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FR3061901B1 - STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE - Google Patents

STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE Download PDF

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Publication number
FR3061901B1
FR3061901B1 FR1750445A FR1750445A FR3061901B1 FR 3061901 B1 FR3061901 B1 FR 3061901B1 FR 1750445 A FR1750445 A FR 1750445A FR 1750445 A FR1750445 A FR 1750445A FR 3061901 B1 FR3061901 B1 FR 3061901B1
Authority
FR
France
Prior art keywords
microfabricated
fixed part
fixing
microfabricated element
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1750445A
Other languages
French (fr)
Other versions
FR3061901A1 (en
Inventor
Remy Vicarini
Valerie Volant
Luca Ribetto
Vincent Maurice
Jaroslaw Rutkowski
Serge Galliou
Nicolas Passilly
Christophe Gorecki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tronics Microsystems SA
Universite de Franche-Comte
Original Assignee
Tronics Microsystems SA
Universite de Franche-Comte
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tronics Microsystems SA, Universite de Franche-Comte filed Critical Tronics Microsystems SA
Priority to FR1750445A priority Critical patent/FR3061901B1/en
Priority to PCT/EP2018/050154 priority patent/WO2018134051A1/en
Publication of FR3061901A1 publication Critical patent/FR3061901A1/en
Application granted granted Critical
Publication of FR3061901B1 publication Critical patent/FR3061901B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/11—Structural features, others than packages, for protecting a device against environmental influences
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/99—Microstructural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/05—Aligning components to be assembled
    • B81C2203/051—Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

L'invention concerne une structure (10a) d'au moins un élément (12a-12c) microfabriqué comportant un substrat souple (11) pourvu d'au moins une zone de fixation (14) destinée à fixer ledit au moins un élément microfabriqué, ledit substrat (11) comportant au moins une zone de pliage prédéterminée (15) configurée pour délimiter au moins deux parties distinctes (16a-17a) dans ledit substrat (11) : une partie fixe (16a) et une partie mobile (17a) intégrant ladite zone de fixation (14), ladite partie mobile (17a) étant déplaçable entre deux positions : - une position initiale de fixation dans laquelle ladite partie mobile est coplanaire avec ladite partie fixe (16a) de sorte à fixer l'au moins un élément (12a-12c) microfabriqué ; et - une position opérationnelle dans laquelle ladite partie mobile a été déplacée par rapport à ladite partie fixe (16a) de sorte que l'au moins un élément microfabriqué soit orienté angulairement par rapport à ladite partie fixe.The invention relates to a structure (10a) of at least one microfabricated element (12a-12c) comprising a flexible substrate (11) provided with at least one fixing zone (14) for fixing said at least one microfabricated element, said substrate (11) comprising at least one predetermined folding zone (15) configured to delimit at least two distinct parts (16a-17a) in said substrate (11): a fixed part (16a) and a movable part (17a) integrating said fixing zone (14), said movable part (17a) being movable between two positions: - an initial fixing position in which said movable part is coplanar with said fixed part (16a) so as to fix the at least one element (12a-12c) microfabricated; and - an operational position in which said movable part has been moved relative to said fixed part (16a) so that at least one microfabricated element is oriented angularly with respect to said fixed part.

FR1750445A 2017-01-19 2017-01-19 STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE Active FR3061901B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1750445A FR3061901B1 (en) 2017-01-19 2017-01-19 STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE
PCT/EP2018/050154 WO2018134051A1 (en) 2017-01-19 2018-01-03 Structure of at least one microfabricated element and associated installation method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1750445 2017-01-19
FR1750445A FR3061901B1 (en) 2017-01-19 2017-01-19 STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE

Publications (2)

Publication Number Publication Date
FR3061901A1 FR3061901A1 (en) 2018-07-20
FR3061901B1 true FR3061901B1 (en) 2021-07-30

Family

ID=59152975

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1750445A Active FR3061901B1 (en) 2017-01-19 2017-01-19 STRUCTURE OF AT LEAST ONE MICROFABRICATED ELEMENT AND ASSOCIATED ASSEMBLY PROCEDURE

Country Status (2)

Country Link
FR (1) FR3061901B1 (en)
WO (1) WO2018134051A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005027217D1 (en) * 2004-07-13 2011-05-12 Draper Lab Charles S DEVICE FOR SUSPENDING A DEVICE IN CHIP SIZE AND AN ATOCHING SYSTEM
JP4893112B2 (en) * 2006-06-03 2012-03-07 株式会社ニコン High frequency circuit components
US10349543B2 (en) * 2013-02-22 2019-07-09 Vibrant Composites Inc. Layered assemblies
FR3035101B1 (en) 2015-04-20 2019-08-16 Tronic's Microsystems SUPPORT ELEMENT OF A THERMO-REGULATED DEVICE, SENSOR AND MICRO-CLOCK

Also Published As

Publication number Publication date
WO2018134051A1 (en) 2018-07-26
FR3061901A1 (en) 2018-07-20

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