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GB1098289A - Improvements in or relating to methods of treating objects in high vacuum and apparatus for carrying out carrying out such methods - Google Patents

Improvements in or relating to methods of treating objects in high vacuum and apparatus for carrying out carrying out such methods

Info

Publication number
GB1098289A
GB1098289A GB933166A GB933166A GB1098289A GB 1098289 A GB1098289 A GB 1098289A GB 933166 A GB933166 A GB 933166A GB 933166 A GB933166 A GB 933166A GB 1098289 A GB1098289 A GB 1098289A
Authority
GB
United Kingdom
Prior art keywords
methods
carrying
nitrogen
march
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB933166A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1098289A publication Critical patent/GB1098289A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
GB933166A 1965-03-06 1966-03-03 Improvements in or relating to methods of treating objects in high vacuum and apparatus for carrying out carrying out such methods Expired GB1098289A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6502897A NL6502897A (xx) 1965-03-06 1965-03-06

Publications (1)

Publication Number Publication Date
GB1098289A true GB1098289A (en) 1968-01-10

Family

ID=19792591

Family Applications (1)

Application Number Title Priority Date Filing Date
GB933166A Expired GB1098289A (en) 1965-03-06 1966-03-03 Improvements in or relating to methods of treating objects in high vacuum and apparatus for carrying out carrying out such methods

Country Status (4)

Country Link
BE (1) BE677401A (xx)
FR (1) FR1470661A (xx)
GB (1) GB1098289A (xx)
NL (1) NL6502897A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095367A2 (en) * 1982-05-24 1983-11-30 Varian Associates, Inc. Rapid pumpdown for high vacuum processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095367A2 (en) * 1982-05-24 1983-11-30 Varian Associates, Inc. Rapid pumpdown for high vacuum processing
EP0095367A3 (en) * 1982-05-24 1985-12-04 Varian Associates, Inc. Rapid pumpdown for high vacuum processing

Also Published As

Publication number Publication date
NL6502897A (xx) 1966-09-07
FR1470661A (fr) 1967-02-24
BE677401A (xx) 1966-09-05

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