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GB2226947B - An air shower for personnel - Google Patents

An air shower for personnel

Info

Publication number
GB2226947B
GB2226947B GB8825871A GB8825871A GB2226947B GB 2226947 B GB2226947 B GB 2226947B GB 8825871 A GB8825871 A GB 8825871A GB 8825871 A GB8825871 A GB 8825871A GB 2226947 B GB2226947 B GB 2226947B
Authority
GB
United Kingdom
Prior art keywords
personnel
air shower
shower
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8825871A
Other versions
GB2226947A (en
GB8825871D0 (en
Inventor
Jimmy Chua
Yam Chai Ong
Lay Yew Lim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ESCO SCIENT PRODUCTS
ESCO TECHNOLOGIES
Original Assignee
ESCO SCIENT PRODUCTS
ESCO TECHNOLOGIES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ESCO SCIENT PRODUCTS, ESCO TECHNOLOGIES filed Critical ESCO SCIENT PRODUCTS
Priority to GB8825871A priority Critical patent/GB2226947B/en
Publication of GB8825871D0 publication Critical patent/GB8825871D0/en
Publication of GB2226947A publication Critical patent/GB2226947A/en
Application granted granted Critical
Publication of GB2226947B publication Critical patent/GB2226947B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ventilation (AREA)
  • Cleaning In General (AREA)
GB8825871A 1988-11-04 1988-11-04 An air shower for personnel Expired - Fee Related GB2226947B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8825871A GB2226947B (en) 1988-11-04 1988-11-04 An air shower for personnel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8825871A GB2226947B (en) 1988-11-04 1988-11-04 An air shower for personnel

Publications (3)

Publication Number Publication Date
GB8825871D0 GB8825871D0 (en) 1988-12-07
GB2226947A GB2226947A (en) 1990-07-18
GB2226947B true GB2226947B (en) 1992-09-30

Family

ID=10646331

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8825871A Expired - Fee Related GB2226947B (en) 1988-11-04 1988-11-04 An air shower for personnel

Country Status (1)

Country Link
GB (1) GB2226947B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4203765C2 (en) * 1992-02-10 1995-04-13 Kaefer Isoliertechnik Device for decontaminating people and equipment
DE102011009626A1 (en) * 2011-01-28 2012-08-02 Eisenmann Ag Device for cleaning surfaces of objects

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB870200A (en) * 1958-06-27 1961-06-14 John Bass Ltd Improvements in or relating to apparatus for removing dust from a body, suitably a human being wearing protective clothing
US3571840A (en) * 1968-07-11 1971-03-23 Eaton Yale & Towne Cleaning apparatus for looms
US3842680A (en) * 1972-08-09 1974-10-22 Bach Simpson Ltd Gas blast wiping collar for cleaning pipettes
GB1486828A (en) * 1973-09-12 1977-09-28 Hess & Cie Air vent unit for room ventilation
US4313767A (en) * 1979-12-04 1982-02-02 American Can Company Method and apparatus for cleaning containers with an ionized gas blast
WO1982004227A1 (en) * 1981-06-03 1982-12-09 Fluidics Corp Bowles Improvements in oscillating reed and method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB870200A (en) * 1958-06-27 1961-06-14 John Bass Ltd Improvements in or relating to apparatus for removing dust from a body, suitably a human being wearing protective clothing
US3571840A (en) * 1968-07-11 1971-03-23 Eaton Yale & Towne Cleaning apparatus for looms
US3842680A (en) * 1972-08-09 1974-10-22 Bach Simpson Ltd Gas blast wiping collar for cleaning pipettes
GB1486828A (en) * 1973-09-12 1977-09-28 Hess & Cie Air vent unit for room ventilation
US4313767A (en) * 1979-12-04 1982-02-02 American Can Company Method and apparatus for cleaning containers with an ionized gas blast
WO1982004227A1 (en) * 1981-06-03 1982-12-09 Fluidics Corp Bowles Improvements in oscillating reed and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
P R Austin, "Design and Operation of Clean Rooms", pub. 1970Business News Publishing Co,see p151-154 *

Also Published As

Publication number Publication date
GB2226947A (en) 1990-07-18
GB8825871D0 (en) 1988-12-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20011104