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GB1395201A - Magnetic lenses - Google Patents

Magnetic lenses

Info

Publication number
GB1395201A
GB1395201A GB4088872A GB4088872A GB1395201A GB 1395201 A GB1395201 A GB 1395201A GB 4088872 A GB4088872 A GB 4088872A GB 4088872 A GB4088872 A GB 4088872A GB 1395201 A GB1395201 A GB 1395201A
Authority
GB
United Kingdom
Prior art keywords
coil
target
polepiece
sept
volumes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4088872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
National Research Development Corp UK
Original Assignee
NAT RES DEV
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAT RES DEV, National Research Development Corp UK filed Critical NAT RES DEV
Priority to GB4088872A priority Critical patent/GB1395201A/en
Priority to US393532A priority patent/US3870891A/en
Publication of GB1395201A publication Critical patent/GB1395201A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/64—Magnetic lenses
    • H01J29/66—Magnetic lenses using electromagnetic means only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1395201 Cathode-ray tubes NATIONAL RESEARCH DEVELOPMENT CORP 13 Sept 1973 [4 Sept 1972] 40888/72 Heading H1D A beam of charged particles 12 is focused on to a target 17 by a magnetic lens having a coil 13 surrounding a polepiece 16, and positioned behind the target with respect to the beam source, whereby obstruction of the region in front of the target is avoided, facilitating examination on working of the target in transmission or scanning electron microscopes, X-ray microprolies, and beam welding or cutting apparatus, e.g. by permitting unimpeded positioning of a detector 18 or collector 20. In modified embodiments, (Figs. 2 and 3, not shown), the polepiece may be tapered towards, and have a snout projecting towards, the beam source, and may be provided with an axial hole (25) for the passage therethrough of charged particles transmitted by the specimen, which hole may be stepped outwardly in the direction of the beam to allow for beam spreading. The back-plate 16A of the polepiece may be extended around the peripheral surface of the coil and joined to a non- magnetic front plate (28, Fig. 2) to form a vacuum tight and water tight enclosure for the coil, through which coolant may be circulated. The coil may be of anodized aluminium tape, which avoids the use of additional insulation. The lens may be mounted either within or outside the vacuum tube envelope, and may form the barrier between two volumes within a vacuum chamber, the axial hole (25) permitting the maintenance of a pressure differential between the two volumes.
GB4088872A 1972-09-04 1972-09-04 Magnetic lenses Expired GB1395201A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB4088872A GB1395201A (en) 1972-09-04 1972-09-04 Magnetic lenses
US393532A US3870891A (en) 1972-09-04 1973-08-31 Magnetic lenses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4088872A GB1395201A (en) 1972-09-04 1972-09-04 Magnetic lenses

Publications (1)

Publication Number Publication Date
GB1395201A true GB1395201A (en) 1975-05-21

Family

ID=10417124

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4088872A Expired GB1395201A (en) 1972-09-04 1972-09-04 Magnetic lenses

Country Status (2)

Country Link
US (1) US3870891A (en)
GB (1) GB1395201A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.
US5780859A (en) * 1996-02-16 1998-07-14 Act Advanced Circuit Testing Gesellschaft Electrostatic-magnetic lens arrangement

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
US4451738A (en) * 1980-07-28 1984-05-29 National Research Development Corporation Microcircuit fabrication
US4541890A (en) * 1982-06-01 1985-09-17 International Business Machines Corporation Hall ion generator for working surfaces with a low energy high intensity ion beam
DE3236273A1 (en) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München SPECTROMETER LENS WITH PARALLEL LENS AND SPECTROMETER FIELDS FOR POTENTIAL MEASUREMENT TECHNOLOGY
DE3236271A1 (en) * 1982-09-30 1984-04-05 Siemens AG, 1000 Berlin und 8000 München SPECTROMETER LENS FOR THE CARPUSULAR BEAM MEASUREMENT TECHNOLOGY
US4810880A (en) * 1987-06-05 1989-03-07 The Perkin-Elmer Corporation Direct imaging monochromatic electron microscope
JP2739485B2 (en) * 1988-11-05 1998-04-15 セイコーインスツルメンツ株式会社 Scanning electron beam device
JP2775071B2 (en) * 1989-02-22 1998-07-09 日本電信電話株式会社 Charged particle beam generator
JP2772821B2 (en) * 1989-05-30 1998-07-09 セイコーインスツルメンツ株式会社 Electron beam equipment
US5563415A (en) * 1995-06-07 1996-10-08 Arch Development Corporation Magnetic lens apparatus for a low-voltage high-resolution electron microscope
US6051839A (en) 1996-06-07 2000-04-18 Arch Development Corporation Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
WO2016121224A1 (en) * 2015-01-30 2016-08-04 松定プレシジョン株式会社 Charged particle beam device and scanning electron microscope
JP6177817B2 (en) 2015-01-30 2017-08-09 松定プレシジョン株式会社 Charged particle beam apparatus and scanning electron microscope
WO2017094721A1 (en) 2015-12-03 2017-06-08 松定プレシジョン株式会社 Charged particle beam device and scanning electron microscope
EP4350733A1 (en) * 2022-10-07 2024-04-10 ASML Netherlands B.V. Electron-optical module

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438971A (en) * 1946-10-31 1948-04-06 Rca Corp Compound electron objective lens
NL6716628A (en) * 1967-12-07 1969-06-10
DE1804199C3 (en) * 1968-03-26 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Corpuscular beam device for the optional imaging of a specimen or its diffraction diagram
GB1234509A (en) * 1968-05-31 1971-06-03
DE1808719C3 (en) * 1968-11-13 1974-04-25 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Method and device for treating surfaces, in particular for hardening paint layers, by irradiation with charge carrier beams

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2238426A (en) * 1989-11-16 1991-05-29 Jeol Ltd Electromagnetic lens.
GB2238426B (en) * 1989-11-16 1994-04-13 Jeol Ltd Electromagnetic lens
US5780859A (en) * 1996-02-16 1998-07-14 Act Advanced Circuit Testing Gesellschaft Electrostatic-magnetic lens arrangement

Also Published As

Publication number Publication date
US3870891A (en) 1975-03-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee