GB1240074A - Improvements in or relating to the crucible-free zone melting of a crystalline rod - Google Patents
Improvements in or relating to the crucible-free zone melting of a crystalline rodInfo
- Publication number
- GB1240074A GB1240074A GB49860/69A GB4986069A GB1240074A GB 1240074 A GB1240074 A GB 1240074A GB 49860/69 A GB49860/69 A GB 49860/69A GB 4986069 A GB4986069 A GB 4986069A GB 1240074 A GB1240074 A GB 1240074A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coil
- zone melting
- crucible
- oct
- free zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004857 zone melting Methods 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 230000006698 induction Effects 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 239000002826 coolant Substances 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Induction Heating (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Furnace Details (AREA)
Abstract
1,240,074. Induction heating coils. SIEMENS A.G. 10 Oct., 1969 [11 Oct., 1968], No. 49860/69. Heading H5H. A heating device for use in the crucible-free zone melting of a crystalline rod (not shown), in particular a semi-conductor rod, comprises a flat, annular induction heating coil 1, of one or more turns, surrounded by a longitudinallysplit, tubular body 3 of electrically conductive material, extending coaxially with and on either side of the coil 1, to smooth out the temperature gradients on both sides of the melt zone. Viewing slots 5, 6 are additionally provided in the body 3. Coil 1 and hollow body 3 are fixed together, with their internal spaces in communication, to provide a path for cooling medium through the device. Body 3 may comprise truncated cones widening out from the coil in both axial directions. Fig. 4 (not shown), or may be cylindrical, or may be part cylindrical, part truncated conical. The zone melting takes place in vacuo or in a protective gas atmosphere. Body 3 has a high reflectivity.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681802524 DE1802524B1 (en) | 1968-10-11 | 1968-10-11 | Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1240074A true GB1240074A (en) | 1971-07-21 |
Family
ID=5710285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB49860/69A Expired GB1240074A (en) | 1968-10-11 | 1969-10-10 | Improvements in or relating to the crucible-free zone melting of a crystalline rod |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3601569A (en) |
| JP (1) | JPS4817561B1 (en) |
| AT (1) | AT299129B (en) |
| CH (1) | CH520524A (en) |
| DE (1) | DE1802524B1 (en) |
| FR (1) | FR2020390A1 (en) |
| GB (1) | GB1240074A (en) |
| NL (1) | NL6913795A (en) |
| SE (1) | SE360277B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2478275A (en) * | 2010-02-24 | 2011-09-07 | Tubefuse Applic V O F | Induction heating apparatus and method |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2331004C3 (en) * | 1973-06-18 | 1982-02-04 | Siemens AG, 1000 Berlin und 8000 München | Induction heating coil for crucible-free zone melting |
| FR2599482B1 (en) * | 1986-06-03 | 1988-07-29 | Commissariat Energie Atomique | HIGH FREQUENCY INDUCTION FUSION OVEN |
| DE3625669A1 (en) * | 1986-07-29 | 1988-02-04 | Siemens Ag | INDUCTION HEATER FOR POT-FREE ZONE MELTING |
| EP0292920B1 (en) * | 1987-05-25 | 1992-07-29 | Shin-Etsu Handotai Company Limited | Rf induction heating apparatus |
| DE3805118A1 (en) * | 1988-02-18 | 1989-08-24 | Wacker Chemitronic | METHOD FOR PULL-FREE ZONE DRAWING OF SEMICONDUCTOR RODS AND INDUCTION HEATING COIL FOR ITS IMPLEMENTATION |
| EP1968355B1 (en) * | 2007-03-08 | 2013-02-27 | HÜTTINGER Elektronik GmbH + Co. KG | Induction coil and device for inductive heating of workpieces |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2408229A (en) * | 1943-04-30 | 1946-09-24 | Rca Corp | Electrical heating apparatus |
| US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
| US2814707A (en) * | 1954-11-12 | 1957-11-26 | Rca Corp | Induction heating device |
| DE1152269B (en) * | 1959-04-28 | 1963-08-01 | Siemens Ag | Device for crucible-free zone melting of a semiconductor rod in a vacuum chamber |
| NL126241C (en) * | 1963-01-08 | |||
| DE1188043B (en) * | 1962-12-24 | 1965-03-04 | Siemens Ag | Device for crucible-free zone melting of semiconductor material |
-
1968
- 1968-10-11 DE DE19681802524 patent/DE1802524B1/en not_active Withdrawn
-
1969
- 1969-09-10 NL NL6913795A patent/NL6913795A/xx unknown
- 1969-09-18 JP JP44074331A patent/JPS4817561B1/ja active Pending
- 1969-10-06 SE SE13720/69A patent/SE360277B/xx unknown
- 1969-10-07 US US864360A patent/US3601569A/en not_active Expired - Lifetime
- 1969-10-08 FR FR6934448A patent/FR2020390A1/fr not_active Withdrawn
- 1969-10-09 CH CH1514969A patent/CH520524A/en not_active IP Right Cessation
- 1969-10-09 AT AT951569A patent/AT299129B/en not_active IP Right Cessation
- 1969-10-10 GB GB49860/69A patent/GB1240074A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2478275A (en) * | 2010-02-24 | 2011-09-07 | Tubefuse Applic V O F | Induction heating apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| AT299129B (en) | 1972-06-12 |
| SE360277B (en) | 1973-09-24 |
| FR2020390A1 (en) | 1970-07-10 |
| DE1802524B1 (en) | 1970-06-04 |
| US3601569A (en) | 1971-08-24 |
| NL6913795A (en) | 1970-04-14 |
| CH520524A (en) | 1972-03-31 |
| JPS4817561B1 (en) | 1973-05-30 |
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