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GB0126278D0 - Wafer enclosure with door - Google Patents

Wafer enclosure with door

Info

Publication number
GB0126278D0
GB0126278D0 GBGB0126278.1A GB0126278A GB0126278D0 GB 0126278 D0 GB0126278 D0 GB 0126278D0 GB 0126278 A GB0126278 A GB 0126278A GB 0126278 D0 GB0126278 D0 GB 0126278D0
Authority
GB
United Kingdom
Prior art keywords
door
wafer enclosure
enclosure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB0126278.1A
Other versions
GB2365488B (en
GB2365488A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fluoroware Inc
Original Assignee
Fluoroware Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/904,660 external-priority patent/US5957292A/en
Application filed by Fluoroware Inc filed Critical Fluoroware Inc
Priority claimed from GB0021476A external-priority patent/GB0021476D0/en
Publication of GB0126278D0 publication Critical patent/GB0126278D0/en
Publication of GB2365488A publication Critical patent/GB2365488A/en
Application granted granted Critical
Publication of GB2365488B publication Critical patent/GB2365488B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
GB0126278A 1997-08-01 2000-09-01 Wafer enclosure with door Expired - Fee Related GB2365488B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/904,660 US5957292A (en) 1997-08-01 1997-08-01 Wafer enclosure with door
GB0021476A GB0021476D0 (en) 2000-09-01 2000-09-01 Method of attachment

Publications (3)

Publication Number Publication Date
GB0126278D0 true GB0126278D0 (en) 2002-01-02
GB2365488A GB2365488A (en) 2002-02-20
GB2365488B GB2365488B (en) 2002-04-10

Family

ID=26244945

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0126278A Expired - Fee Related GB2365488B (en) 1997-08-01 2000-09-01 Wafer enclosure with door

Country Status (1)

Country Link
GB (1) GB2365488B (en)

Also Published As

Publication number Publication date
GB2365488B (en) 2002-04-10
GB2365488A (en) 2002-02-20

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090731