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GB2232489B - Double-integrating silicon acceleration sensing device - Google Patents

Double-integrating silicon acceleration sensing device

Info

Publication number
GB2232489B
GB2232489B GB9012398A GB9012398A GB2232489B GB 2232489 B GB2232489 B GB 2232489B GB 9012398 A GB9012398 A GB 9012398A GB 9012398 A GB9012398 A GB 9012398A GB 2232489 B GB2232489 B GB 2232489B
Authority
GB
United Kingdom
Prior art keywords
double
sensing device
acceleration sensing
silicon acceleration
integrating silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9012398A
Other versions
GB9012398D0 (en
GB2232489A (en
Inventor
Louis Pasqual Farace
John Dunning Titus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of GB9012398D0 publication Critical patent/GB9012398D0/en
Publication of GB2232489A publication Critical patent/GB2232489A/en
Application granted granted Critical
Publication of GB2232489B publication Critical patent/GB2232489B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
GB9012398A 1989-06-05 1990-06-04 Double-integrating silicon acceleration sensing device Expired - Fee Related GB2232489B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US36152489A 1989-06-05 1989-06-05

Publications (3)

Publication Number Publication Date
GB9012398D0 GB9012398D0 (en) 1990-07-25
GB2232489A GB2232489A (en) 1990-12-12
GB2232489B true GB2232489B (en) 1993-11-03

Family

ID=23422394

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9012398A Expired - Fee Related GB2232489B (en) 1989-06-05 1990-06-04 Double-integrating silicon acceleration sensing device

Country Status (2)

Country Link
DE (1) DE4015464A1 (en)
GB (1) GB2232489B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002103367A1 (en) * 2001-06-18 2002-12-27 Thomas P. Kicher & Co. Acceleration transducer and method
KR20040010746A (en) * 2001-06-18 2004-01-31 허니웰 인터내셔널 인코포레이티드 Small size, high capacitance readout silicon based mems accelerometer
FR2880495A1 (en) 2005-01-06 2006-07-07 Thomson Licensing Sa METHOD FOR SELECTING AN ELEMENT IN A LIST BY DISPLACING A GRAPHICAL DISTINCTION AND APPARATUS USING THE METHOD

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1536017A (en) * 1975-02-27 1978-12-13 Wyler Ag Device for measuring gravitational and inertial forces
GB2158945A (en) * 1984-05-18 1985-11-20 Becton Dickinson Co Capacitive transducer
GB2194341A (en) * 1986-07-26 1988-03-02 Messerschmitt Boelkow Blohm Capacitive acceleration sensors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1536017A (en) * 1975-02-27 1978-12-13 Wyler Ag Device for measuring gravitational and inertial forces
GB2158945A (en) * 1984-05-18 1985-11-20 Becton Dickinson Co Capacitive transducer
GB2194341A (en) * 1986-07-26 1988-03-02 Messerschmitt Boelkow Blohm Capacitive acceleration sensors

Also Published As

Publication number Publication date
GB9012398D0 (en) 1990-07-25
DE4015464A1 (en) 1990-12-06
GB2232489A (en) 1990-12-12

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950604