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FR3134650B1 - METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD - Google Patents

METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD Download PDF

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Publication number
FR3134650B1
FR3134650B1 FR2203592A FR2203592A FR3134650B1 FR 3134650 B1 FR3134650 B1 FR 3134650B1 FR 2203592 A FR2203592 A FR 2203592A FR 2203592 A FR2203592 A FR 2203592A FR 3134650 B1 FR3134650 B1 FR 3134650B1
Authority
FR
France
Prior art keywords
substrates
structure obtained
molecular adhesion
assembly
surface layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2203592A
Other languages
French (fr)
Other versions
FR3134650A1 (en
Inventor
Marcel Broekaart
Morgane Logiou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec SA filed Critical Soitec SA
Priority to FR2203592A priority Critical patent/FR3134650B1/en
Priority to EP23717959.3A priority patent/EP4511873A1/en
Priority to KR1020247037736A priority patent/KR20250008061A/en
Priority to PCT/EP2023/059486 priority patent/WO2023202917A1/en
Priority to CN202380041366.0A priority patent/CN119213550A/en
Priority to TW112113937A priority patent/TW202405882A/en
Publication of FR3134650A1 publication Critical patent/FR3134650A1/en
Application granted granted Critical
Publication of FR3134650B1 publication Critical patent/FR3134650B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/00357—Creating layers of material on a substrate involving bonding one or several substrates on a non-temporary support, e.g. another substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Combinations Of Printed Boards (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

L’invention porte sur un procédé d’assemblage par adhésion moléculaire de deux substrats présentant chacun une face principale, l’un au moins des deux substrats étant pourvu d’une couche superficielle diélectrique du côté de sa face principale. Le procédé comprend (a) la mise en contact des faces principales des deux substrats, puis (b) l’initiation et la propagation d'une onde de collage entre les faces principales des deux substrats pour les assembler l’un à l’autre. Selon l’invention le procédé comprend, avant l’étape de mise en contact, une étape de préparation de la couche superficielle diélectrique visant à introduire dans cette couche une dose de soufre supérieure à 3,0 E13 at/cm^2. L’invention porte également sur une structure obtenue à l’aide du procédé. Figure à publier avec l’abrégé : Fig. 2The invention relates to a method of assembling by molecular adhesion two substrates each having a main face, at least one of the two substrates being provided with a dielectric surface layer on the side of its main face. The method comprises (a) bringing the main faces of the two substrates into contact, then (b) initiating and propagating a bonding wave between the main faces of the two substrates to assemble them together. . According to the invention, the method comprises, before the contacting step, a step of preparing the dielectric surface layer aimed at introducing into this layer a dose of sulfur greater than 3.0 E13 at/cm^2. The invention also relates to a structure obtained using the method. Figure to be published with the abstract: Fig. 2

FR2203592A 2022-04-19 2022-04-19 METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD Active FR3134650B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR2203592A FR3134650B1 (en) 2022-04-19 2022-04-19 METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD
EP23717959.3A EP4511873A1 (en) 2022-04-19 2023-04-12 Method for assembling two substrates by molecular adhesion and structure obtained by such a method
KR1020247037736A KR20250008061A (en) 2022-04-19 2023-04-12 Method for assembling two substrates by molecular bonding and structures obtained by the method
PCT/EP2023/059486 WO2023202917A1 (en) 2022-04-19 2023-04-12 Method for assembling two substrates by molecular adhesion and structure obtained by such a method
CN202380041366.0A CN119213550A (en) 2022-04-19 2023-04-12 Method for assembling two substrates by molecular adhesion and structure obtained by this method
TW112113937A TW202405882A (en) 2022-04-19 2023-04-13 Process for joining two substrates by molecular adhesion and structure obtained by such a process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2203592 2022-04-19
FR2203592A FR3134650B1 (en) 2022-04-19 2022-04-19 METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD

Publications (2)

Publication Number Publication Date
FR3134650A1 FR3134650A1 (en) 2023-10-20
FR3134650B1 true FR3134650B1 (en) 2024-03-01

Family

ID=82385623

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2203592A Active FR3134650B1 (en) 2022-04-19 2022-04-19 METHOD FOR ASSEMBLY OF TWO SUBSTRATES BY MOLECULAR ADHESION, AND STRUCTURE OBTAINED BY SUCH A METHOD

Country Status (6)

Country Link
EP (1) EP4511873A1 (en)
KR (1) KR20250008061A (en)
CN (1) CN119213550A (en)
FR (1) FR3134650B1 (en)
TW (1) TW202405882A (en)
WO (1) WO2023202917A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5407506A (en) * 1992-06-04 1995-04-18 Alliedsignal Inc. Reaction bonding through activation by ion bombardment
US7109092B2 (en) * 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
US7601271B2 (en) 2005-11-28 2009-10-13 S.O.I.Tec Silicon On Insulator Technologies Process and equipment for bonding by molecular adhesion
FR2911430B1 (en) * 2007-01-15 2009-04-17 Soitec Silicon On Insulator "METHOD OF MANUFACTURING A HYBRID SUBSTRATE"
FR2990054B1 (en) 2012-04-27 2014-05-02 Commissariat Energie Atomique METHOD FOR BONDING IN A GAS ATMOSPHERE HAVING A NEGATIVE JOULE-THOMSON COEFFICIENT

Also Published As

Publication number Publication date
TW202405882A (en) 2024-02-01
KR20250008061A (en) 2025-01-14
FR3134650A1 (en) 2023-10-20
EP4511873A1 (en) 2025-02-26
WO2023202917A1 (en) 2023-10-26
CN119213550A (en) 2024-12-27

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