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FR3045153B1 - METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT - Google Patents

METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT Download PDF

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Publication number
FR3045153B1
FR3045153B1 FR1562156A FR1562156A FR3045153B1 FR 3045153 B1 FR3045153 B1 FR 3045153B1 FR 1562156 A FR1562156 A FR 1562156A FR 1562156 A FR1562156 A FR 1562156A FR 3045153 B1 FR3045153 B1 FR 3045153B1
Authority
FR
France
Prior art keywords
separation means
separation
particles
sample
taking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1562156A
Other languages
French (fr)
Other versions
FR3045153A1 (en
Inventor
Isabelle Zacharie-Aubrun
Eric Brochard
Smail Chahal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1562156A priority Critical patent/FR3045153B1/en
Publication of FR3045153A1 publication Critical patent/FR3045153A1/en
Application granted granted Critical
Publication of FR3045153B1 publication Critical patent/FR3045153B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0093—Radioactive materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31749—Focused ion beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

L'invention concerne un procédé de prélèvement d'un échantillon de matière à proximité d'une surface d'un objet irradiant, qui comporte les opérations suivantes : - disposer la surface ou l'objet en regard de moyens de séparation aptes à provoquer la séparation de particules de la matière déposée sur la surface - respectivement de la matière superficielle de l'objet - en fonction de signaux de commande délivrés aux moyens de séparation; - disposer au moins un support de collecte de matière à distance de la surface ou objet, le (ou les) support(s) de collecte s'étendant autour des moyens de séparation; et - commander le fonctionnement des moyens de séparation afin de soumettre la surface ou objet aux moyens de séparation, provoquer la séparation de particules de matière de la surface ou objet par les moyens de séparation, et permettre le dépôt de ces particules sur le(s) support(s)de collecte.The invention relates to a method for taking a sample of material near a surface of an irradiating object, which comprises the following operations: placing the surface or the object facing separation means capable of causing the separation of particles from the material deposited on the surface - respectively from the surface material of the object - as a function of control signals delivered to the separation means; - Having at least one material collection support at a distance from the surface or object, the collection support (s) extending around the separation means; and - controlling the operation of the separation means in order to subject the surface or object to the separation means, cause the separation of particles of material from the surface or object by the separation means, and allow the deposition of these particles on the (s) ) collection medium (s).

FR1562156A 2015-12-10 2015-12-10 METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT Active FR3045153B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1562156A FR3045153B1 (en) 2015-12-10 2015-12-10 METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1562156A FR3045153B1 (en) 2015-12-10 2015-12-10 METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT

Publications (2)

Publication Number Publication Date
FR3045153A1 FR3045153A1 (en) 2017-06-16
FR3045153B1 true FR3045153B1 (en) 2021-05-14

Family

ID=56683978

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1562156A Active FR3045153B1 (en) 2015-12-10 2015-12-10 METHOD AND DEVICE FOR TAKING A SAMPLE OF AN IRRADIANT OBJECT

Country Status (1)

Country Link
FR (1) FR3045153B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56125650A (en) * 1980-03-07 1981-10-02 Hitachi Ltd Sample holding device
US4383394A (en) * 1980-12-29 1983-05-17 General Electric Company Sample cutting device for irradiated components
GB2183336A (en) * 1985-11-22 1987-06-03 Coal Ind Bulk sampling device
US20110001041A1 (en) * 2007-10-11 2011-01-06 Migeon Henri-Noel Method and apparatus allowing quantitative investigations of organic and inorganic sample by decoupling the sputtering process from the analysis process

Also Published As

Publication number Publication date
FR3045153A1 (en) 2017-06-16

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