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GB2276720B - Measuring density or flux of a material in a near-vacuum - Google Patents

Measuring density or flux of a material in a near-vacuum

Info

Publication number
GB2276720B
GB2276720B GB9406490A GB9406490A GB2276720B GB 2276720 B GB2276720 B GB 2276720B GB 9406490 A GB9406490 A GB 9406490A GB 9406490 A GB9406490 A GB 9406490A GB 2276720 B GB2276720 B GB 2276720B
Authority
GB
United Kingdom
Prior art keywords
flux
vacuum
measuring density
density
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9406490A
Other versions
GB9406490D0 (en
GB2276720A (en
Inventor
Mark Burton Holbrook
William Beckman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intellemetrics Ltd
Original Assignee
Intellemetrics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intellemetrics Ltd filed Critical Intellemetrics Ltd
Publication of GB9406490D0 publication Critical patent/GB9406490D0/en
Publication of GB2276720A publication Critical patent/GB2276720A/en
Application granted granted Critical
Publication of GB2276720B publication Critical patent/GB2276720B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
GB9406490A 1993-03-31 1994-03-31 Measuring density or flux of a material in a near-vacuum Expired - Fee Related GB2276720B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939306780A GB9306780D0 (en) 1993-03-31 1993-03-31 Measurement of concentration of material

Publications (3)

Publication Number Publication Date
GB9406490D0 GB9406490D0 (en) 1994-05-25
GB2276720A GB2276720A (en) 1994-10-05
GB2276720B true GB2276720B (en) 1996-11-06

Family

ID=10733129

Family Applications (2)

Application Number Title Priority Date Filing Date
GB939306780A Pending GB9306780D0 (en) 1993-03-31 1993-03-31 Measurement of concentration of material
GB9406490A Expired - Fee Related GB2276720B (en) 1993-03-31 1994-03-31 Measuring density or flux of a material in a near-vacuum

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB939306780A Pending GB9306780D0 (en) 1993-03-31 1993-03-31 Measurement of concentration of material

Country Status (1)

Country Link
GB (2) GB9306780D0 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4270091A (en) * 1978-01-25 1981-05-26 Varian Associates, Inc. Apparatus and method for measuring pressures and indicating leaks with optical analysis
US4350661A (en) * 1980-01-10 1982-09-21 The United States Of America As Represented By The Secretary Of The Air Force Method and apparatus for analyzing supersonic flow fields by laser induced fluorescence
US4833921A (en) * 1988-05-05 1989-05-30 Hughes Aircraft Company Gas pressure measurement device
US4902977A (en) * 1989-01-10 1990-02-20 University Of Utah Multipactor pressure gauge for use as a noninvasive vacuum tube sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4270091A (en) * 1978-01-25 1981-05-26 Varian Associates, Inc. Apparatus and method for measuring pressures and indicating leaks with optical analysis
US4350661A (en) * 1980-01-10 1982-09-21 The United States Of America As Represented By The Secretary Of The Air Force Method and apparatus for analyzing supersonic flow fields by laser induced fluorescence
US4833921A (en) * 1988-05-05 1989-05-30 Hughes Aircraft Company Gas pressure measurement device
US4902977A (en) * 1989-01-10 1990-02-20 University Of Utah Multipactor pressure gauge for use as a noninvasive vacuum tube sensor

Also Published As

Publication number Publication date
GB9306780D0 (en) 1993-05-26
GB9406490D0 (en) 1994-05-25
GB2276720A (en) 1994-10-05

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19961219

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20060331