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FR846434A - Method and apparatus for sputtering - Google Patents

Method and apparatus for sputtering

Info

Publication number
FR846434A
FR846434A FR846434DA FR846434A FR 846434 A FR846434 A FR 846434A FR 846434D A FR846434D A FR 846434DA FR 846434 A FR846434 A FR 846434A
Authority
FR
France
Prior art keywords
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR846434A publication Critical patent/FR846434A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR846434D 1937-11-30 1938-11-22 Method and apparatus for sputtering Expired FR846434A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE846434X 1937-11-30

Publications (1)

Publication Number Publication Date
FR846434A true FR846434A (en) 1939-09-18

Family

ID=6775057

Family Applications (1)

Application Number Title Priority Date Filing Date
FR846434D Expired FR846434A (en) 1937-11-30 1938-11-22 Method and apparatus for sputtering

Country Status (1)

Country Link
FR (1) FR846434A (en)

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