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GB2107360A - Depositing silicon on metal - Google Patents

Depositing silicon on metal Download PDF

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Publication number
GB2107360A
GB2107360A GB08130747A GB8130747A GB2107360A GB 2107360 A GB2107360 A GB 2107360A GB 08130747 A GB08130747 A GB 08130747A GB 8130747 A GB8130747 A GB 8130747A GB 2107360 A GB2107360 A GB 2107360A
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GB
United Kingdom
Prior art keywords
silicon
metal surface
mixture
microns
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08130747A
Other versions
GB2107360B (en
Inventor
Dr Malcolm Piers Hill
Dr John Frederick Mathews
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Electricity Generating Board
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Central Electricity Generating Board
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Filing date
Publication date
Application filed by Central Electricity Generating Board filed Critical Central Electricity Generating Board
Priority to GB08130747A priority Critical patent/GB2107360B/en
Publication of GB2107360A publication Critical patent/GB2107360A/en
Application granted granted Critical
Publication of GB2107360B publication Critical patent/GB2107360B/en
Expired legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24Deposition of silicon only

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

To protect a metal surface, there is deposited thereon a non-oxidised silicon coating having a thickness of at least 0.25 microns, the silicon coating being applied by chemical vapour deposition in a single step treatment from a mixture of monosilane and an inert gas or from a mixture of monosilane hydrogen and an inert gas, at a temperature in excess of 748K and at substantially atmospheric pressure. The thickness is usually substantially greater than 0.25 microns, typically being at least 0.7 microns but may be substantially thicker than this.

Description

SPECIFICATION Methods of protecting a metal surface This invention relates to methods for protecting a metal surface using a silicon coating.
It is known to protect a metal surface by putting a silicon coating thereon. Heretofore however it has been considered desirable to oxidise any such silicon coating or to deposit silica directly on the metal for corrosion protection.
Patent Specification No. 1463053 describes a technique in which a glassy silica coating is desposited on a metal using a gas-phase reaction of monosilane (SiH4) with oxygen and, in Specification No. 1511353, a coating technique using diborane in addition to monosilane and oxygen is described. With such techniques however problems arise with dust formation, particularly siloxane dust. To avoid the dust problem, a technique is described in Specification No. 1 530337 in which a thin silicon coating is deposited on a metal surface and is subsequently oxidised at a high temperature under carefully controlled oxidation potential conditions such that the oxidation of the silicon is faster than that of the substrate.This technique however is complex and there are problems in evenly coating complex objects, such as for example arrays of boiler tubes, with the required thin coating of silicon.
According to the present invention a method of protecting a metal surface comprises the step of depositing thereon a non-oxidised silicon coating having a thickness of at least 0.25 microns, the silicon coating being applied by chemical vapour deposition in a single step treatment from a mixture of monosilane (SiH4) and an inert gas or a mixture of monosilane, hydrogen and an inert gas at a temperature in excess of 748 K and at substantially atmospheric pressure.
The silicon film, which for most purposes would be at least 0.75 microns thick, and might typically be much thicker is far thicker than has heretofore been proposed for protective coatings for metals. For many corrosion applications, a thickness of 5 microns might be used but, where excessive corrosion rates occur or where erosion is possibie, a thickness of up to say 50 microns might be used. With this thick silicon film deposited by the above-mentioned process in a single layer, it has been found possible to avoid any oxidising of the silicon in the coating and hence to obtain a protective layer which protects the underlying substrate. A deposition temperature in excess of 748 K is employed in order to achieve an adequate rate of deposition.
Faster deposition can be obtained with higher temperatures and typically a temperature of 773 K might be employed. Maximum temperatures are limited by interdiffusion of silicon with components of the substrate, and for a steel, would depend on the type of steel being protected. With typical ferritic steels with chromium compositions in the range 0--129/0 and austenitic steels with chromium contents up to 20%, this upper limit will not be below 1300 K. At temperatures in excess of 748 K, the effects of residual oxide films on the metal are eliminated and it is possible to produce the required thick silicon layer in a reasonable time, for example a layer 0.75 microns thick might typically be produced in 24 hours at a temperature of 773 K.
The protection is not dependent in any way on the formation of a continuous glassy layer impervious to gas such as has heretofore been considered necessary. The above process enables a uniform layer of silicon, free of silica as a particulate impurity, to be achieved. Freedom from silica particles is desirable as these might disrupt the homogeneity of the layer and leave easy diffusion paths for corrosive gases to the metal surface. By eliminating all particulate material from the silicon layer the risk of spalling of the coating caused by differential thermal expansion of the foreign particles is eliminated.
The process described above may readily be applied for example to boiler sections and associated components immediately after manufacture; conveniently the coating is effected before installation of the components and may readily be associated with other treatment such as solution treatment, tempering and stress-relieving stages of manufacture, all of which are carried out at high temperatures in an inert gas atmosphere.
However the process of the present invention may be used directly on installed equipment such as installed boilers by feeding the gases at the required temperature over the surfaces to be protected.
The temperature for carrying out the process is at or above 748 K. In general, the temperature will be kept as close to this value as possible. The maximum temperature would usually be determined by the substrate.
The following is a description of one example of the invention.
A chromium steel element containing 9% chromium by weight, which simulated part of a large boiler, was placed in a closed silica vessel, the lower part of which extended downwardly into a furnace for heating the element.
Thermocouples were provided for monitoring the temperature. After putting the specimen in the vessel the vessel was purged with 2% hydrogen in dry argon for 2 to 3 hours and the specimen was then lowered into the hot temperature zone of the furnace to remove the bulk of adsorbed water from the specimen and specimen carrier. The mixture of hydrogen and argon at atmospheric pressure continued to be passed through the vessel with the specimen maintained at the required treatment temperature, typically 773 K.
When the water vapour content of the gas leaving the vessel was reduced to less than 100 vpm, the gas mixture was changed to 500 vpm monosilane, 2% (by volume) hydrogen, remainder argon. After 24 hours exposure, the gas mixture was changed to 2% (by volume) of hydrogen in argon to remove residual silane.
It was found that elemental silicon was deposited on the steel element to give a layer about 0.75 microns thick.
Various steels and alloys have been coated by the method described above to produce an elemental silicon outer coating on the test specimens at least 0.75 microns thick and up to 8 microns thick. These test specimens included (a) a binary chromium iron alloy containing 9% Cr 91% Fe by weight (b) a 9% Cr steel, and (c) an English rimming steel, that is a mild steel with no detectable silicon content which is known to be very susceptible to rapid and destructive breakaway corrosion when exposed to carbon dioxide at high temperatures.
The treated article was compared with an untreated article to measure corrosion resistance using an accelerated corrosion testing atmosphere. It was found that a reduction in the oxidation rate by a factor in excess of 30 times was obtained and, in some experiments, considerably larger corrosion benefit factors were achieved.

Claims (7)

Claims
1. A method of protecting a metal surface comprising the step of depositing thereof a nonoxidised silicon coating having a thickness of at least 0.25 microns, the silicon coating being applied by chemical vapour deposition in a single step treatment from a mixture of monosilane (Si H4) and an inert gas or a mixture of monosilane, hydrogen and an inert gas at a temperature in excess of 748 K and at substantially atmospheric pressure.
2. A method as claimed in Claim 1 wherein the silicon film is at least 0.75 microns thick.
3. A method as claimed in Claim 2 wherein the silicon layer is deposited by a chemical vapour deposition over a period of substantially 24 hours.
4. A method as claimed in any of the preceding claims wherein the temperature of treatment is in excess of 773 K.
5. A method as claimed in any of the preceding claims wherein the metal surface is heated and exposed to an argon-hydrogen mixture to remove any water or water vapour before being coated with silicon.
6. A method of protecting a metal surface with a layer of silicon substantially as hereinbefore described.
7. A metal surface protected by a silicon coating applied as claimed in any of the preceding claims.
GB08130747A 1981-10-12 1981-10-12 Depositing silicon on metal Expired GB2107360B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08130747A GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08130747A GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Publications (2)

Publication Number Publication Date
GB2107360A true GB2107360A (en) 1983-04-27
GB2107360B GB2107360B (en) 1985-09-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
GB08130747A Expired GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Country Status (1)

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GB (1) GB2107360B (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2549461A1 (en) * 1983-07-22 1985-01-25 Canon Kk PROCESS FOR PRODUCING A REMOVABLE FILM CONTAINING SILICON
US4714632A (en) * 1985-12-11 1987-12-22 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
US4822642A (en) * 1985-12-11 1989-04-18 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
EP0517576A1 (en) * 1991-06-03 1992-12-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for storing a gas mixture in passivated metal containers to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
FR2692598A1 (en) * 1992-06-17 1993-12-24 Air Liquide A method of depositing a silicon-containing film on the surface of a metal substrate and an anti-corrosion treatment process
US5480677A (en) * 1991-06-03 1996-01-02 American Air Liquide Chicago Research Center Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
CN1040136C (en) * 1991-06-06 1998-10-07 乔治·克劳德工艺研究开发有限公司 Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces
EP0989915A1 (en) * 1998-02-27 2000-04-05 Restek Corporation Passivating a gas vessel and article produced
WO2006045576A2 (en) * 2004-10-27 2006-05-04 Universität Stuttgart Method for protecting parts made of creep-resistant steel from corroding
US7727588B2 (en) * 2003-09-05 2010-06-01 Yield Engineering Systems, Inc. Apparatus for the efficient coating of substrates

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2549461A1 (en) * 1983-07-22 1985-01-25 Canon Kk PROCESS FOR PRODUCING A REMOVABLE FILM CONTAINING SILICON
US4714632A (en) * 1985-12-11 1987-12-22 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
US4822642A (en) * 1985-12-11 1989-04-18 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
US5480677A (en) * 1991-06-03 1996-01-02 American Air Liquide Chicago Research Center Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
EP0517576A1 (en) * 1991-06-03 1992-12-09 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for storing a gas mixture in passivated metal containers to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
CN1039925C (en) * 1991-06-03 1998-09-23 乔治·克劳德工艺研究开发有限公司 Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
CN1040136C (en) * 1991-06-06 1998-10-07 乔治·克劳德工艺研究开发有限公司 Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces
FR2692598A1 (en) * 1992-06-17 1993-12-24 Air Liquide A method of depositing a silicon-containing film on the surface of a metal substrate and an anti-corrosion treatment process
EP0577447A1 (en) * 1992-06-17 1994-01-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for forming a silicon containing coating on a metallic substrate, anti-corrosion treatment process
US5523124A (en) * 1992-06-17 1996-06-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'expoloitation Des Procedes Georges Claude Process for producing a silicon oxide deposit on the surface of a metallic or metallized polymer substrate using corona discharge at pressures up to approximately atmospheric
EP0989915A1 (en) * 1998-02-27 2000-04-05 Restek Corporation Passivating a gas vessel and article produced
EP0989915A4 (en) * 1998-02-27 2002-04-17 Restek Corp Passivating a gas vessel and article produced
US7727588B2 (en) * 2003-09-05 2010-06-01 Yield Engineering Systems, Inc. Apparatus for the efficient coating of substrates
WO2006045576A2 (en) * 2004-10-27 2006-05-04 Universität Stuttgart Method for protecting parts made of creep-resistant steel from corroding
WO2006045576A3 (en) * 2004-10-27 2006-07-20 Univ Stuttgart Method for protecting parts made of creep-resistant steel from corroding

Also Published As

Publication number Publication date
GB2107360B (en) 1985-09-25

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