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GB2022837A - Moisture Sensor - Google Patents

Moisture Sensor

Info

Publication number
GB2022837A
GB2022837A GB7913421A GB7913421A GB2022837A GB 2022837 A GB2022837 A GB 2022837A GB 7913421 A GB7913421 A GB 7913421A GB 7913421 A GB7913421 A GB 7913421A GB 2022837 A GB2022837 A GB 2022837A
Authority
GB
United Kingdom
Prior art keywords
layer
change
moisture sensor
curves
moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7913421A
Other versions
GB2022837B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of GB2022837A publication Critical patent/GB2022837A/en
Application granted granted Critical
Publication of GB2022837B publication Critical patent/GB2022837B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

A moisture sensor which comprises an electrically insulative base and a moisture sensing layer of a semiconductor or a metal oxide. Fig. 3 shows curves of a change of ratio of electric resistance of a moisture sensing element relative to that with zero humidity with respect to change of relative humidities. The element materials were of the MgCr2O4 group. Curve 31 was for a smooth layer surface and curves 32, 33 and 34 were for roughnesses of 1, 2 and 4 mu m respectively. Increased sensitivity is obtained at low humidity using rough surfaces, the optimum roughness depending on the material used for the element. The embodiments have a suitably rough surface on the layer. <IMAGE>
GB7913421A 1978-04-19 1979-04-18 Moisture sensor Expired GB2022837B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4701278A JPS54139097A (en) 1978-04-19 1978-04-19 Preparation of humidity sensor

Publications (2)

Publication Number Publication Date
GB2022837A true GB2022837A (en) 1979-12-19
GB2022837B GB2022837B (en) 1982-08-11

Family

ID=12763249

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7913421A Expired GB2022837B (en) 1978-04-19 1979-04-18 Moisture sensor

Country Status (2)

Country Link
JP (1) JPS54139097A (en)
GB (1) GB2022837B (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054813A2 (en) * 1980-12-16 1982-06-30 Phoenix International Corp. A capacitance humidity sensor and a method for preparation thereof
WO1998008084A1 (en) * 1996-08-19 1998-02-26 Haan Andre Method for manufacturing an element formed with semiconductor(s) and fire detector comprising such an element
WO2014020207A1 (en) * 2012-07-31 2014-02-06 Universidad Autónoma de Madrid Condensation sensor and method for manufacturing said sensor
US20180299397A1 (en) * 2017-04-13 2018-10-18 Hitachi, Ltd. Humidity sensing element and hygrometer
US10883949B2 (en) 2015-10-15 2021-01-05 Hitachi, Ltd. Moisture detection element, gas detection device, and breath inspection system
CN113340948A (en) * 2021-06-09 2021-09-03 重庆大学 Preparation method of high-response humidity sensor based on halogenated perovskite microcrystal and product thereof

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142120Y2 (en) * 1980-08-23 1986-11-29
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
JPH01250747A (en) * 1988-03-31 1989-10-05 Japan Gore Tex Inc Solute concentration measurement sensor in aqueous solution
JPH0812166B2 (en) * 1991-03-25 1996-02-07 松下電器産業株式会社 Gas sensor manufacturing method
JP5358061B2 (en) * 2007-02-28 2013-12-04 インフィコン エービー Improved hydrogen gas sensing semiconductor sensor
CN104165904B (en) * 2014-08-19 2017-01-25 山东理工大学 Method for detecting concentration of high-temperature gas phase moisture online
CN112098478B (en) * 2020-09-17 2021-07-20 昆明理工大学 A kind of all-inorganic lead-free double perovskite humidity sensor and preparation method thereof

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054813A2 (en) * 1980-12-16 1982-06-30 Phoenix International Corp. A capacitance humidity sensor and a method for preparation thereof
EP0054813A3 (en) * 1980-12-16 1984-07-25 Phoenix International Corp. A capacitance humidity sensor and a method for preparation thereof
WO1998008084A1 (en) * 1996-08-19 1998-02-26 Haan Andre Method for manufacturing an element formed with semiconductor(s) and fire detector comprising such an element
BE1010571A3 (en) * 1996-08-19 1998-10-06 Haan Andre Method of manufacturing an element form of semiconductor (s).
WO2014020207A1 (en) * 2012-07-31 2014-02-06 Universidad Autónoma de Madrid Condensation sensor and method for manufacturing said sensor
ES2445459A1 (en) * 2012-07-31 2014-03-03 Universidad Autónoma de Madrid Condensation sensor and method for manufacturing said sensor
US10883949B2 (en) 2015-10-15 2021-01-05 Hitachi, Ltd. Moisture detection element, gas detection device, and breath inspection system
US20180299397A1 (en) * 2017-04-13 2018-10-18 Hitachi, Ltd. Humidity sensing element and hygrometer
US10859524B2 (en) * 2017-04-13 2020-12-08 Hitachi, Ltd. Humidity sensing element and hygrometer
CN113340948A (en) * 2021-06-09 2021-09-03 重庆大学 Preparation method of high-response humidity sensor based on halogenated perovskite microcrystal and product thereof

Also Published As

Publication number Publication date
JPS54139097A (en) 1979-10-29
GB2022837B (en) 1982-08-11

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19951124

PCNP Patent ceased through non-payment of renewal fee

Effective date: 19970418