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FR3037454B1 - Dispositif de commande d'actionneur piezoelectrique - Google Patents

Dispositif de commande d'actionneur piezoelectrique

Info

Publication number
FR3037454B1
FR3037454B1 FR1555381A FR1555381A FR3037454B1 FR 3037454 B1 FR3037454 B1 FR 3037454B1 FR 1555381 A FR1555381 A FR 1555381A FR 1555381 A FR1555381 A FR 1555381A FR 3037454 B1 FR3037454 B1 FR 3037454B1
Authority
FR
France
Prior art keywords
control device
piezoelectric actuator
actuator control
piezoelectric
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1555381A
Other languages
English (en)
Other versions
FR3037454A1 (fr
Inventor
Issa Ouattara
Jean-Luc Gach
Philippe Amram
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aix Marseille Universite
Centre National de la Recherche Scientifique CNRS
Original Assignee
Aix Marseille Universite
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1555381A priority Critical patent/FR3037454B1/fr
Application filed by Aix Marseille Universite, Centre National de la Recherche Scientifique CNRS filed Critical Aix Marseille Universite
Priority to PCT/EP2016/063355 priority patent/WO2016198639A1/fr
Priority to CN201680040955.7A priority patent/CN107924983B/zh
Priority to KR1020187001063A priority patent/KR20180032556A/ko
Priority to JP2017564641A priority patent/JP2018520514A/ja
Priority to US15/735,443 priority patent/US10389277B2/en
Priority to EP16730318.9A priority patent/EP3308409A1/fr
Priority to CA2989250A priority patent/CA2989250A1/fr
Publication of FR3037454A1 publication Critical patent/FR3037454A1/fr
Application granted granted Critical
Publication of FR3037454B1 publication Critical patent/FR3037454B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
FR1555381A 2015-06-12 2015-06-12 Dispositif de commande d'actionneur piezoelectrique Expired - Fee Related FR3037454B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1555381A FR3037454B1 (fr) 2015-06-12 2015-06-12 Dispositif de commande d'actionneur piezoelectrique
CN201680040955.7A CN107924983B (zh) 2015-06-12 2016-06-10 控制压电驱动器的装置
KR1020187001063A KR20180032556A (ko) 2015-06-12 2016-06-10 압전 액추에이터를 제어하는 디바이스
JP2017564641A JP2018520514A (ja) 2015-06-12 2016-06-10 圧電アクチュエータを制御するためのデバイス
PCT/EP2016/063355 WO2016198639A1 (fr) 2015-06-12 2016-06-10 Dispositif de commande d'actionneur piezoelectrique
US15/735,443 US10389277B2 (en) 2015-06-12 2016-06-10 Device for controlling a piezoelectric actuator
EP16730318.9A EP3308409A1 (fr) 2015-06-12 2016-06-10 Dispositif de commande d'actionneur piezoelectrique
CA2989250A CA2989250A1 (fr) 2015-06-12 2016-06-10 Dispositif de commande d'actionneur piezoelectrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1555381A FR3037454B1 (fr) 2015-06-12 2015-06-12 Dispositif de commande d'actionneur piezoelectrique

Publications (2)

Publication Number Publication Date
FR3037454A1 FR3037454A1 (fr) 2016-12-16
FR3037454B1 true FR3037454B1 (fr) 2017-06-02

Family

ID=54478106

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555381A Expired - Fee Related FR3037454B1 (fr) 2015-06-12 2015-06-12 Dispositif de commande d'actionneur piezoelectrique

Country Status (8)

Country Link
US (1) US10389277B2 (fr)
EP (1) EP3308409A1 (fr)
JP (1) JP2018520514A (fr)
KR (1) KR20180032556A (fr)
CN (1) CN107924983B (fr)
CA (1) CA2989250A1 (fr)
FR (1) FR3037454B1 (fr)
WO (1) WO2016198639A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700067789A1 (it) * 2017-06-19 2018-12-19 Istituto Naz Di Astrofisica Inaf Metodo e relativo circuito elettronico per la misura di una grandezza fisica generata da un attuatore
CN108846191B (zh) * 2018-06-07 2022-04-15 哈尔滨工业大学 压电陶瓷作动器的分布参数饱和电容模型建模方法
CN109231161B (zh) * 2018-09-30 2020-06-16 重庆大学 夹爪为光纤Fabry-Perot干涉仪且可自传感的微夹钳的制作方法
CN113841090A (zh) 2019-05-20 2021-12-24 Asml荷兰有限公司 包括压电致动器或电致伸缩致动器的致动器组件
CN112392699B (zh) * 2019-08-19 2023-01-24 研能科技股份有限公司 微型压电泵模块
TWI712258B (zh) * 2019-08-19 2020-12-01 研能科技股份有限公司 微型壓電泵模組
US11646708B2 (en) * 2020-12-07 2023-05-09 Cirrus Logic, Inc. Driver circuitry
US12253356B2 (en) * 2021-04-26 2025-03-18 Texas Instruments Incorporated Circuits and methods to calibrate mirror displacement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263527A (en) * 1979-05-17 1981-04-21 The Charles Stark Draper Laboratory, Inc. Charge control of piezoelectric actuators to reduce hysteresis effects
JPH0210785A (ja) * 1988-06-29 1990-01-16 Yokogawa Electric Corp 可変周波数光源
FR2640815B1 (fr) * 1988-12-19 1991-04-05 Metravib Sa Procede et dispositif de conditionnement d'un element piezoelectrique pour en modifier les proprietes mecaniques
JPH04368483A (ja) * 1991-06-13 1992-12-21 Mitsubishi Electric Corp 圧電素子駆動装置
JPH09182466A (ja) * 1995-12-22 1997-07-11 Hitachi Ltd 圧電素子用増幅器
WO1999066501A1 (fr) * 1998-06-15 1999-12-23 Seagate Technology Llc Unite de disque possedant un microactionneur entraine par une charge de retroaction
JP4055887B2 (ja) * 2001-11-20 2008-03-05 Ｔｄｋ株式会社 圧電アクチュエータ装置
FR2850219B1 (fr) * 2003-01-17 2005-04-15 Centre Nat Rech Scient Dispositif de commande d'un actionneur piezoelectrique et scanner muni de ceux-ci
JP4062293B2 (ja) * 2004-09-16 2008-03-19 コニカミノルタホールディングス株式会社 駆動装置
DE102007023546A1 (de) * 2007-05-21 2008-11-27 Siemens Ag Schaltung zum Regeln zumindest eines Festkörperaktors einer Festkörperaktor-Antriebsvorrichtung

Also Published As

Publication number Publication date
US20180183357A1 (en) 2018-06-28
CN107924983B (zh) 2020-08-04
US10389277B2 (en) 2019-08-20
KR20180032556A (ko) 2018-03-30
EP3308409A1 (fr) 2018-04-18
CN107924983A (zh) 2018-04-17
JP2018520514A (ja) 2018-07-26
CA2989250A1 (fr) 2016-12-15
WO2016198639A1 (fr) 2016-12-15
FR3037454A1 (fr) 2016-12-16

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