GB1001236A - Improvements in or relating to ion getter pumps - Google Patents
Improvements in or relating to ion getter pumpsInfo
- Publication number
- GB1001236A GB1001236A GB1261262A GB1261262A GB1001236A GB 1001236 A GB1001236 A GB 1001236A GB 1261262 A GB1261262 A GB 1261262A GB 1261262 A GB1261262 A GB 1261262A GB 1001236 A GB1001236 A GB 1001236A
- Authority
- GB
- United Kingdom
- Prior art keywords
- getter
- electrodes
- discharge
- ion
- april
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
1,001,236. Ion-getter pumps. LEYBOLD HOLDING A.G. April 2, 1962 [April 1, 1961], No. 12612/62. Heading H1D. An ion-getter pump in which a cold cathode discharge between parts of anode and cathode surfaces causes sputtering of the electrode surfaces and deposition of the sputtered getter on a collecting surface comprises means for creating an alternating electric field which is substantially the field necessary to stabilize the electrons in closed orbits. In one form, a multi-pole field is generated by a high-frequency voltage, the electrode arrangement being preferably cylindrically or spherically symmetrical. Electrodes 3, 4 have hyperboloid surfaces, and the gap between them is at least partly concentrically surrounded by a surface 5 defined by a body of revolution generated by a rotating hyperbola, all the electrodes having apertures 25 through which gas ions pass to be collected upon getter surfaces 8 formed on the inside of the vacuum envelope by sputtering. To initiate the discharge, a supplementary system for cold cathode discharge (Penning magnetron) or a glow discharge cathode and a radio-active source may be provided. A secondary emissive coating may be provided on one of the electrodes.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEL0003823 | 1961-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1001236A true GB1001236A (en) | 1965-08-11 |
Family
ID=7256334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1261262A Expired GB1001236A (en) | 1961-04-01 | 1962-04-02 | Improvements in or relating to ion getter pumps |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1001236A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2586971A (en) * | 2019-09-06 | 2021-03-17 | Edwards Vacuum Llc | Reducing plasma formation in an ion pump |
-
1962
- 1962-04-02 GB GB1261262A patent/GB1001236A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2586971A (en) * | 2019-09-06 | 2021-03-17 | Edwards Vacuum Llc | Reducing plasma formation in an ion pump |
| GB2586971B (en) * | 2019-09-06 | 2023-11-01 | Edwards Vacuum Llc | Reducing plasma formation in an ion pump |
| US12014913B2 (en) | 2019-09-06 | 2024-06-18 | Edwards Vacuum Llc | Reducing plasma formation in an ion pump |
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