GB1181936A - Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies - Google Patents
Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor BodiesInfo
- Publication number
- GB1181936A GB1181936A GB06765/68A GB1676568A GB1181936A GB 1181936 A GB1181936 A GB 1181936A GB 06765/68 A GB06765/68 A GB 06765/68A GB 1676568 A GB1676568 A GB 1676568A GB 1181936 A GB1181936 A GB 1181936A
- Authority
- GB
- United Kingdom
- Prior art keywords
- leads
- heater
- plate
- chamber
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 238000004804 winding Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Resistance Heating (AREA)
Abstract
1,181,936. Current supply leads for heaters. SIEMENS A.G. 8 April, 1968 [7 April, 1967], No. 16765/68. Heading H5H. A heating chamber 1, similar to that described in Specification 1,124,330, for epitaxial deposition of crystalline layers on plate-like semiconductor bodies 5 arranged on the flat base of the chamber, has a heater 6 held solely by its current leads 6a which are provided with means which reduce or compensate for the heat lost by conduction along the leads. The leads may be so dimensioned that the Joule heat occurring in them provides such compensation, or reflectors or radiation screens 13 cause part of the heat radiated downwards to be transmitted back to the heater by re-radiation or conduction back along the leads, or one or more auxiliary heaters 14, Fig. 3 (not shown), with associated reflectors are arranged near the connection points of the leads to counteract the heat losses along the leads. The heater 6 has a meandering form or may be wound in a spiral, the individual turns being mutually insulated preferably by a thin air gap. The windings are tapered towards the heater periphery to avoid an edge drop in temperature. A temperature-compensating plate 7 is provided, as described in Specification 1,181,937, and may support the reaction part 2 of chamber 1 as in Specification 1,181,935. Heater 6 is of carbon, graphite, molybdenum or tantalum, and has a rectangular or circular cross-section.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1967S0109233 DE1619998B2 (en) | 1967-04-07 | 1967-04-07 | DEVICE FOR THE THERMAL TREATMENT OF DISC-SHAPED SEMICONDUCTOR BODIES |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1181936A true GB1181936A (en) | 1970-02-18 |
Family
ID=7529366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB06765/68A Expired GB1181936A (en) | 1967-04-07 | 1968-04-08 | Improvements in or relating to Devices for the Heat Treatment of Plate-like Semiconductor Bodies |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3536892A (en) |
| DE (1) | DE1619998B2 (en) |
| FR (1) | FR1558823A (en) |
| GB (1) | GB1181936A (en) |
| NL (1) | NL6800452A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3640001A (en) * | 1970-08-17 | 1972-02-08 | John M Ellison | Tobacco smoking pipe conditioning apparatus |
| US4153107A (en) * | 1977-06-30 | 1979-05-08 | International Business Machines Corporation | Temperature equalizing element for a conduction cooling module |
| US4415025A (en) * | 1981-08-10 | 1983-11-15 | International Business Machines Corporation | Thermal conduction element for semiconductor devices |
| US4492852A (en) * | 1983-02-11 | 1985-01-08 | At&T Bell Laboratories | Growth substrate heating arrangement for UHV silicon MBE |
| US5059770A (en) * | 1989-09-19 | 1991-10-22 | Watkins-Johnson Company | Multi-zone planar heater assembly and method of operation |
| US6652655B1 (en) | 2000-07-07 | 2003-11-25 | Applied Materials, Inc. | Method to isolate multi zone heater from atmosphere |
| JP5416570B2 (en) * | 2009-12-15 | 2014-02-12 | 住友電気工業株式会社 | Heating / cooling device and apparatus equipped with the same |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US606792A (en) * | 1898-07-05 | Electric radiator | ||
| US1514228A (en) * | 1923-02-05 | 1924-11-04 | Acme Electric Heating Company | Electric heater |
| US1547647A (en) * | 1924-01-31 | 1925-07-28 | Furfaro Nicola | Electric heater |
| US2691717A (en) * | 1950-12-30 | 1954-10-12 | Knapp Monarch Co | Electrical appliance heater |
| US2933586A (en) * | 1955-06-17 | 1960-04-19 | Schusterius Carl | Electrical heating appliances |
| US3151006A (en) * | 1960-02-12 | 1964-09-29 | Siemens Ag | Use of a highly pure semiconductor carrier material in a vapor deposition process |
| US3381114A (en) * | 1963-12-28 | 1968-04-30 | Nippon Electric Co | Device for manufacturing epitaxial crystals |
-
1967
- 1967-04-07 DE DE1967S0109233 patent/DE1619998B2/en active Granted
-
1968
- 1968-01-11 NL NL6800452A patent/NL6800452A/xx unknown
- 1968-03-29 FR FR1558823D patent/FR1558823A/fr not_active Expired
- 1968-04-04 US US718880A patent/US3536892A/en not_active Expired - Lifetime
- 1968-04-08 GB GB06765/68A patent/GB1181936A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1619998A1 (en) | 1970-03-26 |
| DE1619998B2 (en) | 1976-07-29 |
| US3536892A (en) | 1970-10-27 |
| FR1558823A (en) | 1969-02-28 |
| NL6800452A (en) | 1968-10-08 |
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