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GB1408067A - Method for removing carbonaceous material from a substrate - Google Patents

Method for removing carbonaceous material from a substrate

Info

Publication number
GB1408067A
GB1408067A GB3882473A GB3882473A GB1408067A GB 1408067 A GB1408067 A GB 1408067A GB 3882473 A GB3882473 A GB 3882473A GB 3882473 A GB3882473 A GB 3882473A GB 1408067 A GB1408067 A GB 1408067A
Authority
GB
United Kingdom
Prior art keywords
substrate
carbonaceous material
oxygen
containing atmosphere
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3882473A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1408067A publication Critical patent/GB1408067A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

1408067 UV-promoted chemical removal of coatings GENERAL ELECTRIC CO 16 Aug 1973 [18 Aug 1972] 38824/73 Heading B1X In a method for effecting the removal of carbonaceous material from the surface of a substrate at temperatures up to 260‹C in a reaction zone having an oxygen-containing atmosphere with at least “% by weight of ozone, ultra-violet radiation is used to effect reaction 'between the carbonaceous material and the oxygen-containing atmosphere at the interface of the substrate and the oxygen-containing atmosphere, the UV radiation being generated by a discharge lamp capable of emitting UV radiation at a wavelength of from 1800Š to 3500A and an intensity of at least 100 milliwatts per square centimetre on the surface of the substrate. The process is suitable for removing polymeric photo-resists, particularly acetylenic polymers, from silicon oxide surfaces in the manufacture of semiconductors. The temperature during removal is preferably 200-260‹C.
GB3882473A 1972-08-18 1973-08-16 Method for removing carbonaceous material from a substrate Expired GB1408067A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US28176472A 1972-08-18 1972-08-18

Publications (1)

Publication Number Publication Date
GB1408067A true GB1408067A (en) 1975-10-01

Family

ID=23078694

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3882473A Expired GB1408067A (en) 1972-08-18 1973-08-16 Method for removing carbonaceous material from a substrate

Country Status (5)

Country Link
JP (1) JPS5815939B2 (en)
DE (1) DE2341216C2 (en)
FR (1) FR2196611A5 (en)
GB (1) GB1408067A (en)
IT (1) IT992983B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118028A (en) * 1982-04-05 1983-10-26 Maxwell Lab Decontaminating surfaces

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4341592A (en) * 1975-08-04 1982-07-27 Texas Instruments Incorporated Method for removing photoresist layer from substrate by ozone treatment
JPS5856340A (en) * 1981-09-30 1983-04-04 Toshiba Corp Purification of semiconductor wafer
JPH0612766B2 (en) * 1983-03-04 1994-02-16 株式会社精密エンタプライズ Light irradiation device
JPS6039239U (en) * 1983-08-24 1985-03-19 ウシオ電機株式会社 UV cleaning equipment
JPS6039240U (en) * 1983-08-24 1985-03-19 ウシオ電機株式会社 UV cleaning equipment
JPS6039238U (en) * 1983-08-24 1985-03-19 ウシオ電機株式会社 UV cleaning equipment
JPS6049630A (en) * 1983-08-29 1985-03-18 Fujitsu Ltd Manufacturing method of semiconductor device
JPS6053029A (en) * 1983-09-02 1985-03-26 Ushio Inc Cleaning device using ultraviolet rays
JPS6127635A (en) * 1984-07-17 1986-02-07 Samuko Internatl Kenkyusho:Kk High efficiency dry type removing device of photoresist
JPS6153335A (en) * 1984-08-22 1986-03-17 Tohoku Richo Kk Dry etching of plastic
JPS6177852A (en) * 1984-09-26 1986-04-21 Fujitsu Ltd Pattern formation method
JPH0622220B2 (en) * 1984-11-19 1994-03-23 富士通株式会社 Resist ashing method
JPS61163342A (en) * 1985-01-14 1986-07-24 Ricoh Co Ltd Method for removing photoresist
JPH0810690B2 (en) * 1987-01-29 1996-01-31 東京エレクトロン株式会社 Ashing method and ashing apparatus
US4923486A (en) * 1988-12-22 1990-05-08 University Of Dayton Gas chromatography methods and apparatus
US5028243A (en) * 1988-12-22 1991-07-02 University Of Dayton Gas chromatography methods and apparatus
US5068040A (en) * 1989-04-03 1991-11-26 Hughes Aircraft Company Dense phase gas photochemical process for substrate treatment
DE4113523A1 (en) * 1991-04-25 1992-10-29 Abb Patent Gmbh METHOD FOR TREATING SURFACES
JPH05109674A (en) * 1991-10-18 1993-04-30 Ushio Inc Method and device for ashing resist film
DE4202158C1 (en) * 1992-01-27 1993-07-22 Siemens Ag, 8000 Muenchen, De
US5417826A (en) * 1992-06-15 1995-05-23 Micron Technology, Inc. Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2443373A (en) * 1943-08-20 1948-06-15 Victor N Borsoff Method of removing carbon and carbonaceous matter
US3664899A (en) * 1969-12-29 1972-05-23 Gen Electric Removal of organic polymeric films from a substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118028A (en) * 1982-04-05 1983-10-26 Maxwell Lab Decontaminating surfaces

Also Published As

Publication number Publication date
DE2341216A1 (en) 1974-02-28
DE2341216C2 (en) 1985-11-07
IT992983B (en) 1975-09-30
JPS5815939B2 (en) 1983-03-28
FR2196611A5 (en) 1974-03-15
JPS503958A (en) 1975-01-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
746 Register noted 'licences of right' (sect. 46/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19930815