GB1225579A - - Google Patents
Info
- Publication number
- GB1225579A GB1225579A GB1225579DA GB1225579A GB 1225579 A GB1225579 A GB 1225579A GB 1225579D A GB1225579D A GB 1225579DA GB 1225579 A GB1225579 A GB 1225579A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lens
- specimen
- coil
- july
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000000356 contaminant Substances 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- 239000003507 refrigerant Substances 0.000 abstract 2
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 238000004804 winding Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
1,225,579. Electron - beam apparatus. APPLIED RESEARCH LABORATORIES Inc. 17 July, 1969 [17 July, 1968], No. 36119/69. Heading HID. In order to remove contaminants from an electron microprobe of the kind having a lens positioned closely adjacent to the specimen, the lens structure is cooled to a temperature below about - 20 C. In the microprobe shown, an election beam impinges on a small area of the specimen 14 to cause emission of X-rays which are subjected to analysis. Contaminants are caused to condense on the surface 10 of a lens 12 which is cooled by means of a refrigerant circulated in a coil 24 surrounding the winding 16. A conventional refrigerant is used for temperatures down to- 40 C. and below this, liquid nitrogen is used. The coil 24 may be included in the cooling circuit of a diffusion pump for the apparatus and the temperature of the lens may be regulated by means of an adjustable valve in a by-pass circuit. The specimen 14 may be heated by means of a coil 27. Temperature sensors 26, 28 may be used in automatic regulating circuits for both cooling and heating.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74542768A | 1968-07-17 | 1968-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1225579A true GB1225579A (en) | 1971-03-17 |
Family
ID=24996636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1225579D Expired GB1225579A (en) | 1968-07-17 | 1969-07-17 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3558878A (en) |
| DE (1) | DE1935975A1 (en) |
| FR (1) | FR2013091A1 (en) |
| GB (1) | GB1225579A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4599869A (en) * | 1984-03-12 | 1986-07-15 | Ozin Geoffrey A | Cryogenic deposition of catalysts |
| US6046457A (en) * | 1998-01-09 | 2000-04-04 | International Business Machines Corporation | Charged particle beam apparatus having anticontamination means |
| US6188071B1 (en) * | 1998-08-11 | 2001-02-13 | Nikon Corporation | Feedback method for increasing stability of electron beams |
| US7408728B2 (en) * | 2006-12-04 | 2008-08-05 | Quality Vision International, Inc. | System and method for focal length stabilization using active temperature control |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3008044A (en) * | 1960-02-25 | 1961-11-07 | Gen Electric | Application of superconductivity in guiding charged particles |
| US3107297A (en) * | 1960-08-29 | 1963-10-15 | Applied Res Lab Inc | Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens |
| DE1202915B (en) * | 1963-09-09 | 1965-10-14 | Siemens Ag | Corpuscular beam apparatus working on the pump, in particular an electron microscope, with an object cartridge which receives the object carrier and which is connected to a deep-freezing device |
-
1968
- 1968-07-17 US US745427A patent/US3558878A/en not_active Expired - Lifetime
-
1969
- 1969-07-08 FR FR6923186A patent/FR2013091A1/fr not_active Withdrawn
- 1969-07-15 DE DE19691935975 patent/DE1935975A1/en active Pending
- 1969-07-17 GB GB1225579D patent/GB1225579A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3558878A (en) | 1971-01-26 |
| FR2013091A1 (en) | 1970-03-27 |
| DE1935975A1 (en) | 1970-01-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |