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FR3063740B1 - Elements de chambres a vide en alliage d’aluminium stables a haute temperature - Google Patents

Elements de chambres a vide en alliage d’aluminium stables a haute temperature Download PDF

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Publication number
FR3063740B1
FR3063740B1 FR1751981A FR1751981A FR3063740B1 FR 3063740 B1 FR3063740 B1 FR 3063740B1 FR 1751981 A FR1751981 A FR 1751981A FR 1751981 A FR1751981 A FR 1751981A FR 3063740 B1 FR3063740 B1 FR 3063740B1
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FR
France
Prior art keywords
high temperature
aluminum alloy
thickness
temperature stable
chamber elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1751981A
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English (en)
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FR3063740A1 (fr
Inventor
Guillaume DELGRANGE
Christophe CHABRIOL
Romain-Fabrice Bernes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Constellium Issoire SAS
Original Assignee
Constellium Issoire SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1751981A priority Critical patent/FR3063740B1/fr
Application filed by Constellium Issoire SAS filed Critical Constellium Issoire SAS
Priority to JP2019571109A priority patent/JP2020510761A/ja
Priority to KR1020197029492A priority patent/KR102584052B1/ko
Priority to US16/492,085 priority patent/US11248280B2/en
Priority to EP18714563.6A priority patent/EP3592875B1/fr
Priority to CN201880017403.3A priority patent/CN110402296B/zh
Priority to SG11201907957Y priority patent/SG11201907957YA/en
Priority to PCT/FR2018/050481 priority patent/WO2018162823A1/fr
Priority to TW107108171A priority patent/TW201840864A/zh
Publication of FR3063740A1 publication Critical patent/FR3063740A1/fr
Application granted granted Critical
Publication of FR3063740B1 publication Critical patent/FR3063740B1/fr
Active legal-status Critical Current
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Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/05Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys of the Al-Si-Mg type, i.e. containing silicon and magnesium in approximately equal proportions
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • C22C21/02Alloys based on aluminium with silicon as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • C22C21/06Alloys based on aluminium with magnesium as the next major constituent
    • C22C21/08Alloys based on aluminium with magnesium as the next major constituent with silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/043Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with silicon as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/047Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with magnesium as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/06Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/06Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/10Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Heat Treatment Of Sheet Steel (AREA)
  • ing And Chemical Polishing (AREA)
  • Laminated Bodies (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
  • Heat Treatment Of Steel (AREA)

Abstract

L'invention concerne un élément de chambre à vide obtenu par usinage et traitement de surface d'une tôle d'épaisseur au moins égale à 10 mm en alliage d'aluminium de composition, en % en poids, Si : 0,4 - 0,7 ; Mg : 0,4 - 1,0 ; le rapport en % en poids Mg/Si étant inférieur à 1,8 ; Ti : 0,01 - 0,15, Fe 0,08 - 0,25 ; Cu < 0,35 ; Mn < 0,4 ; Cr : < 0,25 ; Zn < 0,04 ; autres éléments < 0,05 chacun et < 0,15 au total, reste aluminium, caractérisée en ce que la taille de grain de ladite tôle est telle que la longueur moyenne d'interception linéaire l, mesurée dans le plan L/TC selon la norme ASTM E112, est au moins égale à 350 µm entre surface et ½ épaisseur. L'invention concerne également le procédé de fabrication d'un tel élément de chambre à vide. Les produits selon l'invention sont particulièrement avantageux en particulier en termes de résistance à la déformation par fluage à haute température, tout ayant des propriétés élevées de résistance à la corrosion, d'homogénéité des propriétés dans l'épaisseur et d'aptitude à l'usinage.
FR1751981A 2017-03-10 2017-03-10 Elements de chambres a vide en alliage d’aluminium stables a haute temperature Active FR3063740B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1751981A FR3063740B1 (fr) 2017-03-10 2017-03-10 Elements de chambres a vide en alliage d’aluminium stables a haute temperature
KR1020197029492A KR102584052B1 (ko) 2017-03-10 2018-03-01 고온 안정성의 알루미늄 합금 진공 챔버 요소
US16/492,085 US11248280B2 (en) 2017-03-10 2018-03-01 Aluminium alloy vacuum chamber elements stable at high temperature
EP18714563.6A EP3592875B1 (fr) 2017-03-10 2018-03-01 Elements de chambres a vide en alliage d'aluminium stables a haute temperature
JP2019571109A JP2020510761A (ja) 2017-03-10 2018-03-01 高温安定性のあるアルミニウム合金製真空チャンバ要素
CN201880017403.3A CN110402296B (zh) 2017-03-10 2018-03-01 高温稳定的铝合金真空室元件
SG11201907957Y SG11201907957YA (en) 2017-03-10 2018-03-01 Aluminium alloy vacuum chamber elements stable at high temperature
PCT/FR2018/050481 WO2018162823A1 (fr) 2017-03-10 2018-03-01 Elements de chambres a vide en alliage d'aluminium stables a haute temperature
TW107108171A TW201840864A (zh) 2017-03-10 2018-03-09 高溫穩定的鋁合金真空腔室元件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1751981 2017-03-10
FR1751981A FR3063740B1 (fr) 2017-03-10 2017-03-10 Elements de chambres a vide en alliage d’aluminium stables a haute temperature

Publications (2)

Publication Number Publication Date
FR3063740A1 FR3063740A1 (fr) 2018-09-14
FR3063740B1 true FR3063740B1 (fr) 2019-03-15

Family

ID=59325372

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1751981A Active FR3063740B1 (fr) 2017-03-10 2017-03-10 Elements de chambres a vide en alliage d’aluminium stables a haute temperature

Country Status (9)

Country Link
US (1) US11248280B2 (fr)
EP (1) EP3592875B1 (fr)
JP (1) JP2020510761A (fr)
KR (1) KR102584052B1 (fr)
CN (1) CN110402296B (fr)
FR (1) FR3063740B1 (fr)
SG (1) SG11201907957YA (fr)
TW (1) TW201840864A (fr)
WO (1) WO2018162823A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113574192A (zh) 2019-03-13 2021-10-29 诺维尔里斯公司 可时效硬化且可高度成形的铝合金及其制备方法
CN110129633B (zh) * 2019-05-23 2020-06-05 江苏亨通电力特种导线有限公司 家具用铝合金铆钉线及其制备方法
FR3101641B1 (fr) 2019-10-04 2022-01-21 Constellium Issoire Tôles de précision en alliage d’aluminium
CN111041294B9 (zh) * 2019-12-31 2021-03-12 辽宁忠旺集团有限公司 具有高长期热稳定性的6系低合金成分及其制备方法
PT3922743T (pt) * 2020-06-10 2024-08-22 Novelis Koblenz Gmbh Método de fabrico de uma chapa de liga de alumínio para elementos da câmara de vácuo
CN113234972A (zh) * 2021-04-30 2021-08-10 广东坚美铝型材厂(集团)有限公司 一种铝合金建筑模板及其制备方法
CN113684400A (zh) * 2021-08-22 2021-11-23 山东华建铝业科技有限公司 一种高性能光伏铝合金边框及其生产工艺
FR3136242B1 (fr) 2022-06-01 2024-05-03 Constellium Valais Tôles pour éléments de chambres à vide en alliage d’aluminium

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996015295A1 (fr) 1994-11-16 1996-05-23 Kabushiki Kaisha Kobe Seiko Sho Chambre a vide en aluminium ou en un alliage de ce metal et traitement de surface et matiere pour la chambre a vide
JPH11140690A (ja) 1997-11-14 1999-05-25 Kobe Steel Ltd 耐熱割れ性および耐食性に優れたAl材料
JP3997009B2 (ja) * 1998-10-07 2007-10-24 株式会社神戸製鋼所 高速動部品用アルミニウム合金鍛造材
JP3919996B2 (ja) 2000-02-04 2007-05-30 株式会社神戸製鋼所 プラズマ処理装置用アルミニウム合金、プラズマ処理装置用アルミニウム合金部材およびプラズマ処理装置
US6521046B2 (en) 2000-02-04 2003-02-18 Kabushiki Kaisha Kobe Seiko Sho Chamber material made of Al alloy and heater block
JP2003034894A (ja) 2001-07-25 2003-02-07 Kobe Steel Ltd 耐腐食性に優れたAl合金部材
US7033447B2 (en) 2002-02-08 2006-04-25 Applied Materials, Inc. Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
US6565984B1 (en) 2002-05-28 2003-05-20 Applied Materials Inc. Clean aluminum alloy for semiconductor processing equipment
JP2004225113A (ja) 2003-01-23 2004-08-12 Kobe Steel Ltd 耐腐食性及び耐プラズマ性に優れたAl合金部材
JP4168066B2 (ja) * 2006-08-11 2008-10-22 株式会社神戸製鋼所 プラズマ処理装置に用いられる陽極酸化処理用アルミニウム合金およびその製造方法、陽極酸化皮膜を有するアルミニウム合金部材、ならびにプラズマ処理装置
JP5064935B2 (ja) 2007-08-22 2012-10-31 株式会社神戸製鋼所 耐久性と低汚染性を兼備した陽極酸化処理アルミニウム合金
FR2955336B1 (fr) 2010-01-20 2013-02-15 Alcan Rhenalu Procede de fabrication de produits en alliage 6xxx pour chambre a vide
FR2996857B1 (fr) 2012-10-17 2015-02-27 Constellium France Elements de chambres a vide en alliage d'aluminium

Also Published As

Publication number Publication date
CN110402296A (zh) 2019-11-01
US11248280B2 (en) 2022-02-15
WO2018162823A1 (fr) 2018-09-13
KR102584052B1 (ko) 2023-09-27
US20210130933A1 (en) 2021-05-06
TW201840864A (zh) 2018-11-16
CN110402296B (zh) 2021-04-20
JP2020510761A (ja) 2020-04-09
EP3592875C0 (fr) 2024-05-01
EP3592875B1 (fr) 2024-05-01
SG11201907957YA (en) 2019-11-28
EP3592875A1 (fr) 2020-01-15
KR20190126851A (ko) 2019-11-12
FR3063740A1 (fr) 2018-09-14

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