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GB1370360A - Charged particle energy analysis - Google Patents

Charged particle energy analysis

Info

Publication number
GB1370360A
GB1370360A GB5869571A GB5869571A GB1370360A GB 1370360 A GB1370360 A GB 1370360A GB 5869571 A GB5869571 A GB 5869571A GB 5869571 A GB5869571 A GB 5869571A GB 1370360 A GB1370360 A GB 1370360A
Authority
GB
United Kingdom
Prior art keywords
filter
electrons
energy
dec
energy analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5869571A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of GB1370360A publication Critical patent/GB1370360A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1370360 Electron spectrometers E I DU PONT DE NEMOURS & CO 17 Dec 1971 [18 Dec 1970 3 Aug 1971] 58695/71 Heading H1D Apparatus for -energy analysis of charged particles, e.g. electrons, comprises a filter 17 which allows only electrons having less than a certain energy to pass from a sample 11 towards an electrostatic mirror 18 which acts as a further filter by reflecting electrons below a selected energy to a spherical grid filter 21 which transmits electrons having energies greater than a further predetermined level, the number so transmitted being counted by an electron multiplier 23. The filter 17 consists of two parallel plates 17a, 17b, the former having an inlet window 16a through which particles enter, are reflected at plate 17b and leave through exit window 16b if they have the desired energy. Filter 21 consists of a retarding field set up between grids 21a, 21b. A concentrating lens 24 may be provided. Mirror 18 can be plane but an additional focusing lens is then required.
GB5869571A 1970-12-18 1971-12-17 Charged particle energy analysis Expired GB1370360A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9947570A 1970-12-18 1970-12-18
US16857571A 1971-08-03 1971-08-03

Publications (1)

Publication Number Publication Date
GB1370360A true GB1370360A (en) 1974-10-16

Family

ID=26796151

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5869571A Expired GB1370360A (en) 1970-12-18 1971-12-17 Charged particle energy analysis

Country Status (6)

Country Link
JP (1) JPS512396B1 (en)
CA (1) CA942435A (en)
DE (1) DE2162808C3 (en)
GB (1) GB1370360A (en)
NL (1) NL173799C (en)
SE (1) SE367279B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
EP1605492A1 (en) * 2004-06-11 2005-12-14 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with retarding field analyzer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335691U (en) * 1976-09-02 1978-03-29
JPS55129083A (en) * 1979-03-27 1980-10-06 Kasai Kk Playing tool for child
CN112799120B (en) * 2019-11-13 2024-03-22 中国科学院国家空间科学中心 Dual-channel electrostatic analyzer for synchronous measurement of ions and electrons

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
EP1605492A1 (en) * 2004-06-11 2005-12-14 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with retarding field analyzer
WO2005122208A2 (en) * 2004-06-11 2005-12-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with retarding field analyzer
WO2005122208A3 (en) * 2004-06-11 2006-04-13 Lbleiterprueftechnik Mbh Ict I Charged particle beam device with retarding field analyzer
US8203119B2 (en) 2004-06-11 2012-06-19 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Charged particle beam device with retarding field analyzer

Also Published As

Publication number Publication date
DE2162808A1 (en) 1972-07-06
DE2162808B2 (en) 1977-12-29
JPS512396B1 (en) 1976-01-26
NL7117400A (en) 1972-06-20
NL173799B (en) 1983-10-03
CA942435A (en) 1974-02-19
DE2162808C3 (en) 1978-09-07
SE367279B (en) 1974-05-20
NL173799C (en) 1984-03-01

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years