GB2175687B - Interferometric-incremental device for testing flatness - Google Patents

Interferometric-incremental device for testing flatness

Info

Publication number: GB2175687B
Authority: GB; United Kingdom
Prior art keywords: interferometric; testing flatness; incremental device; incremental; flatness
Prior art date: 1985-04-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB8610079A

Other versions

GB2175687A (en

GB8610079D0 (en

Inventor

Gerd Jager

Hans Buchner

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SUHL FEINMESSZEUGFAB VEB

Original Assignee

SUHL FEINMESSZEUGFAB VEB

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-04-26

Filing date

1986-04-24

Publication date

1989-03-15

1986-04-24 Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB

1986-05-29 Publication of GB8610079D0 publication Critical patent/GB8610079D0/en

1986-12-03 Publication of GB2175687A publication Critical patent/GB2175687A/en

1989-03-15 Application granted granted Critical

1989-03-15 Publication of GB2175687B publication Critical patent/GB2175687B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

GB8610079A 1985-04-26 1986-04-24 Interferometric-incremental device for testing flatness Expired GB2175687B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DD27557685		1985-04-26

Publications (3)

Publication Number	Publication Date
GB8610079D0 GB8610079D0 (en)	1986-05-29
GB2175687A GB2175687A (en)	1986-12-03
GB2175687B true GB2175687B (en)	1989-03-15

Family

ID=5567197

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB8610079A Expired GB2175687B (en)	1985-04-26	1986-04-24	Interferometric-incremental device for testing flatness

Country Status (3)

Country	Link
DE (1)	DE3612157A1 (en)
FR (1)	FR2581177A1 (en)
GB (1)	GB2175687B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3623244A1 (en) *	1985-12-23	1987-06-25	Suhl Feinmesszeugfab Veb	CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES
DE3820225C1 (en) *	1988-06-14	1989-07-13	Hpo Hanseatische Praezisions- Und Orbittechnik Gmbh, 2800 Bremen, De

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2658399A1 (en) *	1976-12-23	1978-06-29	Ibm Deutschland	INTERFEROMETRIC PROCEDURE

1986
- 1986-04-11 DE DE19863612157 patent/DE3612157A1/en not_active Withdrawn
- 1986-04-24 GB GB8610079A patent/GB2175687B/en not_active Expired
- 1986-04-25 FR FR8606043A patent/FR2581177A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
DE3612157A1 (en)	1986-11-06
FR2581177A1 (en)	1986-10-31
GB2175687A (en)	1986-12-03
GB8610079D0 (en)	1986-05-29

Publication	Publication Date	Title
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GB8609431D0 (en)	1986-05-21	Measuring apparatus
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GB8629057D0 (en)	1987-01-14	Measuring device
GB8600989D0 (en)	1986-02-19	Measuring device
GB8529429D0 (en)	1986-01-08	Test apparatus
GB8606641D0 (en)	1986-04-23	Testing device
GB8504987D0 (en)	1985-03-27	Measuring device
GB8333911D0 (en)	1984-02-01	Device for measuring force
GB2175687B (en)	1989-03-15	Interferometric-incremental device for testing flatness
GB8623122D0 (en)	1986-10-29	Non-destuctive testing
GB8524485D0 (en)	1985-11-06	Measurement apparatus
GB8509269D0 (en)	1985-05-15	Measuring device
KR890006173Y1 (en)	1989-09-18	Device for fixing stone-panels
GB8509881D0 (en)	1985-05-22	Testing device
GB8529450D0 (en)	1986-01-08	Testing device
GB8422005D0 (en)	1984-10-03	Testing device
GB2169419B (en)	1988-11-02	Inspection device
GB8523838D0 (en)	1985-10-30	Measuring apparatus
CS955686A1 (en)	1989-06-13	Device for large dimensions measuring
GB8514342D0 (en)	1985-07-10	Testing apparatus
IE850417L (en)	1985-08-21	Component testing apparatus

Legal Events

Date	Code	Title	Description
1991-12-18	PCNP	Patent ceased through non-payment of renewal fee