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GB0619160D0 - Valve assembly - Google Patents

Valve assembly

Info

Publication number
GB0619160D0
GB0619160D0 GB0619160A GB0619160A GB0619160D0 GB 0619160 D0 GB0619160 D0 GB 0619160D0 GB 0619160 A GB0619160 A GB 0619160A GB 0619160 A GB0619160 A GB 0619160A GB 0619160 D0 GB0619160 D0 GB 0619160D0
Authority
GB
United Kingdom
Prior art keywords
valve assembly
valve
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0619160A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford Instruments Plasma Technology Ltd
Original Assignee
Oxford Instruments Plasma Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford Instruments Plasma Technology Ltd filed Critical Oxford Instruments Plasma Technology Ltd
Priority to GB0619160A priority Critical patent/GB0619160D0/en
Publication of GB0619160D0 publication Critical patent/GB0619160D0/en
Priority to PCT/GB2007/003544 priority patent/WO2008037960A1/en
Ceased legal-status Critical Current

Links

GB0619160A 2006-09-28 2006-09-28 Valve assembly Ceased GB0619160D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0619160A GB0619160D0 (en) 2006-09-28 2006-09-28 Valve assembly
PCT/GB2007/003544 WO2008037960A1 (en) 2006-09-28 2007-09-19 Valve assembly for effusion cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0619160A GB0619160D0 (en) 2006-09-28 2006-09-28 Valve assembly

Publications (1)

Publication Number Publication Date
GB0619160D0 true GB0619160D0 (en) 2006-11-08

Family

ID=37434853

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0619160A Ceased GB0619160D0 (en) 2006-09-28 2006-09-28 Valve assembly

Country Status (2)

Country Link
GB (1) GB0619160D0 (en)
WO (1) WO2008037960A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112680699A (en) * 2019-10-17 2021-04-20 瑞必尔 Evaporation unit for a vacuum evaporation chamber and related evaporation method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI737718B (en) * 2016-04-25 2021-09-01 美商創新先進材料股份有限公司 Deposition systems including effusion sources, and related methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9414415D0 (en) * 1994-07-16 1994-09-07 Oxford Appl Res Ltd Cracking feedstocks
US6030458A (en) * 1997-02-14 2000-02-29 Chorus Corporation Phosphorus effusion source
JP4344631B2 (en) * 2004-03-02 2009-10-14 長州産業株式会社 Molecular beam source for organic thin film deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112680699A (en) * 2019-10-17 2021-04-20 瑞必尔 Evaporation unit for a vacuum evaporation chamber and related evaporation method

Also Published As

Publication number Publication date
WO2008037960A1 (en) 2008-04-03

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)