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GB2131176B - Method of manufacturing a capacitance distance measuring probe - Google Patents

Method of manufacturing a capacitance distance measuring probe

Info

Publication number
GB2131176B
GB2131176B GB08228727A GB8228727A GB2131176B GB 2131176 B GB2131176 B GB 2131176B GB 08228727 A GB08228727 A GB 08228727A GB 8228727 A GB8228727 A GB 8228727A GB 2131176 B GB2131176 B GB 2131176B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
distance measuring
measuring probe
capacitance distance
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08228727A
Other versions
GB2131176A (en
Inventor
John William Hender Chivers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rolls Royce PLC
Original Assignee
Rolls Royce PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rolls Royce PLC filed Critical Rolls Royce PLC
Priority to GB08228727A priority Critical patent/GB2131176B/en
Publication of GB2131176A publication Critical patent/GB2131176A/en
Application granted granted Critical
Publication of GB2131176B publication Critical patent/GB2131176B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
GB08228727A 1982-10-07 1982-10-07 Method of manufacturing a capacitance distance measuring probe Expired GB2131176B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08228727A GB2131176B (en) 1982-10-07 1982-10-07 Method of manufacturing a capacitance distance measuring probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08228727A GB2131176B (en) 1982-10-07 1982-10-07 Method of manufacturing a capacitance distance measuring probe

Publications (2)

Publication Number Publication Date
GB2131176A GB2131176A (en) 1984-06-13
GB2131176B true GB2131176B (en) 1986-02-19

Family

ID=10533461

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08228727A Expired GB2131176B (en) 1982-10-07 1982-10-07 Method of manufacturing a capacitance distance measuring probe

Country Status (1)

Country Link
GB (1) GB2131176B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103105182A (en) * 2011-11-15 2013-05-15 广达电脑股份有限公司 Method for manufacturing proximity induction module
CN105716630A (en) * 2009-12-31 2016-06-29 迈普尔平版印刷Ip有限公司 CAPACITIVE SENSING SYSTEM FOR INTEGRATED SENSOR SYSTEM OF lithography MACHINE

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1191261A (en) * 1983-12-14 1985-07-30 Francois Lalonde Apparatus for dynamic and contactless measurement of small distances
US4924172A (en) * 1988-08-25 1990-05-08 Kaman Instrumentation Corporation Capacitive sensor and electronic circuit for non-contact distance measurement
US5070302A (en) * 1989-09-05 1991-12-03 Eastman Kodak Company Capacitance probe for measuring a width of a clearance between parts
GB9009005D0 (en) * 1990-04-21 1990-06-20 Coopers Payen Limited Measuring apparatus
US5760593A (en) * 1996-02-14 1998-06-02 Bicc Public Limited Company Gap measurement device
WO2005067793A1 (en) * 2004-01-16 2005-07-28 Capamo Aps Plate for a measuring cell
DE102006059229B4 (en) 2006-12-13 2023-02-09 Rechner Industrie-Elektronik Gmbh Capacitive sensor head
US20080202251A1 (en) * 2007-02-27 2008-08-28 Iee International Electronics & Engineering S.A. Capacitive pressure sensor
NL2004052C2 (en) * 2010-01-05 2011-07-06 Mapper Lithography Ip Bv Capacitive sensing system.
NL2004051C2 (en) * 2010-01-05 2011-07-06 Mapper Lithography Ip Bv Capacitive sensor.
NL2004054C2 (en) * 2010-01-05 2011-07-06 Mapper Lithography Ip Bv Lithography system with capacitive sensing system.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB717127A (en) * 1951-07-27 1954-10-20 Unilever Ltd Improvements in apparatus for measuring dielectric properties of materials
GB752616A (en) * 1953-09-03 1956-07-11 Western Electric Co Improvements in or relating to apparatus for coating wire with extruded insulating material
GB1464095A (en) * 1974-05-21 1977-02-09 Thorn Domestic Appliances Ltd Proximity detectors

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105716630A (en) * 2009-12-31 2016-06-29 迈普尔平版印刷Ip有限公司 CAPACITIVE SENSING SYSTEM FOR INTEGRATED SENSOR SYSTEM OF lithography MACHINE
CN105716630B (en) * 2009-12-31 2019-08-23 Asml荷兰有限公司 A kind of capacitive sensing system of the integrated sensor system for lithography machines
CN103105182A (en) * 2011-11-15 2013-05-15 广达电脑股份有限公司 Method for manufacturing proximity induction module
CN103105182B (en) * 2011-11-15 2015-11-18 广达电脑股份有限公司 Method for manufacturing proximity induction module

Also Published As

Publication number Publication date
GB2131176A (en) 1984-06-13

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Legal Events

Date Code Title Description
PG Patent granted