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FR94900E - Appareil de pulvérisation cathodique a grande capacité. - Google Patents

Appareil de pulvérisation cathodique a grande capacité.

Info

Publication number
FR94900E
FR94900E FR161082A FR161082A FR94900E FR 94900 E FR94900 E FR 94900E FR 161082 A FR161082 A FR 161082A FR 161082 A FR161082 A FR 161082A FR 94900 E FR94900 E FR 94900E
Authority
FR
France
Prior art keywords
large capacity
sputtering apparatus
sputtering
capacity
capacity sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR161082A
Other languages
English (en)
Inventor
Georges Dubois
Ghislaine Goupil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lignes Telegraphiques et Telephoniques LTT SA
Original Assignee
Lignes Telegraphiques et Telephoniques LTT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lignes Telegraphiques et Telephoniques LTT SA filed Critical Lignes Telegraphiques et Telephoniques LTT SA
Priority to FR161082A priority Critical patent/FR94900E/fr
Priority to BE726267D priority patent/BE726267A/xx
Priority to GB1257342D priority patent/GB1257342A/en
Priority to DE19691901211 priority patent/DE1901211A1/de
Application granted granted Critical
Publication of FR94900E publication Critical patent/FR94900E/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR161082A 1968-01-11 1968-07-30 Appareil de pulvérisation cathodique a grande capacité. Expired FR94900E (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR161082A FR94900E (fr) 1968-01-11 1968-07-30 Appareil de pulvérisation cathodique a grande capacité.
BE726267D BE726267A (fr) 1968-01-11 1968-12-30
GB1257342D GB1257342A (fr) 1968-01-11 1969-01-07
DE19691901211 DE1901211A1 (de) 1968-01-11 1969-01-10 Vorrichtung zur Kathodenzerstaeubung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR135568 1968-01-11
FR06009034 1968-02-21
FR161082A FR94900E (fr) 1968-01-11 1968-07-30 Appareil de pulvérisation cathodique a grande capacité.

Publications (1)

Publication Number Publication Date
FR94900E true FR94900E (fr) 1970-01-16

Family

ID=27244767

Family Applications (1)

Application Number Title Priority Date Filing Date
FR161082A Expired FR94900E (fr) 1968-01-11 1968-07-30 Appareil de pulvérisation cathodique a grande capacité.

Country Status (4)

Country Link
BE (1) BE726267A (fr)
DE (1) DE1901211A1 (fr)
FR (1) FR94900E (fr)
GB (1) GB1257342A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114720048B (zh) * 2022-06-09 2022-09-02 季华实验室 一种电容薄膜真空计及neg薄膜制备方法

Also Published As

Publication number Publication date
DE1901211A1 (de) 1970-09-24
BE726267A (fr) 1969-05-29
GB1257342A (fr) 1971-12-15

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