GB2320137B - Method for fabrication of thin film resistor - Google Patents
Method for fabrication of thin film resistorInfo
- Publication number
- GB2320137B GB2320137B GB9709375A GB9709375A GB2320137B GB 2320137 B GB2320137 B GB 2320137B GB 9709375 A GB9709375 A GB 9709375A GB 9709375 A GB9709375 A GB 9709375A GB 2320137 B GB2320137 B GB 2320137B
- Authority
- GB
- United Kingdom
- Prior art keywords
- fabrication
- thin film
- film resistor
- resistor
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
- H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9709375A GB2320137B (en) | 1997-05-08 | 1997-05-08 | Method for fabrication of thin film resistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9709375A GB2320137B (en) | 1997-05-08 | 1997-05-08 | Method for fabrication of thin film resistor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB9709375D0 GB9709375D0 (en) | 1997-07-02 |
| GB2320137A GB2320137A (en) | 1998-06-10 |
| GB2320137B true GB2320137B (en) | 1998-11-18 |
Family
ID=10812015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9709375A Expired - Lifetime GB2320137B (en) | 1997-05-08 | 1997-05-08 | Method for fabrication of thin film resistor |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB2320137B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6365483B1 (en) * | 2000-04-11 | 2002-04-02 | Viking Technology Corporation | Method for forming a thin film resistor |
| CN114765086A (en) * | 2021-01-12 | 2022-07-19 | 国巨电子（中国）有限公司 | Method for manufacturing resistor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0472277A1 (en) * | 1990-08-20 | 1992-02-26 | Ford Motor Company Limited | Method for laser scribing substrates |
| US5266529A (en) * | 1991-10-21 | 1993-11-30 | Trw Inc. | Focused ion beam for thin film resistor trim on aluminum nitride substrates |
-
1997
- 1997-05-08 GB GB9709375A patent/GB2320137B/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0472277A1 (en) * | 1990-08-20 | 1992-02-26 | Ford Motor Company Limited | Method for laser scribing substrates |
| US5266529A (en) * | 1991-10-21 | 1993-11-30 | Trw Inc. | Focused ion beam for thin film resistor trim on aluminum nitride substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2320137A (en) | 1998-06-10 |
| GB9709375D0 (en) | 1997-07-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PE20 | Patent expired after termination of 20 years |
Expiry date: 20170507 |