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GB2059071B - Capacitive pressure transducer - Google Patents

Capacitive pressure transducer

Info

Publication number
GB2059071B
GB2059071B GB8030293A GB8030293A GB2059071B GB 2059071 B GB2059071 B GB 2059071B GB 8030293 A GB8030293 A GB 8030293A GB 8030293 A GB8030293 A GB 8030293A GB 2059071 B GB2059071 B GB 2059071B
Authority
GB
United Kingdom
Prior art keywords
pressure transducer
capacitive pressure
capacitive
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8030293A
Other versions
GB2059071A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB2059071A publication Critical patent/GB2059071A/en
Application granted granted Critical
Publication of GB2059071B publication Critical patent/GB2059071B/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
GB8030293A 1979-09-21 1980-09-19 Capacitive pressure transducer Expired GB2059071B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792938205 DE2938205A1 (en) 1979-09-21 1979-09-21 CAPACITIVE PRESSURE SENSOR AND EVALUATION DEVICE HERE

Publications (2)

Publication Number Publication Date
GB2059071A GB2059071A (en) 1981-04-15
GB2059071B true GB2059071B (en) 1983-07-06

Family

ID=6081461

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8030293A Expired GB2059071B (en) 1979-09-21 1980-09-19 Capacitive pressure transducer

Country Status (7)

Country Link
JP (1) JPS5654331A (en)
BR (1) BR8005996A (en)
DE (1) DE2938205A1 (en)
FR (1) FR2466012A1 (en)
GB (1) GB2059071B (en)
IT (1) IT1132979B (en)
SE (1) SE8006587L (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128032A1 (en) * 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart ARRANGEMENT FOR DETECTING A PRESSURE
DE3337978C2 (en) * 1983-10-19 1987-01-15 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Device for measuring a pressure and a temporal pressure curve
FI842307A (en) * 1984-06-07 1985-12-08 Vaisala Oy FOERFARANDE FOER AOSTADKOMMANDE AV GENOMFOERING I EN MIKROMEKANISK KONSTRUKTION.
US4658358A (en) * 1984-06-13 1987-04-14 Battelle Memorial Institute Underwater computer
FI75426C (en) * 1984-10-11 1988-06-09 Vaisala Oy ABSOLUTTRYCKGIVARE.
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
DE3523104A1 (en) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Arrangement having a measuring electrode to which are assigned at fixed distances a first and a second field-generating electrode
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
DE3638978C2 (en) * 1986-11-14 1996-04-25 Teves Gmbh Alfred Electro-hydraulic device for the continuous monitoring of the pressure in a hydraulic motor vehicle brake system
JPS6438546U (en) * 1987-09-02 1989-03-08
JPH0743625Y2 (en) * 1987-10-13 1995-10-09 株式会社トーキン Capacitive load sensor
JPH0542353Y2 (en) * 1987-11-13 1993-10-26
JPH01136041A (en) * 1987-11-24 1989-05-29 Tokin Corp Electrostatic capacitance type load sensor
JPH086275Y2 (en) * 1987-12-19 1996-02-21 株式会社トーキン Capacitive load sensor
JPH076499Y2 (en) * 1988-09-16 1995-02-15 株式会社トーキン High stability type capacitive load detector
DE3912217A1 (en) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co PRESSURE SENSOR
FR2775075B1 (en) 1998-02-18 2000-05-05 Theobald Sa A DIFFERENTIAL PRESSURE SENSOR
DE102008034350A1 (en) * 2008-07-23 2010-02-11 Continental Automotive Gmbh Sensor membrane for pressure sensor, has two surfaces comprising profiles which are formed by corroding, where surfaces face each other and run parallel to each other and profiles are formed in form of concentric circles around center point

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer

Also Published As

Publication number Publication date
JPS5654331A (en) 1981-05-14
GB2059071A (en) 1981-04-15
IT1132979B (en) 1986-07-09
FR2466012B1 (en) 1984-10-19
FR2466012A1 (en) 1981-03-27
IT8024775A0 (en) 1980-09-19
BR8005996A (en) 1981-03-31
SE8006587L (en) 1981-03-22
DE2938205A1 (en) 1981-04-09

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee