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GB2105729B - Surface processing of a substrate material - Google Patents

Surface processing of a substrate material

Info

Publication number
GB2105729B
GB2105729B GB08127798A GB8127798A GB2105729B GB 2105729 B GB2105729 B GB 2105729B GB 08127798 A GB08127798 A GB 08127798A GB 8127798 A GB8127798 A GB 8127798A GB 2105729 B GB2105729 B GB 2105729B
Authority
GB
United Kingdom
Prior art keywords
substrate material
surface processing
processing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08127798A
Other versions
GB2105729A (en
Inventor
Michael Joseph Cooke
Rudolf August Herbert Heinecke
Sureshchandra Mishrilal Ojha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ITT Industries Ltd
Original Assignee
ITT Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ITT Industries Ltd filed Critical ITT Industries Ltd
Priority to GB08127798A priority Critical patent/GB2105729B/en
Priority to AU88154/82A priority patent/AU554813B2/en
Priority to NZ20190682A priority patent/NZ201906A/en
Publication of GB2105729A publication Critical patent/GB2105729A/en
Application granted granted Critical
Publication of GB2105729B publication Critical patent/GB2105729B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Electromagnetism (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
GB08127798A 1981-09-15 1981-09-15 Surface processing of a substrate material Expired GB2105729B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB08127798A GB2105729B (en) 1981-09-15 1981-09-15 Surface processing of a substrate material
AU88154/82A AU554813B2 (en) 1981-09-15 1982-09-09 Pulsed plasma surface treatment
NZ20190682A NZ201906A (en) 1981-09-15 1982-09-14 Surface coating plastics substrates in high intensity pulsed gas plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08127798A GB2105729B (en) 1981-09-15 1981-09-15 Surface processing of a substrate material

Publications (2)

Publication Number Publication Date
GB2105729A GB2105729A (en) 1983-03-30
GB2105729B true GB2105729B (en) 1985-06-12

Family

ID=10524509

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08127798A Expired GB2105729B (en) 1981-09-15 1981-09-15 Surface processing of a substrate material

Country Status (3)

Country Link
AU (1) AU554813B2 (en)
GB (1) GB2105729B (en)
NZ (1) NZ201906A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8225966B2 (en) 2006-03-15 2012-07-24 Seaquist Perfect Dispensing Gmbh Dispensing device
US8240518B2 (en) 2006-05-16 2012-08-14 Seaquist Perfect Dispensing Gmbh Dispensing device and container for a cosmetic liquid
US8261952B2 (en) 2006-09-07 2012-09-11 Seaquist Perfect Dispensing Gmbh Dispensing device
US8286839B2 (en) 2008-08-12 2012-10-16 Aptar Dortmund Gmbh Dispensing device
US8453875B2 (en) 2008-06-20 2013-06-04 Aptar Dortmund Gmbh Dispensing device
US8573449B2 (en) 2006-06-08 2013-11-05 Aptar Dortmund Gmbh Dispensing device having an elastically deformable section for pumping a fluid
US8616417B2 (en) 2009-06-25 2013-12-31 Aptar Dortmund Gmbh Valve and discharge device
US8616416B2 (en) 2008-08-12 2013-12-31 Aptar Dortmund Gmbh Delivery head
US8863994B2 (en) 2007-03-15 2014-10-21 Aptar Dortmund Gmbh Dispensing device

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144343A (en) * 1983-08-02 1985-03-06 Standard Telephones Cables Ltd Optical fibre manufacture
DE3577730D1 (en) * 1984-03-03 1990-06-21 Stc Plc COATING PROCESS.
GB2155024A (en) * 1984-03-03 1985-09-18 Standard Telephones Cables Ltd Surface treatment of plastics materials
EP0154483B1 (en) * 1984-03-03 1989-12-27 Stc Plc Improved pulsed plasma process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
GB8431422D0 (en) * 1984-12-13 1985-01-23 Standard Telephones Cables Ltd Plasma reactor vessel
GB8516537D0 (en) * 1985-06-29 1985-07-31 Standard Telephones Cables Ltd Pulsed plasma apparatus
GB2208656B (en) * 1985-06-29 1990-01-17 Stc Plc Pulsed radio frequency plasma apparatus and process
EP0245310A1 (en) * 1985-11-01 1987-11-19 Biotechnology Australia Pty. Ltd. Assay supports
US4985112A (en) * 1987-02-09 1991-01-15 International Business Machines Corporation Enhanced plasma etching
FR2612204A1 (en) * 1987-03-12 1988-09-16 Vac Tec Syst METHOD AND APPARATUS FOR VACUUM ELECTRIC ARC PLASMA DEPOSITION OF DECORATIVE COATINGS AND WEAR RESISTANT COATINGS
FR2637607B1 (en) * 1988-10-07 1994-06-03 Cibie Projecteurs PROCESS FOR MAKING ABRASION RESISTANT PLASTIC ICE AND PLASTIC ABRASION RESISTANT ICE
DE3841730C2 (en) * 1988-12-10 1997-06-19 Widia Gmbh Process for coating a metallic base body with a non-conductive coating material
IT1229221B (en) * 1989-03-31 1991-07-26 Tecnopart Srl ARTICLES FORMED OF POLYMERIC MATERIAL HAVING IMPROVED WETNESS AND ADHESIVITY AND PROCESS FOR THEIR PRODUCTION.
GB9010000D0 (en) * 1990-05-03 1990-06-27 Stc Plc Phosphide films
KR930011413B1 (en) 1990-09-25 1993-12-06 가부시키가이샤 한도오따이 에네루기 겐큐쇼 Plasma cvd method for using pulsed waveform
DE69218820T2 (en) * 1991-03-07 1997-10-02 Minnesota Mining & Mfg Polymer with a cross-linked area
US5389195A (en) * 1991-03-07 1995-02-14 Minnesota Mining And Manufacturing Company Surface modification by accelerated plasma or ions
EP0546367B1 (en) * 1991-12-23 1996-06-12 Balzers Aktiengesellschaft Method for the plasma treatment of a surface of a workpiece, vacuum treatment installation for carrying out same and use of the method or installation and lacquered, previously plasma treated plastic article.
US5405808A (en) * 1993-08-16 1995-04-11 Lsi Logic Corporation Fluid-filled and gas-filled semiconductor packages
EP0653501B1 (en) * 1993-11-11 1998-02-04 Nissin Electric Company, Limited Plasma-CVD method and apparatus
US6794301B2 (en) 1995-10-13 2004-09-21 Mattson Technology, Inc. Pulsed plasma processing of semiconductor substrates
US6253704B1 (en) 1995-10-13 2001-07-03 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
US5983828A (en) * 1995-10-13 1999-11-16 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
GB9712338D0 (en) 1997-06-14 1997-08-13 Secr Defence Surface coatings
JPH1180975A (en) * 1997-09-04 1999-03-26 Speedfam Co Ltd Corrosion resistance system of plasma etching apparatus and method therefor
KR100829288B1 (en) 1998-12-11 2008-05-13 서페이스 테크놀로지 시스템스 피엘씨 Plasma processing apparatus
DE10029905A1 (en) * 2000-06-17 2002-01-03 Schott Auer Gmbh Reflector, in particular for use in a motor vehicle
DE10044841B4 (en) * 2000-09-11 2006-11-30 Osram Opto Semiconductors Gmbh Plasma encapsulation for electronic and microelectronic components such as OLEDs and method for its production
GB0406049D0 (en) 2004-03-18 2004-04-21 Secr Defence Surface coatings

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8225966B2 (en) 2006-03-15 2012-07-24 Seaquist Perfect Dispensing Gmbh Dispensing device
US8602266B2 (en) 2006-03-15 2013-12-10 Aptar Dortmund Gmbh Dispensing device
US9205437B2 (en) 2006-03-15 2015-12-08 Aptar Dortmund Gmbh Dispensing device
US8240518B2 (en) 2006-05-16 2012-08-14 Seaquist Perfect Dispensing Gmbh Dispensing device and container for a cosmetic liquid
US8573449B2 (en) 2006-06-08 2013-11-05 Aptar Dortmund Gmbh Dispensing device having an elastically deformable section for pumping a fluid
US8261952B2 (en) 2006-09-07 2012-09-11 Seaquist Perfect Dispensing Gmbh Dispensing device
US8863994B2 (en) 2007-03-15 2014-10-21 Aptar Dortmund Gmbh Dispensing device
US8453875B2 (en) 2008-06-20 2013-06-04 Aptar Dortmund Gmbh Dispensing device
US8678245B2 (en) 2008-06-20 2014-03-25 Aptar Dortmund Gmbh Dispensing device
US8286839B2 (en) 2008-08-12 2012-10-16 Aptar Dortmund Gmbh Dispensing device
US8616416B2 (en) 2008-08-12 2013-12-31 Aptar Dortmund Gmbh Delivery head
US8616417B2 (en) 2009-06-25 2013-12-31 Aptar Dortmund Gmbh Valve and discharge device

Also Published As

Publication number Publication date
GB2105729A (en) 1983-03-30
AU554813B2 (en) 1986-09-04
NZ201906A (en) 1985-12-13
AU8815482A (en) 1983-03-24

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20010914