GB2170005B - Interferometric multicoordinate measuring device - Google Patents

Interferometric multicoordinate measuring device

Info

Publication number: GB2170005B
Authority: GB; United Kingdom
Prior art keywords: interferometric; measuring device; multicoordinate; multicoordinate measuring; measuring
Prior art date: 1985-01-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB8600989A

Other versions

GB2170005A (en

GB8600989D0 (en

Inventor

Gerd Jager

Hans Buchner

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SUHL FEINMESSZEUGFAB VEB

Original Assignee

SUHL FEINMESSZEUGFAB VEB

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-01-18

Filing date

1986-01-16

Publication date

1988-08-17

1986-01-16 Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB

1986-02-19 Publication of GB8600989D0 publication Critical patent/GB8600989D0/en

1986-07-23 Publication of GB2170005A publication Critical patent/GB2170005A/en

1988-08-17 Application granted granted Critical

1988-08-17 Publication of GB2170005B publication Critical patent/GB2170005B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

GB8600989A 1985-01-18 1986-01-16 Interferometric multicoordinate measuring device Expired GB2170005B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DD27263785A DD234070A1 (en)	1985-01-18	1985-01-18	INTERFEROMETRIC MULTI COORDINATE MEASURING DEVICE

Publications (3)

Publication Number	Publication Date
GB8600989D0 GB8600989D0 (en)	1986-02-19
GB2170005A GB2170005A (en)	1986-07-23
GB2170005B true GB2170005B (en)	1988-08-17

Family

ID=5564887

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB8600989A Expired GB2170005B (en)	1985-01-18	1986-01-16	Interferometric multicoordinate measuring device

Country Status (4)

Country	Link
DD (1)	DD234070A1 (en)
DE (1)	DE3600673A1 (en)
FR (1)	FR2576407A1 (en)
GB (1)	GB2170005B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3623244A1 (en) *	1985-12-23	1987-06-25	Suhl Feinmesszeugfab Veb	CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES
GB2229531A (en) *	1989-03-21	1990-09-26	Lee Russell Simpson	Liquid level alarm
GB2256606A (en) *	1991-05-09	1992-12-16	Cranfield Precision Engineerin	High-precision positional control.
DE4221989C2 (en) *	1992-07-04	1995-01-12	Daimler Benz Ag	Device for interferometric measurement of the relative position of the two measuring quills of a two-column coordinate measuring machine
US5438413A (en) *	1993-03-03	1995-08-01	Kla Instruments Corporation	Process for measuring overlay misregistration during semiconductor wafer fabrication
GB9603426D0 (en) *	1996-02-19	1996-04-17	Western Atlas Uk Ltd	Improved monitoring system for workpiece and tool carriage movement
US6727989B1 (en)	2000-06-20	2004-04-27	Infineon Technologies Ag	Enhanced overlay measurement marks for overlay alignment and exposure tool condition control
KR100578140B1 (en) *	2004-10-07	2006-05-10	삼성전자주식회사	Interferometer system for displacement measurement and exposure device using the same
DE102004051962B4 (en) *	2004-10-26	2007-08-09	Technische Universität Ilmenau	Device for the interferometric measurement of the spatial coordinates of an object
CN105466343B (en) *	2014-09-09	2019-02-05	上海微电子装备（集团）股份有限公司	Measurement of in-plane motion devices and methods therefor
GB2555646A (en) *	2016-11-03	2018-05-09	Mbda Uk Ltd	Interferometric position sensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1547403A1 (en) *	1967-01-25	1969-12-18	Leitz Ernst Gmbh	Evaluation method for interferometer
US4558952A (en) *	1983-02-22	1985-12-17	Kules Vladimir P	Method for measuring an optical length of light path and a laser interferometer for carrying same into effect
EP0117964A1 (en) *	1983-03-03	1984-09-12	GAME INGENIERIE Société Anonyme	Device to measure and to correct the displacement of the mobile organs of a 3 D measuring machine

1985
- 1985-01-18 DD DD27263785A patent/DD234070A1/en unknown
1986
- 1986-01-13 DE DE19863600673 patent/DE3600673A1/en not_active Withdrawn
- 1986-01-13 FR FR8600363A patent/FR2576407A1/en active Pending
- 1986-01-16 GB GB8600989A patent/GB2170005B/en not_active Expired

Also Published As

Publication number	Publication date
FR2576407A1 (en)	1986-07-25
DD234070A1 (en)	1986-03-19
DE3600673A1 (en)	1986-07-24
GB2170005A (en)	1986-07-23
GB8600989D0 (en)	1986-02-19

Publication	Publication Date	Title
GB8628157D0 (en)	1986-12-31	Interferometric device
IL76517A0 (en)	1986-01-31	Distance measuring device
GB8609397D0 (en)	1986-05-21	Interferometric device
EP0211142A3 (en)	1988-08-24	Device for measuring displacement
GB2173592B (en)	1988-10-12	Fibre-optic measuring device
EP0232514A3 (en)	1989-11-15	Force measuring device
EP0300823A3 (en)	1990-04-25	Distance measuring device
EP0246404A3 (en)	1990-05-16	Measurement device
GB8603978D0 (en)	1986-03-26	Measuring distance
GB8709914D0 (en)	1987-06-03	Measuring device
GB2180656B (en)	1989-08-23	Pressure measuring device
GB8602966D0 (en)	1986-03-12	Distance measuring devices
GB8609770D0 (en)	1986-05-29	Capacitance measuring
GB8609563D0 (en)	1986-05-21	Measuring device
GB8629057D0 (en)	1987-01-14	Measuring device
GB2170005B (en)	1988-08-17	Interferometric multicoordinate measuring device
GB8622173D0 (en)	1986-10-22	Interferometric measurement
GB2211047B (en)	1992-08-12	Distance measuring device
GB8609374D0 (en)	1986-05-21	Measure
GB8504987D0 (en)	1985-03-27	Measuring device
GB8525714D0 (en)	1985-11-20	Fabric measuring device
GB8606566D0 (en)	1986-04-23	Measuring device
EP0234375A3 (en)	1990-12-12	Light-electrical position measurement device
GB8608627D0 (en)	1986-05-14	Measuring device
GB8525469D0 (en)	1985-11-20	Sensing & measuring devices

Legal Events

Date	Code	Title	Description
1991-09-11	PCNP	Patent ceased through non-payment of renewal fee