GB2266962B - Capacitive differential pressure detector - Google Patents

Capacitive differential pressure detector

Info

Publication number: GB2266962B
Authority: GB; United Kingdom
Prior art keywords: differential pressure; pressure detector; capacitive differential; capacitive; detector
Prior art date: 1989-04-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

GB9315064A

Other versions

GB2266962A (en

GB9315064D0 (en

Inventor

Mitsura Tamai

Tadanori Yuhara

Kimihiro Nakamura

Kazuaki Kitamura

Toshiyuki Takano

Teizo Takahama

Mikihiko Matsuda

Shinichi Souma

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fuji Electric Co Ltd

Original Assignee

Fuji Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-04-14

Filing date

1993-07-20

Publication date

1994-02-02

1990-04-17 Priority claimed from GB9008565A external-priority patent/GB2231159B/en

1993-07-20 Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd

1993-09-01 Publication of GB9315064D0 publication Critical patent/GB9315064D0/en

1993-11-17 Publication of GB2266962A publication Critical patent/GB2266962A/en

1994-02-02 Application granted granted Critical

1994-02-02 Publication of GB2266962B publication Critical patent/GB2266962B/en

2013-07-20 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

GB9315064A 1989-04-14 1993-07-20 Capacitive differential pressure detector Expired - Fee Related GB2266962B (en)

Applications Claiming Priority (6)

Application Number	Priority Date	Filing Date	Title
JP9480489		1989-04-14
JP9480589		1989-04-14
JP20526789		1989-08-08
JP20526589		1989-08-08
JP20526689		1989-08-08
GB9008565A GB2231159B (en)	1989-04-14	1990-04-17	Capacitive differential pressure detector

Publications (3)

Publication Number	Publication Date
GB9315064D0 GB9315064D0 (en)	1993-09-01
GB2266962A GB2266962A (en)	1993-11-17
GB2266962B true GB2266962B (en)	1994-02-02

Family

ID=27547083

Family Applications (4)

Application Number	Title	Priority Date	Filing Date
GB9314965A Expired - Fee Related GB2266961B (en)	1989-04-14	1993-07-20	Capacitive differential pressure detector
GB9315065A Expired - Fee Related GB2266963B (en)	1989-04-14	1993-07-20	Capacitive differential pressure detector
GB9315064A Expired - Fee Related GB2266962B (en)	1989-04-14	1993-07-20	Capacitive differential pressure detector
GB9314964A Expired - Fee Related GB2266960B (en)	1989-04-14	1993-07-29	Capacitive differential pressure detector

Family Applications Before (2)

Application Number	Title	Priority Date	Filing Date
GB9314965A Expired - Fee Related GB2266961B (en)	1989-04-14	1993-07-20	Capacitive differential pressure detector
GB9315065A Expired - Fee Related GB2266963B (en)	1989-04-14	1993-07-20	Capacitive differential pressure detector

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
GB9314964A Expired - Fee Related GB2266960B (en)	1989-04-14	1993-07-29	Capacitive differential pressure detector

Country Status (1)

Country	Link
GB (4)	GB2266961B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN113120849B (en) *	2020-01-16	2024-02-23	京东方科技集团股份有限公司	Transducer element, preparation method thereof and transducer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4322775A (en) *	1979-10-29	1982-03-30	Delatorre Leroy C	Capacitive pressure sensor
GB2124770B (en) *	1982-08-05	1985-12-11	Airflow Dev Ltd	Differential capacitance pressure transducer
US4754365A (en) *	1987-06-15	1988-06-28	Fischer & Porter Company	Differential pressure transducer

1993
- 1993-07-20 GB GB9314965A patent/GB2266961B/en not_active Expired - Fee Related
- 1993-07-20 GB GB9315065A patent/GB2266963B/en not_active Expired - Fee Related
- 1993-07-20 GB GB9315064A patent/GB2266962B/en not_active Expired - Fee Related
- 1993-07-29 GB GB9314964A patent/GB2266960B/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB2266962A (en)	1993-11-17
GB2266963A (en)	1993-11-17
GB2266960A (en)	1993-11-17
GB9315064D0 (en)	1993-09-01
GB2266961B (en)	1994-02-02
GB2266963B (en)	1994-02-02
GB2266961A (en)	1993-11-17
GB9314964D0 (en)	1993-09-01
GB2266960B (en)	1994-02-02
GB9315065D0 (en)	1993-09-01
GB9314965D0 (en)	1993-09-01

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Legal Events

Date	Code	Title	Description
2002-12-04	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 20020417