GB1356655A - Coating glass - Google Patents
Coating glassInfo
- Publication number
- GB1356655A GB1356655A GB1743671A GB1743671A GB1356655A GB 1356655 A GB1356655 A GB 1356655A GB 1743671 A GB1743671 A GB 1743671A GB 1743671 A GB1743671 A GB 1743671A GB 1356655 A GB1356655 A GB 1356655A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- atmosphere
- cathode
- resistivity
- heat source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/229—Non-specific enumeration
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
- C03C2217/231—In2O3/SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1356655 Reactive sputtering oxide coatings PPG INDUSTRIES Inc 27 May 1971 [31 July 1970] 17436/71 Heading C7F Transparent coatings with a resistance <10 ohms square, a light transmittance at least 70%, of oxides of metals atomic number 48- 51 are formed on a ceramic substrate heated by a radiant heat source to between 400‹ F and its distortion temperature, by reactive sputtering the metal cathode in an atmosphere at 10<SP>-1</SP> torr maximum which contains an inert gas and a minimum 0À5% of oxygen. The preferred substrate is glass, the preferred cathode is 80 -99% In/1-20Sn to form a coating of 80-99% In 2 O 3 / 1 - 20% SnO 2 . The substrate is located between an upper reciprocating scanning cathode and a lower radiant heat source and the oxygen pressure in the atmosphere is reduced as the substrate temperature is raised but is still sufficent to maintain a clear coating. The coated substrate is cooled in the low pressure atmosphere to <300‹ F and the process may be controlled by monitoring the resistivity of the film and stopping deposition when the resistivity is <10 ohms per square. The heated substrate may also be surrounded by a frame to reduce edge effects.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6000270A | 1970-07-31 | 1970-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1356655A true GB1356655A (en) | 1974-06-12 |
Family
ID=22026707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1743671A Expired GB1356655A (en) | 1970-07-31 | 1971-05-27 | Coating glass |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5338269B1 (en) |
| CA (1) | CA934325A (en) |
| DE (1) | DE2132796B2 (en) |
| FR (1) | FR2099718B1 (en) |
| GB (1) | GB1356655A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2150599A (en) * | 1983-11-30 | 1985-07-03 | Ppg Industries Inc | Deposition of oxide films by reactive magnetron sputtering |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1446848A (en) * | 1972-11-29 | 1976-08-18 | Triplex Safety Glass Co | Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates |
| DE2441862B2 (en) * | 1974-08-31 | 1979-06-28 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Process for the production of a transparent, heat-reflecting layer made of doped indium oxide on flat glass |
| GB1598924A (en) * | 1977-08-03 | 1981-09-23 | Bfg Glassgroup | Vehicle windows |
| US4113599A (en) * | 1977-09-26 | 1978-09-12 | Ppg Industries, Inc. | Sputtering technique for the deposition of indium oxide |
| DE3900571A1 (en) * | 1989-01-11 | 1990-07-19 | Asea Brown Boveri | METHOD FOR APPLYING A CATALYST LAYER CONSISTING OF PRECIOUS METALS AND / OR PRECIOUS METAL COMPOUNDS TO A CARRIER OF CERAMIC MATERIAL |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2769778A (en) * | 1951-09-05 | 1956-11-06 | Nat Res Dev | Method of making transparent conducting films by cathode sputtering |
| CA957756A (en) * | 1970-01-19 | 1974-11-12 | Ppg Industries, Inc. | Liquid crystal cells |
-
1971
- 1971-04-29 CA CA111726A patent/CA934325A/en not_active Expired
- 1971-05-27 GB GB1743671A patent/GB1356655A/en not_active Expired
- 1971-06-26 JP JP4673571A patent/JPS5338269B1/ja active Pending
- 1971-07-01 DE DE19712132796 patent/DE2132796B2/en not_active Ceased
- 1971-07-30 FR FR7128091A patent/FR2099718B1/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2150599A (en) * | 1983-11-30 | 1985-07-03 | Ppg Industries Inc | Deposition of oxide films by reactive magnetron sputtering |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2132796A1 (en) | 1972-02-10 |
| DE2132796B2 (en) | 1978-03-02 |
| JPS5338269B1 (en) | 1978-10-14 |
| CA934325A (en) | 1973-09-25 |
| FR2099718B1 (en) | 1976-09-03 |
| FR2099718A1 (en) | 1972-03-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PE20 | Patent expired after termination of 20 years |