning apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5512106A (en) * 1993-01-27 1996-04-30 Sumitomo Heavy Industries, Ltd. Surface cleaning with argon

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US4132567A (en) * 1977-10-13 1979-01-02 Fsi Corporation Apparatus for and method of cleaning and removing static charges from substrates
US5123207A (en) * 1990-10-30 1992-06-23 Tti Engineering Inc. Mobile co2 blasting decontamination system
US5315793A (en) * 1991-10-01 1994-05-31 Hughes Aircraft Company System for precision cleaning by jet spray
JPH06143148A (en) * 1992-10-30 1994-05-24 Sony Corp Particulate blast device
JP2828867B2 (en) * 1993-03-30 1998-11-25 住友重機械工業株式会社 Cleaning method and cleaning device
US5651723A (en) * 1994-04-13 1997-07-29 Viratec Thin Films, Inc. Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings
US5837064A (en) * 1996-10-04 1998-11-17 Eco-Snow Systems, Inc. Electrostatic discharge protection of static sensitive devices cleaned with carbon dioxide spray
US5836809A (en) * 1996-10-07 1998-11-17 Eco-Snow Systems, Inc. Apparatus and method for cleaning large glass plates using linear arrays of carbon dioxide (CO2) jet spray nozzles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5512106A (en) * 1993-01-27 1996-04-30 Sumitomo Heavy Industries, Ltd. Surface cleaning with argon

Also Published As

Publication number Publication date
TW414967B (en) 2000-12-11
KR19980087228A (en) 1998-12-05
JP3183214B2 (en) 2001-07-09
CN1213847A (en) 1999-04-14
KR100301300B1 (en) 2001-11-30
US6036581A (en) 2000-03-14
CN1135605C (en) 2004-01-21
JPH10326763A (en) 1998-12-08
GB9811176D0 (en) 1998-07-22
GB2325782A (en) 1998-12-02

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20060522