GB2168476B - Interferometer in particular for incremental scanning of variable interference structures - Google Patents
Interferometer in particular for incremental scanning of variable interference structuresInfo
- Publication number
- GB2168476B GB2168476B GB8528756A GB8528756A GB2168476B GB 2168476 B GB2168476 B GB 2168476B GB 8528756 A GB8528756 A GB 8528756A GB 8528756 A GB8528756 A GB 8528756A GB 2168476 B GB2168476 B GB 2168476B
- Authority
- GB
- United Kingdom
- Prior art keywords
- interferometer
- divider
- beam splitter
- beams
- variable interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
An interferometer in which a diaphragm 3 is located between an interferometer divider 1 and a beam divider connected beyond it, and the beam passing through the diaphragm is divided in the beam divider into two partial beams, each of these beams being transferred to a discrete photoelectric detector. A first beam splitter 30 and a second beam splitter 34 positioned beyond it are disposed between the interferometer divider 1 and the beam divider. The beam split by the first beam splitter in the direction of the second beam splitter is divided in the second beam splitter into two partial beams 35,36, each of these beams falling on a linear arrangement of integrated photoelectric scanning elements 38,40 associated with it. The direction of the two lines of scanning elements are perpendicular to one another. <IMAGE>
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD26976884A DD229208B1 (en) | 1984-11-22 | 1984-11-22 | INTERFEROMETERS, ESPECIALLY FOR INCREMENTAL CHARACTERIZATION OF CHANGED INTERFERENCE STRUCTURES |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB8528756D0 GB8528756D0 (en) | 1985-12-24 |
| GB2168476A GB2168476A (en) | 1986-06-18 |
| GB2168476B true GB2168476B (en) | 1988-06-08 |
Family
ID=5562479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB8528756A Expired GB2168476B (en) | 1984-11-22 | 1985-11-22 | Interferometer in particular for incremental scanning of variable interference structures |
Country Status (4)
| Country | Link |
|---|---|
| DD (1) | DD229208B1 (en) |
| DE (1) | DE3540856A1 (en) |
| FR (1) | FR2573525A1 (en) |
| GB (1) | GB2168476B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3623244A1 (en) * | 1985-12-23 | 1987-06-25 | Suhl Feinmesszeugfab Veb | CONTACTLESS INTERFEROMETRIC SENSOR FOR INCREMENTAL SCANNING OF VARIOUS INTERFERENCE STRUCTURES |
| DE3930632A1 (en) * | 1989-09-13 | 1991-03-14 | Steinbichler Hans | METHOD FOR DIRECT PHASE MEASUREMENT OF RADIATION, IN PARTICULAR LIGHT RADIATION, AND DEVICE FOR CARRYING OUT THIS METHOD |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1460861A (en) * | 1974-03-05 | 1977-01-06 | Nat Res Dev | Interferrometers |
| DE2926738C2 (en) * | 1979-07-03 | 1982-10-28 | Ibm Deutschland Gmbh, 7000 Stuttgart | Method for interferometric surface shape analysis |
| DD201191B1 (en) * | 1981-09-24 | 1987-07-15 | Ilmenau Tech Hochschule | KIPPINVARIANT INTERFEROMETER WITH LEVELS MIRROR |
-
1984
- 1984-11-22 DD DD26976884A patent/DD229208B1/en not_active IP Right Cessation
-
1985
- 1985-11-18 DE DE19853540856 patent/DE3540856A1/en active Granted
- 1985-11-22 GB GB8528756A patent/GB2168476B/en not_active Expired
- 1985-11-22 FR FR8517360A patent/FR2573525A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE3540856C2 (en) | 1989-07-20 |
| FR2573525A1 (en) | 1986-05-23 |
| DE3540856A1 (en) | 1986-05-28 |
| GB2168476A (en) | 1986-06-18 |
| DD229208A1 (en) | 1985-10-30 |
| GB8528756D0 (en) | 1985-12-24 |
| DD229208B1 (en) | 1988-02-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19931122 |