GB1153787A - Method and apparatus for Glow Cleaning - Google Patents
Method and apparatus for Glow CleaningInfo
- Publication number
- GB1153787A GB1153787A GB3860066A GB3860066A GB1153787A GB 1153787 A GB1153787 A GB 1153787A GB 3860066 A GB3860066 A GB 3860066A GB 3860066 A GB3860066 A GB 3860066A GB 1153787 A GB1153787 A GB 1153787A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- enclosure
- gas
- conductive
- reactive gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
1,153,787. Discharge apparatus. LIBBEYOWENS-FORD-GLASS CO. 30 Aug., 1966 [1 Sept., 1965], No. 38600/66. Heading H1D. Contaminents are removed from the surface of a substrate 15 by a reactive gas which is ionized and the ions accelerated by a confined electric field to strike the surface and remove impurities by bombardment and by chemical action. The known use of an inert gas is referred to. The substrate 15 is passed through vacuum seals 17, 18 of an enclosure 10 connected to a pump 16. Reactive gas enters the enclosure through apertures 44, 45 in tubular electrodes 47, 48 connected to a negative supply 40 and insulated by non-conductive annular spacers 57, 58 from gas supply pipes 55, 56. A positive static charge builds up on the surface of the substrate if the latter is non-conductive. If conductive, the substrate is earthed. The electrostatic field and ionized gas are confined by a chamber 22 formed by two closed-ended channels 23, 24, e.g. of aluminium. The reactive gas is preferably a reducing agent, e.g. hydrogen or a gaseous halide or a fluorocarbon. A plurality of electrodes may be employed on each side of the substrate 15 and may extend transversely thereto. The enclosure 10 may be modified, e.g. by providing a door, to permit material of other than strip shape to be treated.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48441765A | 1965-09-01 | 1965-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1153787A true GB1153787A (en) | 1969-05-29 |
Family
ID=23924090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3860066A Expired GB1153787A (en) | 1965-09-01 | 1966-08-30 | Method and apparatus for Glow Cleaning |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE686205A (en) |
| DE (1) | DE1542589A1 (en) |
| GB (1) | GB1153787A (en) |
| SE (1) | SE320250B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2144669A (en) * | 1982-12-07 | 1985-03-13 | Standard Telephones Cables Ltd | Cleaning electrical contacts |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| EP0341835A1 (en) * | 1988-04-13 | 1989-11-15 | Electro-Plasma, Inc. | Method of oxide removal from metallic powder |
| FR2774400A1 (en) * | 1998-02-04 | 1999-08-06 | Physiques Et Chimiques | Treatment of a metal surface for chemical degreasing, chemical pickling or passivation |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19907911C2 (en) * | 1999-02-24 | 2003-02-27 | Mag Maschinen Und Appbau Ag Gr | Device and method for the treatment of electrically conductive continuous material |
| DE102005025101B3 (en) * | 2005-05-27 | 2006-07-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for cleaning interior of vacuum chamber, used e.g. for physical or chemical vapor deposition, comprising carrier with electrode(s) connected to D.C. source, for electrostatically fixing contaminants |
-
1966
- 1966-08-30 SE SE1164166A patent/SE320250B/xx unknown
- 1966-08-30 GB GB3860066A patent/GB1153787A/en not_active Expired
- 1966-08-31 DE DE19661542589 patent/DE1542589A1/en active Pending
- 1966-08-31 BE BE686205D patent/BE686205A/xx unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2144669A (en) * | 1982-12-07 | 1985-03-13 | Standard Telephones Cables Ltd | Cleaning electrical contacts |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| EP0341835A1 (en) * | 1988-04-13 | 1989-11-15 | Electro-Plasma, Inc. | Method of oxide removal from metallic powder |
| FR2774400A1 (en) * | 1998-02-04 | 1999-08-06 | Physiques Et Chimiques | Treatment of a metal surface for chemical degreasing, chemical pickling or passivation |
Also Published As
| Publication number | Publication date |
|---|---|
| BE686205A (en) | 1967-02-28 |
| DE1542589A1 (en) | 1970-06-18 |
| SE320250B (en) | 1970-02-02 |
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