GB1442838A - Method of producing temperature compensated reference zener diodes and the devices thus obtained - Google Patents
Method of producing temperature compensated reference zener diodes and the devices thus obtainedInfo
- Publication number
- GB1442838A GB1442838A GB5173373A GB5173373A GB1442838A GB 1442838 A GB1442838 A GB 1442838A GB 5173373 A GB5173373 A GB 5173373A GB 5173373 A GB5173373 A GB 5173373A GB 1442838 A GB1442838 A GB 1442838A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wafer
- mesa
- mesas
- layer
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000002019 doping agent Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic Table
- C07F3/003—Compounds containing elements of Groups 2 or 12 of the Periodic Table without C-Metal linkages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
1442838 Zener diodes THOMSON-CSF 7 Nov 1973 [7 Nov 1972] 51733/73 Heading H1K A temperature-compensated Zener diode comprises a wafer 11, of N-type silicon, two P<SP>+</SP>-type mesas 41, 42 on opposite sides of the wafer, mesa 42 having a further layer 44 of N<SP>+</SP>-type Si thereover. A P-type layer 43 of higher resistivity than mesa 42 may be interposed between mesa 42 and layer 44. The device is operated with two forward-biased junctions 51, 53 whose negative temperature coefficients compensate the positive coefficient of a reversebiased zener junction 52. The mesas and layer 44 are produced by epitaxial deposition, the mesas lying above windows photo-etched in silica layers 21, 22 on the wafer, the positions of the junctions 51 and 52 being determined by controlled rediffusion of boron dopant from the mesas into the wafer. To control the temperature coefficient of junction 51, a final gold doping into mesa 41 may be made. A plurality of devices may be formed in a single wafer, which is subsequently divided.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7239350A FR2205746B1 (en) | 1972-11-07 | 1972-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1442838A true GB1442838A (en) | 1976-07-14 |
Family
ID=9106749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5173373A Expired GB1442838A (en) | 1972-11-07 | 1973-11-07 | Method of producing temperature compensated reference zener diodes and the devices thus obtained |
Country Status (5)
Country | Link |
---|---|
BE (1) | BE807001A (en) |
DE (1) | DE2355405A1 (en) |
FR (1) | FR2205746B1 (en) |
GB (1) | GB1442838A (en) |
IT (1) | IT996388B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5233214A (en) * | 1989-09-14 | 1993-08-03 | Robert Bosch Gmbh | Controllable, temperature-compensated voltage limiter |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5378788A (en) * | 1976-12-23 | 1978-07-12 | Hitachi Ltd | Temperature-compensation-type constant voltage element |
FR2501914A1 (en) * | 1981-03-13 | 1982-09-17 | Thomson Csf | 4 to 8 volt Zener diode - working in avalanche with a low current |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1522532A (en) * | 1967-03-17 | 1968-04-26 | Europ Des Semiconducteurs Soc | Zener diode improvements |
-
1972
- 1972-11-07 FR FR7239350A patent/FR2205746B1/fr not_active Expired
-
1973
- 1973-11-06 DE DE19732355405 patent/DE2355405A1/en active Pending
- 1973-11-06 IT IT53523/73A patent/IT996388B/en active
- 1973-11-07 GB GB5173373A patent/GB1442838A/en not_active Expired
- 1973-11-07 BE BE137477A patent/BE807001A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5233214A (en) * | 1989-09-14 | 1993-08-03 | Robert Bosch Gmbh | Controllable, temperature-compensated voltage limiter |
Also Published As
Publication number | Publication date |
---|---|
IT996388B (en) | 1975-12-10 |
BE807001A (en) | 1974-03-01 |
DE2355405A1 (en) | 1974-05-16 |
FR2205746A1 (en) | 1974-05-31 |
FR2205746B1 (en) | 1976-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |