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GB2303928B - Exposure method and exposure system - Google Patents

Exposure method and exposure system

Info

Publication number
GB2303928B
GB2303928B GB9615865A GB9615865A GB2303928B GB 2303928 B GB2303928 B GB 2303928B GB 9615865 A GB9615865 A GB 9615865A GB 9615865 A GB9615865 A GB 9615865A GB 2303928 B GB2303928 B GB 2303928B
Authority
GB
United Kingdom
Prior art keywords
exposure
exposure method
exposure system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9615865A
Other versions
GB2303928A (en
GB9615865D0 (en
Inventor
Tatsurou Tezuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of GB9615865D0 publication Critical patent/GB9615865D0/en
Publication of GB2303928A publication Critical patent/GB2303928A/en
Application granted granted Critical
Publication of GB2303928B publication Critical patent/GB2303928B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB9615865A 1995-07-28 1996-07-29 Exposure method and exposure system Expired - Fee Related GB2303928B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7193432A JPH0945604A (en) 1995-07-28 1995-07-28 Exposure method and aligner

Publications (3)

Publication Number Publication Date
GB9615865D0 GB9615865D0 (en) 1996-09-11
GB2303928A GB2303928A (en) 1997-03-05
GB2303928B true GB2303928B (en) 1998-10-28

Family

ID=16307890

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9615865A Expired - Fee Related GB2303928B (en) 1995-07-28 1996-07-29 Exposure method and exposure system

Country Status (5)

Country Link
US (1) US5999247A (en)
JP (1) JPH0945604A (en)
KR (1) KR0178629B1 (en)
CN (1) CN1087444C (en)
GB (1) GB2303928B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI240151B (en) * 2000-10-10 2005-09-21 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
US7283208B2 (en) * 2001-02-14 2007-10-16 Asml Netherlands B.V. Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
US6535829B2 (en) * 2001-06-12 2003-03-18 United Microelectronics Corp. System for calculating exposure energy
JP2003076027A (en) * 2001-09-06 2003-03-14 Sanee Giken Kk Divided exposure device
JP3848332B2 (en) * 2003-08-29 2006-11-22 キヤノン株式会社 Exposure method and device manufacturing method
JP4574185B2 (en) * 2004-02-17 2010-11-04 キヤノン株式会社 Image pickup apparatus and flash device control method
JP5025250B2 (en) * 2006-12-15 2012-09-12 キヤノン株式会社 Exposure apparatus and device manufacturing method
JP5270109B2 (en) * 2007-05-23 2013-08-21 ルネサスエレクトロニクス株式会社 Manufacturing method of semiconductor integrated circuit device
JP5094517B2 (en) * 2008-04-11 2012-12-12 キヤノン株式会社 Exposure apparatus, measurement method, stabilization method, and device manufacturing method
KR101633744B1 (en) * 2011-08-18 2016-06-27 에이에스엠엘 네델란즈 비.브이. Lithographic apparatus and device manufacturing method
EP2733514B1 (en) * 2012-11-16 2020-09-30 PerkinElmer Cellular Technologies Germany GmbH Microscopy apparatus for structured illumination of a specimen
CN103728843B (en) * 2014-01-23 2016-01-20 中国科学院重庆绿色智能技术研究院 A kind of electronic shutter for ultraviolet LED exposure machine
JP2018060001A (en) 2016-10-04 2018-04-12 東京エレクトロン株式会社 Auxiliary exposure apparatus and method for acquiring exposure light quantity distribution
CN107219648B (en) * 2017-06-08 2020-03-31 京东方科技集团股份有限公司 Exposure machine table, exposure system and exposure method thereof
CN111198481B (en) * 2020-03-10 2023-03-31 田菱精密制版（深圳）有限公司 Process method for rapidly measuring and calculating reference exposure energy of photosensitive resist
CN113867108A (en) * 2021-09-23 2021-12-31 浙江鑫柔科技有限公司 Method for double-sided patterning based on optical transparent substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB898678A (en) * 1957-10-23 1962-06-14 Agfa Ag Photographic printing apparatus with device for the automatic regulation of the time of exposure
JPH04267243A (en) * 1991-02-22 1992-09-22 Nec Corp Exposer
JPH07220989A (en) * 1994-01-27 1995-08-18 Canon Inc Exposure apparatus and manufacture of device using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR898678A (en) * 1942-10-12 1945-05-03 Bosch Gmbh Robert Voltage regulator for generators operated at variable speeds, especially in installations mounted on vehicles
US4952815A (en) * 1988-04-14 1990-08-28 Nikon Corporation Focusing device for projection exposure apparatus
EP0451329B1 (en) * 1990-04-13 1998-01-28 Hitachi, Ltd. Controlling method of the thickness of a thin film when forming that film
US5124216A (en) * 1990-07-31 1992-06-23 At&T Bell Laboratories Method for monitoring photoresist latent images
JPH04148527A (en) * 1990-10-12 1992-05-21 Fujitsu Ltd Exposure control method
JPH0513292A (en) * 1991-07-02 1993-01-22 Nikon Corp Exposure apparatus
US5591958A (en) * 1993-06-14 1997-01-07 Nikon Corporation Scanning exposure method and apparatus
JP3412704B2 (en) * 1993-02-26 2003-06-03 株式会社ニコン Projection exposure method and apparatus, and exposure apparatus
US5635722A (en) * 1993-07-01 1997-06-03 Nikon Corporation Projection exposure method and apparatus capable of performing focus detection with high accuracy
JP3027534B2 (en) * 1996-01-26 2000-04-04 鐘紡株式会社 Fiber bundle supply device and fiber bundle joining method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB898678A (en) * 1957-10-23 1962-06-14 Agfa Ag Photographic printing apparatus with device for the automatic regulation of the time of exposure
JPH04267243A (en) * 1991-02-22 1992-09-22 Nec Corp Exposer
JPH07220989A (en) * 1994-01-27 1995-08-18 Canon Inc Exposure apparatus and manufacture of device using the same

Also Published As

Publication number Publication date
KR970007507A (en) 1997-02-21
JPH0945604A (en) 1997-02-14
CN1151535A (en) 1997-06-11
US5999247A (en) 1999-12-07
GB2303928A (en) 1997-03-05
CN1087444C (en) 2002-07-10
KR0178629B1 (en) 1999-05-01
GB9615865D0 (en) 1996-09-11

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050729